[Scan]
initial_time=2016-01-18T18:18:57
final_time=2016-01-18T18:19:16
ip_count=19
run=1024
dataset=3
scan=220
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.80194E-1
ql1_imon=1.33561E-8
ql2_vset=
ql2_vmon=-8.96382E-1
ql2_imon=1.88363E-9
ql3_vset=
ql3_vmon=-9.04727E0
ql3_imon=1.14214E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-2.5034E-12
mult1=-9.94508E-9
mult2=-2.71462E-9
rf_tmon=-3.94765E-3
rf_agc=3.39404E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.70116E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.21691E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19454E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05208E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=2.83782E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04654E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.5267E-5
lens1_vset=-5.0E0
lens1_vmon=-5.31488E0
lens1_imon=2.81173E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.49063E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94486E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.3459E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11105E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1524E1
os_ea1_imon=2.34357E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.07064E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=1.20512E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93716E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.36423E-8
tplens_vset=1.4E-1
tplens_vmon=1.69851E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.52777E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.98057E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=4.08237E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=1.7693E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33387E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49784E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.40327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.24461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.12077E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68448E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.07005E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.88385E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56549E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-9.25639E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82722E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=8.02449E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.89975E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.0836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.176E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.43417E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65905E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30901E1
cs_fil1_imon=9.96474E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67146E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.64194E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85643E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34831E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.69482E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22699E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29624E-3
inlet_lpb_pmon=2.98554E-1
chamber_ion_pmon=1.19978E-7
chamber_cvt_pmon=2.5225E-3
foreline_cvt_pmon=2.5225E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.52084E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80098E-1	-8.96406E-1	-9.04684E0	-9.04191E0	3.98159E-3	9.56297E-2	2.73157E1	-3.26549E1	-3.2652E1	2.68377E1	1.19913E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.02133E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.79788E-1	-8.9643E-1	-9.04682E0	-9.04202E0	3.98159E-3	9.5582E-2	2.73448E1	-3.26639E1	-3.26344E1	2.68184E1	1.2014E-7	2.51484E-3	2.51484E-3	6.32644E-3	3.00766E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.80027E-1	-8.96287E-1	-9.04679E0	-9.04207E0	3.95775E-3	9.58204E-2	2.73316E1	-3.26909E1	-3.26425E1	2.68532E1					
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.80098E-1	-8.96406E-1	-9.04675E0	-9.04219E0	4.57764E-3	9.57727E-2	2.73246E1	-3.26938E1	-3.26284E1	2.68262E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.79884E-1	-8.96478E-1	-9.04675E0	-9.04164E0	4.14848E-3	9.57012E-2	2.73263E1	-3.26561E1	-3.26284E1	2.68382E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.7986E-1	-8.96144E-1	-9.04713E0	-9.04212E0	4.19617E-3	9.59396E-2	2.7361E1	-3.26567E1	-3.26146E1	2.68545E1	1.20158E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.80098E-1	-8.96192E-1	-9.04672E0	-9.0416E0	4.36306E-3	9.57727E-2	2.73159E1	-3.26476E1	-3.26446E1	2.68298E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.80027E-1	-8.96311E-1	-9.04696E0	-9.04198E0	4.26769E-3	9.57489E-2	2.73448E1	-3.26272E1	-3.2608E1	2.6831E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.79955E-1	-8.96096E-1	-9.04684E0	-9.04188E0	4.43459E-3	9.56535E-2	2.72937E1	-3.26561E1	-3.2635E1	2.67998E1	1.19757E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.80218E-1	-8.96025E-1	-9.04706E0	-9.04183E0	4.3869E-3	9.57251E-2	2.73393E1	-3.26724E1	-3.26092E1	2.68499E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.79931E-1	-8.96358E-1	-9.04698E0	-9.04191E0	4.26769E-3	9.5582E-2	2.73228E1	-3.26952E1	-3.26621E1	2.68172E1	1.22068E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.80027E-1	-8.96406E-1	-9.04684E0	-9.04207E0	4.05312E-3	9.58681E-2	2.73237E1	-3.26464E1	-3.2623E1	2.68442E1	1.21064E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.79693E-1	-8.96502E-1	-9.04715E0	-9.04183E0	4.19617E-3	9.61065E-2	2.73213E1	-3.26777E1	-3.26188E1	2.68526E1	1.2054E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.79717E-1	-8.96263E-1	-9.04701E0	-9.04183E0	4.19617E-3	9.56059E-2	2.73249E1	-3.26543E1	-3.26098E1	2.684E1	1.21117E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.80003E-1	-8.96382E-1	-9.04722E0	-9.04193E0	4.36306E-3	9.56297E-2	2.7388E1	-3.27023E1	-3.25894E1	2.68538E1	1.20487E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.79836E-1	-8.96502E-1	-9.04686E0	-9.04193E0	4.33922E-3	9.58443E-2	2.72968E1	-3.26579E1	-3.26219E1	2.68512E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.79598E-1	-8.96692E-1	-9.04696E0	-9.042E0	4.31538E-3	9.59873E-2	2.73492E1	-3.26762E1	-3.26132E1	2.68376E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.79836E-1	-8.96239E-1	-9.04691E0	-9.04207E0	4.62532E-3	9.55105E-2	2.73222E1	-3.26141E1	-3.26294E1	2.68482E1	1.19925E-7	2.51804E-3	2.51804E-3	6.30182E-3	3.01475E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.7986E-1	-8.96311E-1	-9.04708E0	-9.04205E0	4.673E-3	9.58204E-2	2.73265E1	-3.2648E1	-3.26174E1	2.6846E1	1.20078E-7	2.51679E-3	2.51679E-3	6.33863E-3	3.01237E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.80194E-1	-8.96382E-1	-9.04727E0	-9.04198E0	4.41074E-3	9.54866E-2	2.73351E1	-3.26561E1	-3.2641E1	2.68448E1	1.19978E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.98554E-1
