[Scan]
initial_time=2016-01-18T18:11:24
final_time=2016-01-18T18:11:44
ip_count=19
run=1024
dataset=3
scan=203
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.80146E-1
ql1_imon=1.33617E-8
ql2_vset=
ql2_vmon=-8.96096E-1
ql2_imon=1.92258E-9
ql3_vset=
ql3_vmon=-9.04708E0
ql3_imon=1.5645E-10
ql4_vset=
ql4_vmon=-9.04195E0
ql4_imon=2.36034E-12
mult1=-8.99103E-9
mult2=-2.67622E-9
rf_tmon=-5.63029E-3
rf_agc=3.2731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.69778E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65871E0
bslens_imon=2.37043E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19884E1
lens5a_imon=2.01807E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53855E1
cs_ef1b_imon=2.83656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02191E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04713E1
cs_ea1_imon=2.51392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3395E0
lens1_imon=2.80384E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.96343E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03727E1
cs_ea2_imon=1.48218E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84369E1
cs_ef1a_imon=2.92863E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.34209E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11579E1
os_restr1_imon=4.2651E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15202E1
os_ea1_imon=2.35267E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63429E1
os_ef1bup_imon=3.06411E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=1.20377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93552E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02458E1
cs_anode1_imon=2.99974E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.35222E-8
tplens_vset=1.4E-1
tplens_vmon=1.71306E0
tplens_imon=-2.70438E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26726E1
iondef3_imon=1.48879E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.56592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.98192E-4
ql6_vset=1.0E-1
ql6_vmon=9.57727E-2
ql6_imon=4.06371E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27842E0
ionrepsh_imon=1.78373E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33719E1
lens5b_imon=2.1929E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74701E1
cs_ef2b_imon=3.13147E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52635E0
os_ea2_imon=-7.95673E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00645E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71351E1
cs_ef2a_imon=3.15842E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05705E0
os_ef2alow_imon=-2.44707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13226E-1
os_ef2bup_imon=-5.26523E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11354E1
os_restr2_imon=3.43051E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.2923E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0179E1
cs_anode2_imon=2.23438E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.10129E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.09925E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.13289E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8114E-1
olens1_imon=7.90154E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14324E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56667E1
einzel_imon=7.83006E-6
window_vset=0.0E0
window_vmon=2.55023E-1
window_imon=-8.22788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.39193E-4
mask2_vset=0.0E0
mask2_vmon=-1.86581E1
mask2_imon=-6.01975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.65951E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.8184E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.28486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34533E0
defgridb_imon=6.08748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.43287E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07111E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65868E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.9559E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62347E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66966E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3577E-2
os_fil2_imon=-2.7124E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98453E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73879E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34492E-1
cs_fil2_imon=-2.40052E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22706E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.9182E-1
res40_imon=-2.48449E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.80337E-1	-8.96335E-1	-9.04696E0	-9.04191E0	3.98159E-3	9.58681E-2	2.73281E1	-3.2639E1	-3.26608E1	2.68458E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
2.0E0	4.0E1	1.0E0	3.16E2	1.6E2	-2.09503E0	-8.79884E-1	-8.96502E-1	-9.04713E0	-9.042E0	3.88622E-3	9.57489E-2	2.73694E1	-3.26431E1	-3.26129E1	2.68278E1	1.20209E-7	2.50775E-3	2.50775E-3	6.32896E-3	2.9841E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80098E-1	-8.96382E-1	-9.04689E0	-9.04171E0	3.86238E-3	9.57489E-2	2.73172E1	-3.26686E1	-3.25885E1	2.68406E1	1.20028E-7	2.52405E-3	2.52405E-3	6.28667E-3	3.00494E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.80098E-1	-8.96478E-1	-9.04677E0	-9.04179E0	4.07696E-3	9.59873E-2	2.73249E1	-3.26524E1	-3.2641E1	2.68466E1	1.1995E-7	2.52338E-3	2.52338E-3	6.33648E-3	3.02303E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.80337E-1	-8.96406E-1	-9.04682E0	-9.04205E0	4.00543E-3	9.58443E-2	2.73297E1	-3.26518E1	-3.2641E1	2.6825E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.80146E-1	-8.9643E-1	-9.04725E0	-9.04217E0	4.07696E-3	9.58443E-2	2.72897E1	-3.26271E1	-3.26391E1	2.68015E1	1.20055E-7	2.51096E-3	2.51096E-3	6.35059E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.80098E-1	-8.96597E-1	-9.04725E0	-9.04205E0	4.17233E-3	9.5892E-2	2.73257E1	-3.26738E1	-3.26296E1	2.68454E1	1.20226E-7	2.51679E-3	2.51679E-3	6.31779E-3	2.98276E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.80337E-1	-8.96406E-1	-9.04722E0	-9.04238E0	4.57764E-3	9.57966E-2	2.7302E1	-3.26119E1	-3.26076E1	2.68358E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.8017E-1	-8.96502E-1	-9.04715E0	-9.04219E0	4.24385E-3	9.58204E-2	2.73004E1	-3.26608E1	-3.26655E1	2.6828E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.79908E-1	-8.96573E-1	-9.04713E0	-9.04217E0	4.22001E-3	9.58681E-2	2.73235E1	-3.26878E1	-3.26156E1	2.68268E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.03449E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.80146E-1	-8.96907E-1	-9.04713E0	-9.04212E0	4.07696E-3	9.58681E-2	2.73234E1	-3.2662E1	-3.26337E1	2.68689E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.80027E-1	-8.96478E-1	-9.0472E0	-9.04202E0	4.17233E-3	9.55343E-2	2.73216E1	-3.26529E1	-3.2604E1	2.68436E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.8017E-1	-8.9643E-1	-9.04708E0	-9.04222E0	4.12464E-3	9.57251E-2	2.73177E1	-3.26639E1	-3.26524E1	2.68328E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.80027E-1	-8.96406E-1	-9.04732E0	-9.04238E0	4.02927E-3	9.57251E-2	2.73228E1	-3.26602E1	-3.26248E1	2.68166E1	1.19705E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01347E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.80265E-1	-8.96454E-1	-9.04729E0	-9.04217E0	3.76701E-3	9.58681E-2	2.73333E1	-3.26603E1	-3.26076E1	2.68587E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.80289E-1	-8.96788E-1	-9.04732E0	-9.04193E0	4.05312E-3	9.59158E-2	2.73129E1	-3.26801E1	-3.26314E1	2.68532E1	1.20226E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.02133E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09704E0	-8.80122E-1	-8.96358E-1	-9.04722E0	-9.042E0	3.83854E-3	9.56297E-2	2.73417E1	-3.26815E1	-3.25995E1	2.6831E1	1.19913E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.8017E-1	-8.96168E-1	-9.04739E0	-9.04212E0	4.02927E-3	9.57012E-2	2.72883E1	-3.26795E1	-3.27137E1	2.68358E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09665E0	-8.80241E-1	-8.96478E-1	-9.04708E0	-9.04212E0	4.05312E-3	9.56297E-2	2.73476E1	-3.26443E1	-3.25723E1	2.68244E1	1.19953E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.80146E-1	-8.96096E-1	-9.04708E0	-9.04195E0	4.26769E-3	9.57727E-2	2.73417E1	-3.26543E1	-3.26726E1	2.68316E1	1.19749E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.9892E-1
