[Scan]
initial_time=2016-01-18T18:10:31
final_time=2016-01-18T18:10:51
ip_count=19
run=1024
dataset=3
scan=201
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.80146E-1
ql1_imon=1.33625E-8
ql2_vset=
ql2_vmon=-8.96597E-1
ql2_imon=1.86789E-9
ql3_vset=
ql3_vmon=-9.04675E0
ql3_imon=1.61541E-10
ql4_vset=
ql4_vmon=-9.04207E0
ql4_imon=4.80413E-12
mult1=-9.20236E-9
mult2=-2.7869E-9
rf_tmon=-5.68783E-3
rf_agc=3.22553E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.24385E-3
ql5_imon=1.65449E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66031E0
bslens_imon=2.34859E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=2.00598E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12527E2
lens4a_imon=2.05022E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54096E1
cs_ef1b_imon=2.83864E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.02185E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04557E1
cs_ea1_imon=2.52167E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37138E0
lens1_imon=2.77332E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0356E1
cs_ea2_imon=1.47648E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=2.95576E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.34167E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11639E1
os_restr1_imon=4.25099E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.36983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.0767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24679E0
cs_ionrep_imon=1.19687E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93565E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=2.99017E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20427E0
olens4_imon=3.3445E-8
tplens_vset=1.4E-1
tplens_vmon=1.67034E0
tplens_imon=-2.45796E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26243E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03054E2
lens6_imon=2.98056E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=4.07997E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.78512E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.15959E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4975E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.1535E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0812E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.43083E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02093E1
cs_anode2_imon=2.23882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73489E1
iondef1_imon=1.09847E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68799E1
iondef4_imon=1.09233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.11655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.88178E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14694E0
cs_ionaccel_imon=-1.66754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47268E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-7.32698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86327E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.80825E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.45596E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31106E0
defgridb_imon=6.2207E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42188E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06478E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65612E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.95713E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62806E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36988E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.70394E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20572E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.59785E-1
res40_imon=-2.4877E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.80075E-1	-8.96764E-1	-9.04672E0	-9.04183E0	4.19617E-3	9.58443E-2	2.73255E1	-3.26567E1	-3.26098E1	2.6822E1	1.19965E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.01609E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.7986E-1	-8.96668E-1	-9.04686E0	-9.04198E0	3.91006E-3	9.56297E-2	2.73106E1	-3.26505E1	-3.25991E1	2.68207E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.79812E-1	-8.96668E-1	-9.04696E0	-9.04214E0	4.17233E-3	9.55105E-2	2.73294E1	-3.26573E1	-3.26225E1	2.68348E1	1.20588E-7	2.52066E-3	2.52066E-3	6.29603E-3	2.97823E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.80027E-1	-8.96382E-1	-9.04717E0	-9.04181E0	3.98159E-3	9.56297E-2	2.73267E1	-3.26579E1	-3.26002E1	2.68064E1	1.20092E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.79812E-1	-8.96478E-1	-9.04706E0	-9.04169E0	4.36306E-3	9.57251E-2	2.72835E1	-3.2617E1	-3.26987E1	2.684E1	1.19653E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.80098E-1	-8.96263E-1	-9.04684E0	-9.04179E0	4.3869E-3	9.55582E-2	2.73341E1	-3.26637E1	-3.26046E1	2.6847E1	1.19851E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.79955E-1	-8.96239E-1	-9.04698E0	-9.04205E0	4.55379E-3	9.57966E-2	2.73051E1	-3.26615E1	-3.26284E1	2.68358E1	1.19891E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.79979E-1	-8.96358E-1	-9.0471E0	-9.04198E0	4.29153E-3	9.55582E-2	2.73009E1	-3.26549E1	-3.25834E1	2.68442E1	1.19925E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.79884E-1	-8.96573E-1	-9.04694E0	-9.04193E0	4.31538E-3	9.57251E-2	2.73387E1	-3.26843E1	-3.26242E1	2.68376E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.79812E-1	-8.9643E-1	-9.04715E0	-9.04205E0	4.33922E-3	9.5439E-2	2.73145E1	-3.2672E1	-3.25611E1	2.68466E1	1.19902E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.0071E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09325E0	-8.80146E-1	-8.96525E-1	-9.04689E0	-9.04167E0	4.43459E-3	9.52959E-2	2.73021E1	-3.26422E1	-3.26098E1	2.68377E1	1.19809E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.79931E-1	-8.96573E-1	-9.04701E0	-9.04191E0	4.12464E-3	9.55582E-2	2.73363E1	-3.26699E1	-3.26488E1	2.68556E1	1.20158E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09364E0	-8.80289E-1	-8.9643E-1	-9.04722E0	-9.04181E0	4.02927E-3	9.5582E-2	2.73207E1	-3.26813E1	-3.25894E1	2.68262E1	1.20137E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.02277E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.80289E-1	-8.96573E-1	-9.0471E0	-9.04191E0	4.26769E-3	9.56059E-2	2.73586E1	-3.26747E1	-3.2632E1	2.68406E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09333E0	-8.8017E-1	-8.96358E-1	-9.0471E0	-9.04212E0	4.07696E-3	9.53913E-2	2.73455E1	-3.2675E1	-3.26205E1	2.68064E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.80361E-1	-8.96502E-1	-9.04725E0	-9.04198E0	4.29153E-3	9.55343E-2	2.73051E1	-3.26561E1	-3.26254E1	2.68472E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.80384E-1	-8.9612E-1	-9.04694E0	-9.04174E0	4.43459E-3	9.5439E-2	2.7376E1	-3.26831E1	-3.26561E1	2.68496E1	1.19766E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.80408E-1	-8.96215E-1	-9.04701E0	-9.04191E0	4.57764E-3	9.55582E-2	2.73381E1	-3.26543E1	-3.26437E1	2.68221E1	1.19851E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.0071E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.80361E-1	-8.96454E-1	-9.0467E0	-9.04188E0	4.50611E-3	9.56774E-2	2.73393E1	-3.26644E1	-3.2603E1	2.6804E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.80146E-1	-8.96597E-1	-9.04675E0	-9.04207E0	4.24385E-3	9.57251E-2	2.73489E1	-3.26602E1	-3.26243E1	2.68799E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
