[Scan]
initial_time=2016-01-18T18:25:09
final_time=2016-01-18T18:33:03
ip_count=19
run=1024
dataset=3
scan=234
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.33597E-8
ql2_vset=
ql2_vmon=-8.96358E-1
ql2_imon=1.88383E-9
ql3_vset=
ql3_vmon=-9.04682E0
ql3_imon=1.3684E-10
ql4_vset=
ql4_vmon=-9.04155E0
ql4_imon=-8.95262E-12
mult1=-9.88488E-9
mult2=-2.83438E-9
rf_tmon=-4.90897E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.8147E-3
ql5_imon=1.65887E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6963E0
bslens_imon=2.67068E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54206E1
cs_ef1b_imon=2.83065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04746E1
cs_ea1_imon=2.53795E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34719E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64799E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03649E1
cs_ea2_imon=1.48993E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84435E1
cs_ef1a_imon=2.94221E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.34076E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=4.25342E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15193E1
os_ea1_imon=2.36381E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63525E1
os_ef1bup_imon=3.06697E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27864E0
cs_ionrep_imon=1.22129E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93473E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01618E1
cs_anode1_imon=2.98461E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=3.35869E-8
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25882E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.55718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03029E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.5582E-2
ql6_imon=4.09268E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28336E0
ionrepsh_imon=1.77733E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.341E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.57241E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71391E1
cs_ef2a_imon=3.16428E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05224E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11425E1
os_restr2_imon=3.42492E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.29291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01867E1
cs_anode2_imon=2.24889E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73321E1
iondef1_imon=1.09954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.09859E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.09826E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.88518E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14983E0
cs_ionaccel_imon=-1.81698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56585E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.72711E-1
window_imon=-7.98728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.3891E-4
mask2_vset=0.0E0
mask2_vmon=-1.86454E1
mask2_imon=-6.70144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.50197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.32689E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.1728E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31697E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.43324E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07665E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6573E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30879E1
cs_fil1_imon=9.95927E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62731E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67084E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34646E-1
cs_fil2_imon=-2.46067E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.00879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22893E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.97593E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.24657E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.79955E-1	-8.96406E-1	-9.04686E0	-9.04224E0	4.14848E-3	9.54151E-2	2.73128E1	-3.26708E1	-3.26054E1	2.6834E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.00966E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.79884E-1	-8.96072E-1	-9.04665E0	-9.04198E0	4.14848E-3	9.53674E-2	2.73277E1	-3.26395E1	-3.26229E1	2.68338E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.80075E-1	-8.95905E-1	-9.04682E0	-9.04193E0	4.1008E-3	9.54628E-2	2.73219E1	-3.26996E1	-3.26347E1	2.68047E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.9829E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.79955E-1	-8.96025E-1	-9.04679E0	-9.04179E0	4.14848E-3	9.53197E-2	2.73165E1	-3.26567E1	-3.26422E1	2.68366E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.80146E-1	-8.9612E-1	-9.04684E0	-9.04214E0	4.02927E-3	9.5582E-2	2.72949E1	-3.2623E1	-3.26332E1	2.68154E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.80075E-1	-8.96239E-1	-9.04689E0	-9.04191E0	4.19617E-3	9.53436E-2	2.73021E1	-3.26044E1	-3.26146E1	2.68478E1	1.19953E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.79908E-1	-8.96311E-1	-9.04701E0	-9.04188E0	3.98159E-3	9.52482E-2	2.73021E1	-3.26508E1	-3.26012E1	2.68611E1	1.20297E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09387E0	-8.79908E-1	-8.96311E-1	-9.04686E0	-9.04174E0	4.22001E-3	9.55582E-2	2.73129E1	-3.26603E1	-3.26056E1	2.68502E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.79979E-1	-8.96406E-1	-9.04689E0	-9.04176E0	4.24385E-3	9.54866E-2	2.73243E1	-3.26362E1	-3.26104E1	2.68581E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.79693E-1	-8.96311E-1	-9.04677E0	-9.04212E0	4.57764E-3	9.56297E-2	2.72883E1	-3.26765E1	-3.26074E1	2.68118E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02133E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.79383E-1	-8.96168E-1	-9.04689E0	-9.04217E0	4.31538E-3	9.55105E-2	2.73322E1	-3.26508E1	-3.26065E1	2.68412E1	1.2033E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.79645E-1	-8.96049E-1	-9.04694E0	-9.042E0	4.29153E-3	9.5439E-2	2.73309E1	-3.26831E1	-3.25954E1	2.67968E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.7955E-1	-8.95977E-1	-9.04684E0	-9.04231E0	3.95775E-3	9.54866E-2	2.73213E1	-3.26512E1	-3.26182E1	2.68472E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.7986E-1	-8.96287E-1	-9.04706E0	-9.04174E0	3.91006E-3	9.56297E-2	2.73351E1	-3.26699E1	-3.2644E1	2.68545E1	1.19913E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.79884E-1	-8.96335E-1	-9.04696E0	-9.04152E0	3.74317E-3	9.55105E-2	2.73015E1	-3.26176E1	-3.26392E1	2.68307E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.79717E-1	-8.96525E-1	-9.04698E0	-9.04167E0	4.12464E-3	9.58443E-2	2.73242E1	-3.26747E1	-3.26214E1	2.68308E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02396E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.79598E-1	-8.96454E-1	-9.04684E0	-9.0414E0	4.29153E-3	9.56297E-2	2.73039E1	-3.26731E1	-3.26125E1	2.68172E1	1.20243E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.02368E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.79598E-1	-8.96573E-1	-9.04698E0	-9.04162E0	4.05312E-3	9.57251E-2	2.73069E1	-3.26999E1	-3.26458E1	2.68454E1	1.20031E-7	2.5147E-3	2.5147E-3	6.32978E-3	2.97762E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.79908E-1	-8.96168E-1	-9.04689E0	-9.04162E0	4.1008E-3	9.56059E-2	2.7308E1	-3.26486E1	-3.26109E1	2.6829E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.97704E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.79741E-1	-8.96358E-1	-9.04682E0	-9.04155E0	3.8147E-3	9.5582E-2	2.73321E1	-3.26699E1	-3.25882E1	2.68202E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.97593E-1
