[Scan]
initial_time=2016-01-18T18:13:38
final_time=2016-01-18T18:13:57
ip_count=19
run=1024
dataset=3
scan=208
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08748E-4
ql1_vset=
ql1_vmon=-8.80003E-1
ql1_imon=1.33443E-8
ql2_vset=
ql2_vmon=-8.95977E-1
ql2_imon=1.91896E-9
ql3_vset=
ql3_vmon=-9.04715E0
ql3_imon=9.77039E-11
ql4_vset=
ql4_vmon=-9.04186E0
ql4_imon=7.98702E-12
mult1=-1.02723E-8
mult2=-2.76039E-9
rf_tmon=-3.92507E-3
rf_agc=3.31289E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.83854E-3
ql5_imon=1.68961E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64769E0
bslens_imon=2.45858E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=2.0166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.83854E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04627E1
cs_ea1_imon=2.53375E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32114E0
lens1_imon=2.69732E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03409E1
cs_ea2_imon=1.50238E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.94125E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.34508E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.26751E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15018E1
os_ea1_imon=2.36884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23373E0
cs_ionrep_imon=1.19348E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91962E2
cs_nozzle_imon=1.93574E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02169E1
cs_anode1_imon=2.97946E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.359E-8
tplens_vset=1.4E-1
tplens_vmon=1.67755E0
tplens_imon=-2.44728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26299E1
iondef3_imon=1.5123E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26898E1
iondef2_imon=1.55968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03032E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=4.10575E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26128E0
ionrepsh_imon=1.7863E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.16939E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49268E0
os_ea2_imon=-7.66289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00597E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15857E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04795E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.42815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29965E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.24749E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73001E1
iondef1_imon=1.11929E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68093E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.09137E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=7.86826E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.66085E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82732E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-7.81481E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.45749E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.7229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.28486E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40968E0
defgridb_imon=6.14257E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.43916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65549E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30862E1
cs_fil1_imon=9.95963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67157E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25257E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.31158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.03741E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09263E0	-8.79931E-1	-8.96525E-1	-9.04689E0	-9.04174E0	3.86238E-3	9.52959E-2	2.73452E1	-3.2685E1	-3.26543E1	2.68448E1	1.19978E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.01209E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.80003E-1	-8.96621E-1	-9.04675E0	-9.04181E0	4.05312E-3	9.53436E-2	2.73412E1	-3.26701E1	-3.26138E1	2.68665E1	1.19902E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.03545E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.80027E-1	-8.96597E-1	-9.04696E0	-9.04143E0	3.93391E-3	9.55582E-2	2.73275E1	-3.26425E1	-3.26378E1	2.681E1	1.20297E-7	2.5225E-3	2.5225E-3	6.29624E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.80027E-1	-8.96692E-1	-9.04703E0	-9.04171E0	4.14848E-3	9.55343E-2	2.73062E1	-3.26619E1	-3.26209E1	2.68513E1	1.19966E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.00726E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.80146E-1	-8.96478E-1	-9.04717E0	-9.04164E0	4.43459E-3	9.55343E-2	2.73191E1	-3.26623E1	-3.25897E1	2.68264E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.79955E-1	-8.96502E-1	-9.04708E0	-9.0421E0	4.22001E-3	9.53913E-2	2.72859E1	-3.26633E1	-3.26122E1	2.68532E1	1.19895E-7	2.51758E-3	2.51758E-3	6.33065E-3	3.01193E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.80051E-1	-8.96478E-1	-9.04727E0	-9.04207E0	4.1008E-3	9.56774E-2	2.73243E1	-3.27017E1	-3.26104E1	2.68514E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.80051E-1	-8.96597E-1	-9.0472E0	-9.04183E0	4.31538E-3	9.58443E-2	2.73495E1	-3.26363E1	-3.26271E1	2.6835E1	1.20174E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.79741E-1	-8.96645E-1	-9.04701E0	-9.04195E0	4.33922E-3	9.54151E-2	2.73109E1	-3.26422E1	-3.25976E1	2.68262E1	1.20177E-7	2.51679E-3	2.51679E-3	6.3074E-3	2.99753E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.79908E-1	-8.96335E-1	-9.0471E0	-9.04202E0	4.05312E-3	9.56535E-2	2.7346E1	-3.26585E1	-3.26585E1	2.68382E1	1.19841E-7	2.52025E-3	2.52025E-3	6.29157E-3	3.00852E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.80003E-1	-8.96621E-1	-9.04694E0	-9.04222E0	4.29153E-3	9.54866E-2	2.73246E1	-3.2675E1	-3.26284E1	2.68514E1	1.19705E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.80051E-1	-8.96311E-1	-9.04682E0	-9.04167E0	4.12464E-3	9.53674E-2	2.73484E1	-3.26573E1	-3.26332E1	2.68424E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.79741E-1	-8.96382E-1	-9.04686E0	-9.04179E0	3.95775E-3	9.54866E-2	2.73075E1	-3.26398E1	-3.26266E1	2.68364E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.80051E-1	-8.96311E-1	-9.04691E0	-9.04179E0	4.1008E-3	9.53913E-2	2.73297E1	-3.26729E1	-3.26284E1	2.68292E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01085E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.79812E-1	-8.96597E-1	-9.04694E0	-9.04202E0	3.86238E-3	9.54151E-2	2.73328E1	-3.26644E1	-3.2626E1	2.68453E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.79717E-1	-8.96406E-1	-9.04708E0	-9.04219E0	4.02927E-3	9.56297E-2	2.73327E1	-3.26524E1	-3.26194E1	2.68352E1	1.20004E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00966E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09441E0	-8.7986E-1	-8.96478E-1	-9.04703E0	-9.04171E0	3.86238E-3	9.56297E-2	2.73117E1	-3.26627E1	-3.26374E1	2.684E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.79979E-1	-8.96287E-1	-9.04682E0	-9.04207E0	3.76701E-3	9.54151E-2	2.73874E1	-3.26188E1	-3.26404E1	2.68184E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.79884E-1	-8.9612E-1	-9.0467E0	-9.04198E0	4.17233E-3	9.56535E-2	2.73311E1	-3.26732E1	-3.26201E1	2.68599E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.80003E-1	-8.95977E-1	-9.04715E0	-9.04186E0	3.83854E-3	9.57966E-2	2.73001E1	-3.26898E1	-3.26299E1	2.68093E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00453E-1
