[Scan]
initial_time=2016-01-18T18:15:24
final_time=2016-01-18T18:15:44
ip_count=19
run=1024
dataset=3
scan=212
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09387E0
qbias_imon=-1.08816E-4
ql1_vset=
ql1_vmon=-8.79836E-1
ql1_imon=1.33219E-8
ql2_vset=
ql2_vmon=-8.96454E-1
ql2_imon=1.89672E-9
ql3_vset=
ql3_vmon=-9.04691E0
ql3_imon=1.54281E-10
ql4_vset=
ql4_vmon=-9.04214E0
ql4_imon=-1.39475E-11
mult1=-9.54665E-9
mult2=-2.74285E-9
rf_tmon=-1.9552E-3
rf_agc=3.47898E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.70643E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65006E0
bslens_imon=2.34E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=2.00756E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5409E1
cs_ef1b_imon=2.81536E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02312E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04501E1
cs_ea1_imon=2.52621E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35865E0
lens1_imon=2.71543E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64828E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.4903E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.93143E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.34086E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11627E1
os_restr1_imon=4.27253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1505E1
os_ea1_imon=2.36144E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.06766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23703E0
cs_ionrep_imon=1.20351E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93545E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02446E1
cs_anode1_imon=3.00893E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20387E0
olens4_imon=3.35044E-8
tplens_vset=1.4E-1
tplens_vmon=1.67967E0
tplens_imon=-1.17682E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.50351E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.556E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03064E2
lens6_imon=2.98186E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=4.09834E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24341E0
ionrepsh_imon=1.77465E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33825E1
lens5b_imon=2.17059E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4711E0
os_ea2_imon=-5.93922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00831E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7153E1
cs_ef2a_imon=3.14864E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04992E0
os_ef2alow_imon=-2.40777E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28508E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11274E1
os_restr2_imon=3.43118E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29511E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02139E1
cs_anode2_imon=2.23916E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7334E1
iondef1_imon=1.09784E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68331E1
iondef4_imon=1.10971E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.11936E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81069E-1
olens1_imon=7.86781E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16837E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47459E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56312E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.48963E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82711E2
mask1_imon=2.39168E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-5.5546E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92583E3
multa_neg_imon=7.36659E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93793E3
defgrida_imon=6.81387E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50185E3
multb_neg_imon=7.47783E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3891E0
defgridb_imon=6.10125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33317E1
os_fil1_imon=9.41841E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07717E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65684E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30906E1
cs_fil1_imon=9.96588E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63409E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67236E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51867E-2
os_fil2_imon=-2.55334E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75594E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35769E-1
cs_fil2_imon=-1.9973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17097E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97434E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80003E-1	-8.96287E-1	-9.04717E0	-9.04207E0	4.22001E-3	9.57012E-2	2.73375E1	-3.26669E1	-3.26308E1	2.68034E1	1.19782E-7	2.5199E-3	2.5199E-3	6.31779E-3	3.01733E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.80146E-1	-8.96192E-1	-9.04713E0	-9.04219E0	4.17233E-3	9.57251E-2	2.73321E1	-3.26506E1	-3.26494E1	2.68244E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99613E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.80051E-1	-8.96096E-1	-9.04729E0	-9.0421E0	4.02927E-3	9.58204E-2	2.73231E1	-3.26591E1	-3.26044E1	2.68376E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9978E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.80122E-1	-8.96192E-1	-9.04698E0	-9.04193E0	4.02927E-3	9.57012E-2	2.73582E1	-3.26691E1	-3.26372E1	2.68389E1	1.2026E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.80051E-1	-8.96215E-1	-9.04679E0	-9.04202E0	3.86238E-3	9.6035E-2	2.73616E1	-3.26573E1	-3.26476E1	2.68364E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09317E0	-8.79812E-1	-8.96358E-1	-9.04682E0	-9.04181E0	3.83854E-3	9.6035E-2	2.72874E1	-3.26419E1	-3.26697E1	2.6855E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.79669E-1	-8.9674E-1	-9.04703E0	-9.04198E0	4.02927E-3	9.60588E-2	2.73639E1	-3.26413E1	-3.26266E1	2.6834E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.7986E-1	-8.96597E-1	-9.04686E0	-9.04181E0	3.8147E-3	9.60112E-2	2.73098E1	-3.26531E1	-3.26284E1	2.6831E1	1.20017E-7	2.51225E-3	2.51225E-3	6.28552E-3	2.96671E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09325E0	-8.7986E-1	-8.96311E-1	-9.04686E0	-9.04193E0	3.71933E-3	9.57727E-2	2.72935E1	-3.26891E1	-3.26058E1	2.68232E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.80003E-1	-8.96454E-1	-9.04701E0	-9.04198E0	3.91006E-3	9.56535E-2	2.73287E1	-3.26885E1	-3.26225E1	2.68448E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.80051E-1	-8.96692E-1	-9.04698E0	-9.04195E0	3.86238E-3	9.5892E-2	2.73442E1	-3.26615E1	-3.2617E1	2.68412E1	1.20017E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.80003E-1	-8.96835E-1	-9.04701E0	-9.04179E0	3.79086E-3	9.55343E-2	2.73472E1	-3.26729E1	-3.26254E1	2.68466E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09402E0	-8.80027E-1	-8.96692E-1	-9.04686E0	-9.04205E0	4.31538E-3	9.56059E-2	2.73302E1	-3.26646E1	-3.26358E1	2.68424E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0148E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.80075E-1	-8.96525E-1	-9.04689E0	-9.04171E0	3.76701E-3	9.54151E-2	2.7321E1	-3.26785E1	-3.26077E1	2.68274E1	1.19872E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.03349E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.80098E-1	-8.96382E-1	-9.04679E0	-9.04193E0	3.88622E-3	9.55343E-2	2.73207E1	-3.26603E1	-3.26134E1	2.68484E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.80098E-1	-8.96668E-1	-9.04717E0	-9.04162E0	4.05312E-3	9.55582E-2	2.73333E1	-3.26669E1	-3.26242E1	2.68238E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00041E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.8017E-1	-8.96335E-1	-9.04682E0	-9.04188E0	3.86238E-3	9.51767E-2	2.7336E1	-3.26458E1	-3.26027E1	2.6831E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.79788E-1	-8.96335E-1	-9.04701E0	-9.04195E0	4.1008E-3	9.55343E-2	2.73508E1	-3.27027E1	-3.26253E1	2.68487E1	1.20167E-7	2.51498E-3	2.51498E-3	6.32592E-3	3.01167E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.79765E-1	-8.96597E-1	-9.04722E0	-9.04202E0	4.05312E-3	9.5439E-2	2.73231E1	-3.26705E1	-3.26314E1	2.68082E1	1.19681E-7	2.51395E-3	2.51395E-3	6.30052E-3	3.03093E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09387E0	-8.79836E-1	-8.96454E-1	-9.04691E0	-9.04214E0	4.14848E-3	9.53674E-2	2.7334E1	-3.26691E1	-3.26561E1	2.68331E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
