[Scan]
initial_time=2016-01-18T18:14:57
final_time=2016-01-18T18:15:17
ip_count=19
run=1024
dataset=3
scan=211
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.80313E-1
ql1_imon=1.33709E-8
ql2_vset=
ql2_vmon=-8.95905E-1
ql2_imon=1.87665E-9
ql3_vset=
ql3_vmon=-9.04684E0
ql3_imon=1.42264E-10
ql4_vset=
ql4_vmon=-9.04207E0
ql4_imon=8.49962E-12
mult1=-9.94508E-9
mult2=-2.8763E-9
rf_tmon=-3.10048E-3
rf_agc=3.49738E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.69483E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69017E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=2.0202E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53971E1
cs_ef1b_imon=2.83746E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04393E1
cs_ea1_imon=2.51624E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.5702E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.49965E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.93693E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.34135E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1179E1
os_restr1_imon=4.2585E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.36195E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63341E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.18926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.93773E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.98234E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=3.35101E-8
tplens_vset=1.4E-1
tplens_vmon=1.67989E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03049E2
lens6_imon=2.9809E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=4.0841E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26532E0
ionrepsh_imon=1.79706E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3376E1
lens5b_imon=2.18783E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53449E0
os_ea2_imon=-7.64385E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.15749E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.36723E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=3.43572E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68472E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.15155E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81188E-1
olens1_imon=7.88146E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0911E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.72003E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82708E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.39866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18502E0
defgridb_imon=5.90838E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.41225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06368E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65564E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.94149E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61891E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67188E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85514E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.76207E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62275E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.44275E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09402E0	-8.79717E-1	-8.96525E-1	-9.04679E0	-9.04198E0	3.6478E-3	9.54151E-2	2.7347E1	-3.26762E1	-3.26354E1	2.681E1	1.20122E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00563E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.79908E-1	-8.96645E-1	-9.04701E0	-9.04214E0	3.57628E-3	9.53436E-2	2.73405E1	-3.26296E1	-3.26723E1	2.6807E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.79955E-1	-8.96716E-1	-9.04706E0	-9.04198E0	3.50475E-3	9.54628E-2	2.73423E1	-3.26667E1	-3.2629E1	2.68343E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.79812E-1	-8.96168E-1	-9.04663E0	-9.04174E0	3.50475E-3	9.55343E-2	2.73116E1	-3.26773E1	-3.26113E1	2.68226E1	1.1979E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09364E0	-8.80075E-1	-8.96573E-1	-9.04706E0	-9.04207E0	3.74317E-3	9.57251E-2	2.72949E1	-3.26561E1	-3.26561E1	2.68334E1	1.19749E-7	2.5131E-3	2.5131E-3	6.28056E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09356E0	-8.80051E-1	-8.96573E-1	-9.04698E0	-9.04181E0	3.62396E-3	9.56535E-2	2.73081E1	-3.27041E1	-3.26326E1	2.68532E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01209E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.80051E-1	-8.96311E-1	-9.04703E0	-9.04217E0	3.83854E-3	9.53913E-2	2.73267E1	-3.2638E1	-3.25785E1	2.68514E1	1.20017E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.80146E-1	-8.96263E-1	-9.04675E0	-9.04212E0	3.91006E-3	9.5892E-2	2.73104E1	-3.2662E1	-3.26354E1	2.68348E1	1.19965E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.80265E-1	-8.96192E-1	-9.04703E0	-9.04219E0	3.91006E-3	9.57489E-2	2.73259E1	-3.26621E1	-3.25979E1	2.68581E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09325E0	-8.80218E-1	-8.96311E-1	-9.04677E0	-9.04171E0	4.02927E-3	9.57251E-2	2.73488E1	-3.26413E1	-3.2626E1	2.68331E1	1.19705E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.80098E-1	-8.96239E-1	-9.04679E0	-9.04167E0	4.07696E-3	9.55582E-2	2.73039E1	-3.26885E1	-3.26225E1	2.68514E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.80027E-1	-8.9581E-1	-9.04686E0	-9.04145E0	3.8147E-3	9.55582E-2	2.7351E1	-3.26572E1	-3.26682E1	2.68508E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.79955E-1	-8.95953E-1	-9.04672E0	-9.04219E0	3.88622E-3	9.57012E-2	2.73375E1	-3.26732E1	-3.26006E1	2.68034E1	1.20174E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.7986E-1	-8.95953E-1	-9.04677E0	-9.04212E0	3.86238E-3	9.57489E-2	2.73454E1	-3.26554E1	-3.26152E1	2.68581E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.80051E-1	-8.96287E-1	-9.04653E0	-9.04207E0	3.76701E-3	9.54151E-2	2.73369E1	-3.26609E1	-3.26086E1	2.68322E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02922E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.80194E-1	-8.96049E-1	-9.04689E0	-9.042E0	3.88622E-3	9.53674E-2	2.73157E1	-3.26638E1	-3.26201E1	2.6854E1	1.19757E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01609E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.80289E-1	-8.95858E-1	-9.0466E0	-9.04233E0	3.83854E-3	9.55105E-2	2.73351E1	-3.26536E1	-3.2626E1	2.6843E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.98665E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.80241E-1	-8.95929E-1	-9.04698E0	-9.04174E0	3.83854E-3	9.53436E-2	2.73299E1	-3.26703E1	-3.26006E1	2.68298E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.80075E-1	-8.96096E-1	-9.04703E0	-9.042E0	4.1008E-3	9.53674E-2	2.7321E1	-3.26673E1	-3.26172E1	2.68499E1	1.19646E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.80313E-1	-8.95905E-1	-9.04684E0	-9.04207E0	4.22001E-3	9.56297E-2	2.73243E1	-3.26549E1	-3.26182E1	2.68472E1	1.198E-7	2.51417E-3	2.51417E-3	6.26985E-3	3.00966E-1
