[Scan]
initial_time=2016-01-18T18:22:03
final_time=2016-01-18T18:22:23
ip_count=19
run=1024
dataset=3
scan=227
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.7955E-1
ql1_imon=1.33294E-8
ql2_vset=
ql2_vmon=-8.96239E-1
ql2_imon=1.97158E-9
ql3_vset=
ql3_vmon=-9.04715E0
ql3_imon=1.0581E-10
ql4_vset=
ql4_vmon=-9.04171E0
ql4_imon=-2.09093E-11
mult1=-9.95712E-9
mult2=-2.77251E-9
rf_tmon=-5.72008E-3
rf_agc=3.10745E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=1.73184E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.29262E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19442E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.83422E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.52706E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34732E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.49676E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84382E1
cs_ef1a_imon=2.93549E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.33984E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15173E1
os_ea1_imon=2.34681E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.18926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9196E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01707E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20382E0
olens4_imon=3.34511E-8
tplens_vset=1.4E-1
tplens_vmon=1.66366E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25701E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03028E2
lens6_imon=2.98173E-4
ql6_vset=1.0E-1
ql6_vmon=9.56774E-2
ql6_imon=4.09294E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29416E0
ionrepsh_imon=1.78011E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74471E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51646E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00745E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.42743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.24064E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68233E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.14796E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.90072E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-1.65364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02124E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56519E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.37765E-1
window_imon=-8.13916E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.58829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.43688E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.43928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06801E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65814E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.95428E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62702E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69273E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2276E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20192E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.04652E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.80384E-1	-8.96192E-1	-9.04684E0	-9.04143E0	3.91006E-3	9.55582E-2	2.73267E1	-3.26416E1	-3.26332E1	2.68466E1	1.19549E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.80289E-1	-8.96382E-1	-9.0467E0	-9.04179E0	3.76701E-3	9.60827E-2	2.73021E1	-3.26705E1	-3.26182E1	2.68424E1	1.2026E-7	2.52384E-3	2.52384E-3	6.3074E-3	2.9714E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.80146E-1	-8.96263E-1	-9.04686E0	-9.04186E0	3.74317E-3	9.54866E-2	2.73275E1	-3.25995E1	-3.26236E1	2.68382E1	1.19554E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.99348E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09356E0	-8.79765E-1	-8.9643E-1	-9.04675E0	-9.04217E0	4.19617E-3	9.55105E-2	2.73267E1	-3.26242E1	-3.26206E1	2.68412E1	1.19697E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.79955E-1	-8.96168E-1	-9.04715E0	-9.04181E0	4.17233E-3	9.56774E-2	2.73145E1	-3.26048E1	-3.2613E1	2.68279E1	1.20055E-7	2.51096E-3	2.51096E-3	6.33977E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.79931E-1	-8.96215E-1	-9.0472E0	-9.04193E0	4.22001E-3	9.57251E-2	2.73159E1	-3.26512E1	-3.26032E1	2.68256E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.7986E-1	-8.96549E-1	-9.04722E0	-9.04195E0	3.86238E-3	9.57012E-2	2.73604E1	-3.26368E1	-3.26242E1	2.68442E1	1.19809E-7	2.51116E-3	2.51116E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.79931E-1	-8.96168E-1	-9.04713E0	-9.042E0	3.91006E-3	9.56297E-2	2.73231E1	-3.2632E1	-3.2599E1	2.68442E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.80122E-1	-8.96454E-1	-9.04691E0	-9.04195E0	3.95775E-3	9.5439E-2	2.72925E1	-3.26801E1	-3.26116E1	2.68262E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.80146E-1	-8.96382E-1	-9.04675E0	-9.0421E0	4.02927E-3	9.54151E-2	2.7324E1	-3.26862E1	-3.26443E1	2.68304E1	1.19749E-7	2.51525E-3	2.51525E-3	6.28056E-3	3.02769E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.80408E-1	-8.96621E-1	-9.04665E0	-9.04171E0	4.14848E-3	9.55105E-2	2.73183E1	-3.26651E1	-3.26549E1	2.68352E1	1.20226E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.80337E-1	-8.96358E-1	-9.0466E0	-9.04198E0	3.95775E-3	9.58204E-2	2.73201E1	-3.27059E1	-3.26428E1	2.68364E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.79931E-1	-8.96144E-1	-9.04689E0	-9.042E0	4.02927E-3	9.61065E-2	2.73171E1	-3.26032E1	-3.26278E1	2.68214E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.79908E-1	-8.96049E-1	-9.04679E0	-9.04162E0	3.93391E-3	9.58443E-2	2.73496E1	-3.26573E1	-3.26068E1	2.68334E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.79979E-1	-8.96168E-1	-9.04706E0	-9.04186E0	4.1008E-3	9.56059E-2	2.74157E1	-3.26705E1	-3.25179E1	2.68731E1	1.20226E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.79741E-1	-8.96144E-1	-9.04684E0	-9.04181E0	4.05312E-3	9.56774E-2	2.73694E1	-3.26042E1	-3.26307E1	2.6836E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.79765E-1	-8.96215E-1	-9.04706E0	-9.04222E0	4.12464E-3	9.54628E-2	2.73189E1	-3.26585E1	-3.26302E1	2.6804E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3514E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.79717E-1	-8.96072E-1	-9.04675E0	-9.04191E0	4.07696E-3	9.5582E-2	2.73181E1	-3.26667E1	-3.26201E1	2.68304E1	1.20209E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.9892E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.79741E-1	-8.96215E-1	-9.04684E0	-9.04193E0	4.3869E-3	9.58681E-2	2.73207E1	-3.27251E1	-3.26335E1	2.68511E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.7955E-1	-8.96239E-1	-9.04715E0	-9.04171E0	4.05312E-3	9.56774E-2	2.72889E1	-3.26639E1	-3.25701E1	2.68233E1	1.20192E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01609E-1
