[Scan]
initial_time=2016-01-18T18:22:29
final_time=2016-01-18T18:22:49
ip_count=19
run=1024
dataset=3
scan=228
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.80098E-1
ql1_imon=1.33573E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.92056E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=1.42944E-10
ql4_vset=
ql4_vmon=-9.04176E0
ql4_imon=1.54614E-11
mult1=-9.54774E-9
mult2=-2.78448E-9
rf_tmon=-4.6386E-3
rf_agc=3.33156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=1.67916E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.22773E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53983E1
cs_ef1b_imon=2.83133E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.54076E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33291E0
lens1_imon=2.61346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64747E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.4827E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.94162E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34364E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.25995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.36808E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21004E0
cs_ionrep_imon=1.18421E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91937E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02752E1
cs_anode1_imon=3.00324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2043E0
olens4_imon=3.34909E-8
tplens_vset=1.4E-1
tplens_vmon=1.65585E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26182E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.56165E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03049E2
lens6_imon=2.98191E-4
ql6_vset=1.0E-1
ql6_vmon=9.57012E-2
ql6_imon=4.06045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=1.78876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52427E0
os_ea2_imon=-8.00434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.17479E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.2519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11268E1
os_restr2_imon=3.44365E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.2809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01539E1
cs_anode2_imon=2.24389E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.11572E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68388E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.13442E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.89153E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.60679E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02112E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56435E1
einzel_imon=7.69144E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82739E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.42246E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.45994E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33342E1
os_fil1_imon=9.4248E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65853E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.94341E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62318E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67437E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.5561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.62392E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.74038E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22735E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.21705E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09748E-1
res40_imon=-2.26271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=526
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.79788E-1	-8.95953E-1	-9.04686E0	-9.04155E0	3.91006E-3	9.5892E-2	2.73409E1	-3.25996E1	-3.26429E1	2.68312E1	1.19861E-7	2.51334E-3	2.51334E-3	6.35692E-3	2.9978E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.7986E-1	-8.96001E-1	-9.04684E0	-9.04183E0	4.50611E-3	9.53436E-2	2.73039E1	-3.2614E1	-3.25725E1	2.68394E1	1.2005E-7	2.51252E-3	2.51252E-3	6.31357E-3	3.0102E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.79765E-1	-8.96144E-1	-9.04701E0	-9.04186E0	4.33922E-3	9.52959E-2	2.73177E1	-3.26957E1	-3.26302E1	2.68472E1	1.20383E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.79955E-1	-8.96215E-1	-9.04698E0	-9.04188E0	4.07696E-3	9.56297E-2	2.73299E1	-3.26354E1	-3.26195E1	2.68929E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.79717E-1	-8.96478E-1	-9.0471E0	-9.04179E0	4.31538E-3	9.56535E-2	2.73381E1	-3.26272E1	-3.26109E1	2.68192E1	1.19493E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.79908E-1	-8.96287E-1	-9.04686E0	-9.04162E0	4.1008E-3	9.57727E-2	2.73263E1	-3.26897E1	-3.26216E1	2.68328E1	1.19841E-7	2.52131E-3	2.52131E-3	6.29157E-3	3.00852E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.79693E-1	-8.95977E-1	-9.04698E0	-9.04167E0	3.98159E-3	9.58204E-2	2.72907E1	-3.26807E1	-3.26086E1	2.68375E1	1.20171E-7	2.52222E-3	2.52222E-3	6.29002E-3	3.01193E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.79765E-1	-8.95905E-1	-9.04729E0	-9.04174E0	4.17233E-3	9.56535E-2	2.73345E1	-3.2647E1	-3.26188E1	2.68593E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.03185E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.7986E-1	-8.96168E-1	-9.04706E0	-9.04205E0	4.60148E-3	9.55105E-2	2.73246E1	-3.2636E1	-3.26402E1	2.68435E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.79836E-1	-8.96263E-1	-9.04672E0	-9.042E0	4.12464E-3	9.57489E-2	2.73498E1	-3.26848E1	-3.26315E1	2.68431E1	1.19941E-7	2.52131E-3	2.52131E-3	6.29157E-3	3.01356E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.79955E-1	-8.96454E-1	-9.04686E0	-9.042E0	4.24385E-3	9.58204E-2	2.73216E1	-3.26502E1	-3.26744E1	2.68574E1	1.2035E-7	2.51693E-3	2.51693E-3	6.29067E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.79931E-1	-8.96502E-1	-9.04667E0	-9.04174E0	4.43459E-3	9.55343E-2	2.73147E1	-3.26669E1	-3.26242E1	2.68358E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.7955E-1	-8.96573E-1	-9.04653E0	-9.04167E0	4.43459E-3	9.56059E-2	2.73387E1	-3.26252E1	-3.2631E1	2.68425E1	1.20226E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.79669E-1	-8.9643E-1	-9.04694E0	-9.04205E0	4.31538E-3	9.54628E-2	2.73291E1	-3.26506E1	-3.26122E1	2.68556E1	1.20565E-7	2.51875E-3	2.51875E-3	6.29022E-3	3.00787E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.79693E-1	-8.96025E-1	-9.04691E0	-9.04179E0	4.31538E-3	9.57966E-2	2.73836E1	-3.26708E1	-3.25127E1	2.68226E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.79979E-1	-8.9612E-1	-9.04684E0	-9.04193E0	4.43459E-3	9.56535E-2	2.73189E1	-3.26873E1	-3.26404E1	2.68472E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.79645E-1	-8.96335E-1	-9.04698E0	-9.04191E0	4.22001E-3	9.55105E-2	2.73417E1	-3.26526E1	-3.26319E1	2.68046E1	1.21912E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.03027E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.79908E-1	-8.96001E-1	-9.04677E0	-9.04198E0	4.19617E-3	9.56297E-2	2.72892E1	-3.26762E1	-3.26384E1	2.68401E1	1.2212E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.79931E-1	-8.96001E-1	-9.04696E0	-9.04191E0	4.31538E-3	9.55343E-2	2.73207E1	-3.26801E1	-3.2623E1	2.6843E1	1.2212E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.80098E-1	-8.96311E-1	-9.04689E0	-9.04176E0	4.1008E-3	9.57012E-2	2.73201E1	-3.2647E1	-3.26182E1	2.68388E1	1.21705E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.0071E-1
