[Scan]
initial_time=2016-01-18T18:20:17
final_time=2016-01-18T18:20:36
ip_count=19
run=1024
dataset=3
scan=223
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.79478E-1
ql1_imon=1.33761E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.89281E-9
ql3_vset=
ql3_vmon=-9.0472E0
ql3_imon=1.28162E-10
ql4_vset=
ql4_vmon=-9.04167E0
ql4_imon=-1.37091E-12
mult1=-9.55978E-9
mult2=-2.79446E-9
rf_tmon=-3.30477E-3
rf_agc=3.5112E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.69083E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67878E0
bslens_imon=2.59918E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19824E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04979E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5395E1
cs_ef1b_imon=2.83053E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04553E1
cs_ea1_imon=2.52079E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3784E0
lens1_imon=2.75102E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64972E1
os_ef1alow_imon=2.96987E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03995E1
cs_ea2_imon=1.49489E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=2.94963E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34475E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11175E1
os_restr1_imon=4.26522E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15118E1
os_ea1_imon=2.34403E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.07418E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22809E0
cs_ionrep_imon=1.20172E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91987E2
cs_nozzle_imon=1.93587E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.96948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20384E0
olens4_imon=3.35261E-8
tplens_vset=1.4E-1
tplens_vmon=1.66544E0
tplens_imon=-3.09151E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.49839E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26248E1
iondef2_imon=1.55524E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03032E2
lens6_imon=2.9826E-4
ql6_vset=1.0E-1
ql6_vmon=9.59635E-2
ql6_imon=4.07561E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28649E0
ionrepsh_imon=1.77871E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34041E1
lens5b_imon=2.17389E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74508E1
cs_ef2b_imon=3.12712E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52658E0
os_ea2_imon=-7.3742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00506E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71323E1
cs_ef2a_imon=3.16293E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08051E0
os_ef2alow_imon=-2.4321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13426E-1
os_ef2bup_imon=-5.3552E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11396E1
os_restr2_imon=3.41709E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29266E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02328E1
cs_anode2_imon=2.22995E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.12385E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.09574E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.06852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.86082E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15285E0
cs_ionaccel_imon=-1.86382E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.4744E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56496E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.56794E-1
window_imon=-9.0243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82711E2
mask1_imon=2.391E-4
mask2_vset=0.0E0
mask2_vmon=-1.86305E1
mask2_imon=-6.57216E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.21669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.30954E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.22837E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18586E0
defgridb_imon=6.09541E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.44172E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07394E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65755E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.97308E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62294E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67457E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27491E-2
os_fil2_imon=-2.6393E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6486E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.02951E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.97784E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22833E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.04894E-1
res40_imon=-2.59168E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09371E0	-8.79908E-1	-8.96144E-1	-9.04682E0	-9.04179E0	4.17233E-3	9.57251E-2	2.73183E1	-3.26615E1	-3.2647E1	2.68418E1	1.20301E-7	2.51911E-3	2.51911E-3	6.31925E-3	2.98512E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.80051E-1	-8.96502E-1	-9.04677E0	-9.04183E0	4.22001E-3	9.57012E-2	2.73045E1	-3.26548E1	-3.26334E1	2.68369E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.79812E-1	-8.96072E-1	-9.04677E0	-9.04181E0	4.26769E-3	9.5582E-2	2.73279E1	-3.26837E1	-3.26296E1	2.68389E1	1.20191E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.9829E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.79812E-1	-8.95834E-1	-9.04691E0	-9.042E0	4.50611E-3	9.57727E-2	2.7308E1	-3.26388E1	-3.26138E1	2.68424E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.79693E-1	-8.96239E-1	-9.04691E0	-9.04205E0	4.36306E-3	9.56535E-2	2.73063E1	-3.26464E1	-3.2623E1	2.68526E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.79717E-1	-8.96072E-1	-9.04672E0	-9.04224E0	4.24385E-3	9.5439E-2	2.73093E1	-3.26308E1	-3.26194E1	2.68328E1	1.20383E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.79931E-1	-8.96192E-1	-9.04708E0	-9.04202E0	4.1008E-3	9.57251E-2	2.73027E1	-3.26735E1	-3.25996E1	2.68298E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.79884E-1	-8.96478E-1	-9.04727E0	-9.04169E0	4.24385E-3	9.56059E-2	2.73255E1	-3.26771E1	-3.26092E1	2.68471E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.80003E-1	-8.95953E-1	-9.04691E0	-9.04183E0	4.02927E-3	9.62257E-2	2.73016E1	-3.26478E1	-3.259E1	2.68123E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.79765E-1	-8.95929E-1	-9.04686E0	-9.04183E0	4.07696E-3	9.59158E-2	2.73123E1	-3.26597E1	-3.26098E1	2.68617E1	1.20209E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.03027E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.79765E-1	-8.9581E-1	-9.04696E0	-9.04181E0	4.17233E-3	9.59158E-2	2.73594E1	-3.26938E1	-3.26219E1	2.68935E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.02922E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.7986E-1	-8.95977E-1	-9.04698E0	-9.04169E0	3.71933E-3	9.59158E-2	2.73216E1	-3.26383E1	-3.26315E1	2.68184E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.01223E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.79622E-1	-8.96239E-1	-9.04667E0	-9.04186E0	4.31538E-3	9.57966E-2	2.73116E1	-3.26673E1	-3.26189E1	2.68671E1	1.20137E-7	2.52139E-3	2.52139E-3	6.33538E-3	2.99613E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.79931E-1	-8.96025E-1	-9.04679E0	-9.04188E0	4.31538E-3	9.58681E-2	2.73514E1	-3.26567E1	-3.26092E1	2.6858E1	1.20106E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.79979E-1	-8.96239E-1	-9.04701E0	-9.04212E0	4.3869E-3	9.59158E-2	2.72266E1	-3.25741E1	-3.2649E1	2.68412E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.79979E-1	-8.96287E-1	-9.04694E0	-9.04205E0	4.57764E-3	9.57966E-2	2.73448E1	-3.26554E1	-3.26374E1	2.68094E1	1.2026E-7	2.52599E-3	2.52599E-3	6.30202E-3	3.03804E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.80075E-1	-8.96025E-1	-9.04701E0	-9.04164E0	4.19617E-3	9.56297E-2	2.73291E1	-3.26554E1	-3.26002E1	2.6849E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.03449E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79836E-1	-8.96168E-1	-9.04686E0	-9.04176E0	4.26769E-3	9.57489E-2	2.73446E1	-3.26437E1	-3.26183E1	2.6865E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.79765E-1	-8.96239E-1	-9.04725E0	-9.04188E0	3.95775E-3	9.57012E-2	2.73334E1	-3.26478E1	-3.26083E1	2.68424E1	1.19841E-7	2.51603E-3	2.51603E-3	6.28103E-3	2.99845E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.79478E-1	-8.96239E-1	-9.0472E0	-9.04167E0	3.95775E-3	9.59635E-2	2.73315E1	-3.26248E1	-3.26092E1	2.68142E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01347E-1
