[Scan]
initial_time=2016-01-18T18:23:49
final_time=2016-01-18T18:24:08
ip_count=19
run=1024
dataset=3
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.79622E-1
ql1_imon=1.34032E-8
ql2_vset=
ql2_vmon=-8.96168E-1
ql2_imon=1.90524E-9
ql3_vset=
ql3_vmon=-9.0466E0
ql3_imon=1.07908E-10
ql4_vset=
ql4_vmon=-9.04193E0
ql4_imon=-3.70741E-12
mult1=-9.31897E-9
mult2=-2.75254E-9
rf_tmon=-4.67465E-3
rf_agc=3.32855E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.86238E-3
ql5_imon=1.68861E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67815E0
bslens_imon=2.41158E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.01552E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54175E1
cs_ef1b_imon=2.84755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02117E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04598E1
cs_ea1_imon=2.52129E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36895E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.5202E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.94053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.34477E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.27616E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15077E1
os_ea1_imon=2.35691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.05874E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25751E0
cs_ionrep_imon=1.19214E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02662E1
cs_anode1_imon=3.00973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20415E0
olens4_imon=3.35928E-8
tplens_vset=1.4E-1
tplens_vmon=1.70212E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.55192E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03036E2
lens6_imon=2.98209E-4
ql6_vset=1.0E-1
ql6_vmon=9.56535E-2
ql6_imon=4.05432E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.77579E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34006E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7494E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53148E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70963E1
cs_ef2a_imon=3.14956E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11165E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.12319E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.91263E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56363E1
einzel_imon=7.57251E-6
window_vset=0.0E0
window_vmon=2.6059E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82735E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.8626E1
mask2_imon=-8.67976E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.46212E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.26024E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=9.43159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07119E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65671E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30865E1
cs_fil1_imon=9.93963E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62828E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67231E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63731E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-1.9692E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22709E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.88124E-1
res40_imon=-2.6159E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.79979E-1	-8.96454E-1	-9.04722E0	-9.04121E0	4.24385E-3	9.52959E-2	2.73484E1	-3.26879E1	-3.26368E1	2.68316E1	1.20414E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.80051E-1	-8.96597E-1	-9.04696E0	-9.04117E0	4.12464E-3	9.56059E-2	2.73369E1	-3.2648E1	-3.26438E1	2.68575E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.7986E-1	-8.96573E-1	-9.04701E0	-9.04162E0	3.86238E-3	9.54151E-2	2.73482E1	-3.26779E1	-3.26337E1	2.6825E1	1.20084E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.99348E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.80122E-1	-8.96597E-1	-9.04722E0	-9.04195E0	3.86238E-3	9.55343E-2	2.73322E1	-3.26738E1	-3.26242E1	2.68196E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.79931E-1	-8.96454E-1	-9.04694E0	-9.042E0	3.55244E-3	9.54151E-2	2.73417E1	-3.2636E1	-3.26384E1	2.68169E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.79931E-1	-8.96692E-1	-9.04715E0	-9.04171E0	3.8147E-3	9.53913E-2	2.73228E1	-3.26658E1	-3.26266E1	2.68436E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.7986E-1	-8.96621E-1	-9.04689E0	-9.04181E0	4.05312E-3	9.51767E-2	2.72962E1	-3.26343E1	-3.26225E1	2.68472E1	1.20122E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.79836E-1	-8.96311E-1	-9.04696E0	-9.04171E0	3.71933E-3	9.54628E-2	2.72986E1	-3.26402E1	-3.26166E1	2.68226E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.79502E-1	-8.96168E-1	-9.04701E0	-9.04179E0	3.83854E-3	9.56059E-2	2.73767E1	-3.27019E1	-3.26156E1	2.68532E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.79526E-1	-8.96406E-1	-9.04682E0	-9.04162E0	4.02927E-3	9.55582E-2	2.73269E1	-3.2629E1	-3.26254E1	2.68442E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.79502E-1	-8.96144E-1	-9.04689E0	-9.04155E0	4.00543E-3	9.57012E-2	2.73574E1	-3.26621E1	-3.26014E1	2.68256E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.79717E-1	-8.9612E-1	-9.04691E0	-9.04176E0	3.91006E-3	9.58204E-2	2.73256E1	-3.2675E1	-3.26152E1	2.68289E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.7955E-1	-8.96168E-1	-9.04679E0	-9.0416E0	3.8147E-3	9.56059E-2	2.73172E1	-3.26616E1	-3.26158E1	2.68212E1	1.20177E-7	2.52405E-3	2.52405E-3	6.31779E-3	3.0223E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.79884E-1	-8.96096E-1	-9.04684E0	-9.0416E0	3.98159E-3	9.57727E-2	2.73339E1	-3.26981E1	-3.2593E1	2.68472E1	1.20076E-7	2.51085E-3	2.51085E-3	6.3074E-3	3.01609E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.79788E-1	-8.96287E-1	-9.04689E0	-9.04171E0	3.71933E-3	9.54866E-2	2.72907E1	-3.25743E1	-3.26014E1	2.6843E1	1.20209E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.79598E-1	-8.96215E-1	-9.0467E0	-9.04169E0	3.8147E-3	9.52959E-2	2.73263E1	-3.26461E1	-3.26248E1	2.68268E1	1.19913E-7	2.52647E-3	2.52647E-3	6.32386E-3	3.01871E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.79502E-1	-8.96311E-1	-9.04672E0	-9.04157E0	3.98159E-3	9.56535E-2	2.73309E1	-3.26771E1	-3.26398E1	2.68328E1	1.20311E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.79788E-1	-8.96478E-1	-9.04689E0	-9.04167E0	4.19617E-3	9.56297E-2	2.73246E1	-3.2662E1	-3.26425E1	2.68331E1	1.20122E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.79717E-1	-8.96263E-1	-9.04672E0	-9.04169E0	4.00543E-3	9.56535E-2	2.73334E1	-3.2711E1	-3.26018E1	2.68346E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.79622E-1	-8.96168E-1	-9.0466E0	-9.04193E0	3.86238E-3	9.56535E-2	2.73153E1	-3.26639E1	-3.26272E1	2.68298E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01223E-1
