[Scan]
initial_time=2016-01-18T18:33:10
final_time=2016-01-18T18:33:30
ip_count=19
run=1024
dataset=3
scan=235
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.79741E-1
ql1_imon=1.33785E-8
ql2_vset=
ql2_vmon=-8.96072E-1
ql2_imon=1.93715E-9
ql3_vset=
ql3_vmon=-9.04679E0
ql3_imon=1.19281E-10
ql4_vset=
ql4_vmon=-9.04212E0
ql4_imon=-1.61886E-11
mult1=-9.72835E-9
mult2=-2.6747E-9
rf_tmon=-5.28148E-3
rf_agc=3.27448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.93391E-3
ql5_imon=1.67372E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70519E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19544E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.83998E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=2.53283E-5
lens1_vset=-5.0E0
lens1_vmon=-5.33891E0
lens1_imon=2.72521E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64825E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.50974E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=2.94702E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.35007E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11081E1
os_restr1_imon=4.26355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=2.3533E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23287E0
cs_ionrep_imon=1.19323E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93647E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02206E1
cs_anode1_imon=2.99027E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=3.36342E-8
tplens_vset=1.4E-1
tplens_vmon=1.63663E0
tplens_imon=-4.57964E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.51407E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.55877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03037E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.52482E-2
ql6_imon=4.09566E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.17305E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52067E0
os_ea2_imon=-8.61719E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06128E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.17263E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09437E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.43212E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.28955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.24785E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73243E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.10612E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.87039E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14816E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47432E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56609E1
einzel_imon=7.79236E-6
window_vset=0.0E0
window_vmon=2.77409E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82713E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.32153E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=6.77718E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35044E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.44456E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07173E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65636E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.96083E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63429E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6713E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71336E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34645E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22848E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.20907E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.70705E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.79717E-1	-8.96192E-1	-9.04744E0	-9.04181E0	3.95775E-3	9.5439E-2	2.7308E1	-3.2655E1	-3.26167E1	2.68285E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
2.0E0	2.1E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.80027E-1	-8.96525E-1	-9.04744E0	-9.0421E0	4.17233E-3	9.55582E-2	2.73192E1	-3.26523E1	-3.26432E1	2.68406E1	1.20142E-7	2.51814E-3	2.51814E-3	6.36047E-3	3.00852E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.80098E-1	-8.96478E-1	-9.04748E0	-9.04193E0	3.93391E-3	9.55343E-2	2.73309E1	-3.26248E1	-3.26272E1	2.68482E1	1.19978E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.79931E-1	-8.96382E-1	-9.04706E0	-9.0421E0	4.02927E-3	9.53197E-2	2.73331E1	-3.26736E1	-3.26165E1	2.68175E1	1.19653E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.80075E-1	-8.96573E-1	-9.0472E0	-9.04188E0	4.24385E-3	9.53436E-2	2.73178E1	-3.26686E1	-3.26107E1	2.68569E1	1.1987E-7	2.51752E-3	2.51752E-3	6.31251E-3	3.02097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.79931E-1	-8.96215E-1	-9.0477E0	-9.04188E0	3.98159E-3	9.54628E-2	2.73195E1	-3.26362E1	-3.26308E1	2.68322E1	1.1973E-7	2.51527E-3	2.51527E-3	6.31902E-3	3.00087E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.79836E-1	-8.96382E-1	-9.04753E0	-9.04191E0	4.1008E-3	9.56774E-2	2.72957E1	-3.26467E1	-3.26189E1	2.68298E1	1.20069E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.79931E-1	-8.96001E-1	-9.0476E0	-9.04167E0	3.91006E-3	9.54151E-2	2.73222E1	-3.26327E1	-3.25807E1	2.68647E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.80241E-1	-8.96335E-1	-9.04729E0	-9.04207E0	3.86238E-3	9.53436E-2	2.73523E1	-3.26325E1	-3.26266E1	2.68267E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.0041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.80194E-1	-8.96478E-1	-9.04732E0	-9.04167E0	3.95775E-3	9.55343E-2	2.73523E1	-3.2613E1	-3.26402E1	2.6843E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.80194E-1	-8.96049E-1	-9.04727E0	-9.04195E0	4.14848E-3	9.5439E-2	2.73243E1	-3.26645E1	-3.25846E1	2.68214E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.03286E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.79979E-1	-8.96263E-1	-9.04741E0	-9.04181E0	4.31538E-3	9.5439E-2	2.73097E1	-3.27268E1	-3.26225E1	2.68279E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.79884E-1	-8.96192E-1	-9.04686E0	-9.0416E0	4.31538E-3	9.5439E-2	2.73092E1	-3.26767E1	-3.26189E1	2.68076E1	1.20177E-7	2.52197E-3	2.52197E-3	6.30221E-3	3.01237E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.7986E-1	-8.96478E-1	-9.04691E0	-9.0415E0	3.93391E-3	9.53913E-2	2.73237E1	-3.26705E1	-3.262E1	2.68424E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.79765E-1	-8.96525E-1	-9.04708E0	-9.04145E0	3.98159E-3	9.56535E-2	2.72967E1	-3.26518E1	-3.26693E1	2.68394E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03449E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.7986E-1	-8.96382E-1	-9.04696E0	-9.04186E0	4.00543E-3	9.53436E-2	2.73556E1	-3.26789E1	-3.26302E1	2.68304E1	1.20959E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9926E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.79717E-1	-8.96358E-1	-9.04677E0	-9.04193E0	4.07696E-3	9.51767E-2	2.73461E1	-3.26793E1	-3.26205E1	2.68148E1	1.21117E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.80075E-1	-8.96192E-1	-9.04663E0	-9.04155E0	4.12464E-3	9.54628E-2	2.73381E1	-3.26838E1	-3.26472E1	2.68169E1	1.2212E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.04156E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.79955E-1	-8.96192E-1	-9.04679E0	-9.04167E0	3.79086E-3	9.53436E-2	2.73228E1	-3.26602E1	-3.26024E1	2.68611E1	1.2212E-7	2.52448E-3	2.52448E-3	6.29684E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.79741E-1	-8.96072E-1	-9.04679E0	-9.04212E0	3.93391E-3	9.52482E-2	2.73243E1	-3.26549E1	-3.26536E1	2.68346E1	1.20907E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9874E-1
