[Scan]
initial_time=2016-01-18T18:10:58
final_time=2016-01-18T18:11:17
ip_count=19
run=1024
dataset=3
scan=202
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08756E-4
ql1_vset=
ql1_vmon=-8.7986E-1
ql1_imon=1.33682E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.96904E-9
ql3_vset=
ql3_vmon=-9.04694E0
ql3_imon=1.40011E-10
ql4_vset=
ql4_vmon=-9.0415E0
ql4_imon=1.09196E-11
mult1=-1.00786E-8
mult2=-2.67818E-9
rf_tmon=-4.10244E-3
rf_agc=3.31085E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.67805E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68425E0
bslens_imon=2.26004E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19915E1
lens5a_imon=1.994E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54142E1
cs_ef1b_imon=2.84282E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.01982E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05005E1
cs_ea1_imon=2.51613E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37835E0
lens1_imon=3.02133E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64678E1
os_ef1alow_imon=2.97279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.51324E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=2.95055E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.34461E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11176E1
os_restr1_imon=4.26732E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15068E1
os_ea1_imon=2.36213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.07774E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25499E0
cs_ionrep_imon=1.17605E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91938E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02226E1
cs_anode1_imon=2.97974E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=3.34901E-8
tplens_vset=1.4E-1
tplens_vmon=1.68604E0
tplens_imon=-3.81874E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.4837E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.57199E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0306E2
lens6_imon=2.9844E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=4.06797E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25152E0
ionrepsh_imon=1.77674E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.16955E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74443E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53077E0
os_ea2_imon=-5.83494E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.15385E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09626E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1132E1
os_restr2_imon=3.43118E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.27321E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24994E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72957E1
iondef1_imon=1.10827E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.15469E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=7.88741E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18285E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.50122E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82723E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-6.04114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.7003E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=6.57401E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.22754E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3862E0
defgridb_imon=6.12906E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.43787E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08082E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65712E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30887E1
cs_fil1_imon=9.96014E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62186E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67122E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53111E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86023E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.94362E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.928E-1
res40_imon=-2.59891E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.80003E-1	-8.96621E-1	-9.04667E0	-9.04174E0	4.12464E-3	9.57012E-2	2.73007E1	-3.26716E1	-3.26079E1	2.68525E1	1.1969E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.006E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.8017E-1	-8.96454E-1	-9.04686E0	-9.04183E0	4.22001E-3	9.54866E-2	2.73315E1	-3.26591E1	-3.26224E1	2.6837E1	1.201E-7	2.51838E-3	2.51838E-3	6.3245E-3	3.00794E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.80289E-1	-8.96478E-1	-9.04691E0	-9.04181E0	4.17233E-3	9.55582E-2	2.73535E1	-3.26685E1	-3.26638E1	2.68389E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03185E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.80384E-1	-8.96287E-1	-9.04698E0	-9.04174E0	4.14848E-3	9.58443E-2	2.72992E1	-3.26667E1	-3.25924E1	2.6813E1	1.20517E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.80408E-1	-8.96287E-1	-9.04722E0	-9.04183E0	4.41074E-3	9.54151E-2	2.7308E1	-3.26585E1	-3.2636E1	2.6858E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.80337E-1	-8.96406E-1	-9.04703E0	-9.04164E0	4.55379E-3	9.52721E-2	2.73315E1	-3.26873E1	-3.26404E1	2.68356E1	1.20414E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.79884E-1	-8.96406E-1	-9.04701E0	-9.0416E0	4.24385E-3	9.56535E-2	2.73111E1	-3.26446E1	-3.25834E1	2.68424E1	1.20191E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.8017E-1	-8.96263E-1	-9.04696E0	-9.04152E0	4.26769E-3	9.56297E-2	2.73399E1	-3.26832E1	-3.25824E1	2.68322E1	1.20017E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.97704E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.7986E-1	-8.96382E-1	-9.04717E0	-9.04164E0	4.24385E-3	9.54866E-2	2.72973E1	-3.26392E1	-3.26759E1	2.68532E1	1.2014E-7	2.51918E-3	2.51918E-3	6.32371E-3	3.01155E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.80051E-1	-8.96215E-1	-9.04698E0	-9.04167E0	4.14848E-3	9.54866E-2	2.73213E1	-3.26819E1	-3.2623E1	2.6825E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.79979E-1	-8.96406E-1	-9.04727E0	-9.04162E0	4.45843E-3	9.56297E-2	2.73051E1	-3.26675E1	-3.26092E1	2.68142E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.79908E-1	-8.9643E-1	-9.04737E0	-9.04171E0	4.22001E-3	9.54628E-2	2.73333E1	-3.26452E1	-3.2614E1	2.68454E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.79788E-1	-8.96573E-1	-9.04725E0	-9.04176E0	4.29153E-3	9.54866E-2	2.7361E1	-3.26236E1	-3.26074E1	2.68623E1	1.20106E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.80098E-1	-8.96478E-1	-9.04689E0	-9.04176E0	4.05312E-3	9.55582E-2	2.7324E1	-3.26472E1	-3.26425E1	2.68499E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02133E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.79836E-1	-8.96573E-1	-9.04703E0	-9.04202E0	4.12464E-3	9.56059E-2	2.73303E1	-3.26524E1	-3.2635E1	2.68514E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.79812E-1	-8.96358E-1	-9.04694E0	-9.04183E0	3.95775E-3	9.55105E-2	2.73189E1	-3.26404E1	-3.26194E1	2.6816E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01609E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.80122E-1	-8.9643E-1	-9.04689E0	-9.04183E0	3.91006E-3	9.54866E-2	2.73225E1	-3.26885E1	-3.25852E1	2.68376E1	1.20226E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.8017E-1	-8.96549E-1	-9.04686E0	-9.04169E0	3.98159E-3	9.57489E-2	2.73027E1	-3.26789E1	-3.26825E1	2.68358E1	1.20055E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.80075E-1	-8.96382E-1	-9.04713E0	-9.04155E0	3.8147E-3	9.58204E-2	2.73261E1	-3.26741E1	-3.25743E1	2.68268E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.7986E-1	-8.96168E-1	-9.04694E0	-9.0415E0	4.17233E-3	9.56297E-2	2.72957E1	-3.26555E1	-3.26166E1	2.68334E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
