[Scan]
initial_time=2016-01-18T18:23:22
final_time=2016-01-18T18:23:42
ip_count=19
run=1024
dataset=3
scan=230
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08761E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33555E-8
ql2_vset=
ql2_vmon=-8.96287E-1
ql2_imon=1.88862E-9
ql3_vset=
ql3_vmon=-9.04686E0
ql3_imon=1.07443E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-1.70827E-11
mult1=-9.93304E-9
mult2=-2.7246E-9
rf_tmon=-4.72872E-3
rf_agc=3.32074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=1.63178E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64953E0
bslens_imon=2.47327E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19756E1
lens5a_imon=2.00044E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04953E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54157E1
cs_ef1b_imon=2.83602E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04651E1
cs_ea1_imon=2.53228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37868E0
lens1_imon=2.61652E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.50642E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=2.9308E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.34291E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.27256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15483E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63767E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23496E0
cs_ionrep_imon=1.19789E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93372E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.97729E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20353E0
olens4_imon=3.33971E-8
tplens_vset=1.4E-1
tplens_vmon=1.69285E0
tplens_imon=-2.00652E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.4965E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.55307E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03071E2
lens6_imon=2.9839E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=4.04679E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27108E0
ionrepsh_imon=1.76316E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.17968E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51839E0
os_ea2_imon=-5.9366E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00527E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.1665E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05636E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11238E1
os_restr2_imon=3.43139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.30038E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73327E1
iondef1_imon=1.12076E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68132E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.09288E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.90026E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.4754E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-7.81481E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.57136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.82574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=6.92124E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=6.00667E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.44348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07527E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.96185E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63477E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6756E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16058E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75193E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22777E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15153E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.79741E-1	-8.96358E-1	-9.04679E0	-9.04193E0	4.19617E-3	9.56774E-2	2.73345E1	-3.26633E1	-3.26128E1	2.68298E1	1.19653E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.79574E-1	-8.96573E-1	-9.04682E0	-9.0421E0	4.02927E-3	9.56774E-2	2.72985E1	-3.26585E1	-3.26326E1	2.6834E1	1.19913E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01609E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.79693E-1	-8.96668E-1	-9.04691E0	-9.04207E0	4.12464E-3	9.52005E-2	2.73369E1	-3.26609E1	-3.2599E1	2.6849E1	1.19925E-7	2.5147E-3	2.5147E-3	6.33538E-3	3.02277E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.79502E-1	-8.96692E-1	-9.04703E0	-9.04219E0	3.76701E-3	9.5439E-2	2.73263E1	-3.26933E1	-3.26608E1	2.6831E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.02511E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.79812E-1	-8.96645E-1	-9.04725E0	-9.04219E0	4.12464E-3	9.54151E-2	2.73387E1	-3.26554E1	-3.26284E1	2.6834E1	1.20363E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.79836E-1	-8.96788E-1	-9.04727E0	-9.04169E0	3.95775E-3	9.54628E-2	2.73021E1	-3.26765E1	-3.26254E1	2.68563E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.79669E-1	-8.96311E-1	-9.0471E0	-9.04171E0	4.07696E-3	9.56774E-2	2.73148E1	-3.26835E1	-3.25936E1	2.68289E1	1.20487E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.79741E-1	-8.96168E-1	-9.04753E0	-9.04155E0	4.05312E-3	9.57727E-2	2.73388E1	-3.26535E1	-3.26273E1	2.68587E1	1.2097E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.0E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.79765E-1	-8.96335E-1	-9.04706E0	-9.04183E0	4.26769E-3	9.58204E-2	2.73082E1	-3.26927E1	-3.26383E1	2.68088E1	1.201E-7	2.51952E-3	2.51952E-3	6.3131E-3	3.01065E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.79836E-1	-8.96382E-1	-9.04696E0	-9.0414E0	4.07696E-3	9.57489E-2	2.73016E1	-3.26313E1	-3.25835E1	2.68382E1	1.2035E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.79574E-1	-8.96382E-1	-9.04684E0	-9.04205E0	4.12464E-3	9.56297E-2	2.73502E1	-3.27131E1	-3.26212E1	2.68292E1	1.19851E-7	2.50989E-3	2.50989E-3	6.30202E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.79645E-1	-8.96192E-1	-9.04708E0	-9.04193E0	4.57764E-3	9.56535E-2	2.73145E1	-3.26608E1	-3.26372E1	2.68178E1	1.20226E-7	2.52867E-3	2.52867E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.79979E-1	-8.96502E-1	-9.04722E0	-9.04193E0	4.22001E-3	9.57966E-2	2.73063E1	-3.25942E1	-3.26425E1	2.68382E1	1.19757E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.80075E-1	-8.95977E-1	-9.04708E0	-9.04205E0	4.26769E-3	9.56297E-2	2.73411E1	-3.26496E1	-3.26065E1	2.68172E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.03449E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.80027E-1	-8.9612E-1	-9.04698E0	-9.0416E0	4.07696E-3	9.57251E-2	2.7266E1	-3.25912E1	-3.2608E1	2.6843E1	1.19953E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.8017E-1	-8.95929E-1	-9.04722E0	-9.04248E0	4.1008E-3	9.60827E-2	2.73321E1	-3.26705E1	-3.26368E1	2.68285E1	1.2033E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.79788E-1	-8.95953E-1	-9.0471E0	-9.04224E0	4.14848E-3	9.59635E-2	2.73151E1	-3.26537E1	-3.2652E1	2.68424E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.79717E-1	-8.96168E-1	-9.04701E0	-9.04217E0	4.05312E-3	9.57489E-2	2.73128E1	-3.26632E1	-3.26077E1	2.6843E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.79788E-1	-8.96454E-1	-9.04679E0	-9.04214E0	3.95775E-3	9.56297E-2	2.7364E1	-3.26428E1	-3.26392E1	2.68279E1	1.19851E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.79812E-1	-8.96287E-1	-9.04686E0	-9.04198E0	3.98159E-3	9.55343E-2	2.73327E1	-3.26771E1	-3.2617E1	2.68132E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.02769E-1
