[Scan]
initial_time=2016-01-18T18:33:37
final_time=2016-01-18T18:33:56
ip_count=19
run=1024
dataset=3
scan=236
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.79622E-1
ql1_imon=1.33458E-8
ql2_vset=
ql2_vmon=-8.96311E-1
ql2_imon=1.90973E-9
ql3_vset=
ql3_vmon=-9.04689E0
ql3_imon=1.02925E-10
ql4_vset=
ql4_vmon=-9.04169E0
ql4_imon=-1.51753E-11
mult1=-9.4755E-9
mult2=-2.71861E-9
rf_tmon=-4.66263E-3
rf_agc=3.23362E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.64816E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19435E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54043E1
cs_ef1b_imon=2.84503E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04628E1
cs_ea1_imon=2.50964E-5
lens1_vset=-5.0E0
lens1_vmon=-5.34542E0
lens1_imon=2.86534E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65029E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.49347E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.93405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.34537E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11838E1
os_restr1_imon=4.26643E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.35638E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91944E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01533E1
cs_anode1_imon=2.97153E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2038E0
olens4_imon=3.35313E-8
tplens_vset=1.4E-1
tplens_vmon=1.68921E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.5002E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03027E2
lens6_imon=2.98141E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=4.08249E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.78583E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.17552E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49986E0
os_ea2_imon=-7.0238E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00502E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.15929E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.4177E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02013E1
cs_anode2_imon=2.24136E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73261E1
iondef1_imon=1.1275E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.10792E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.00025E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.86855E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.84641E-6
window_vset=0.0E0
window_vmon=2.5158E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82676E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50077E3
multb_neg_imon=7.5763E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33315E1
os_fil1_imon=9.44024E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65705E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30875E1
cs_fil1_imon=9.95615E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6266E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67464E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84071E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.13739E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05813E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22821E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40018E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.14843E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09418E0	-8.80241E-1	-8.96382E-1	-9.04717E0	-9.04195E0	3.76701E-3	9.55105E-2	2.73163E1	-3.2662E1	-3.2603E1	2.6829E1	1.20383E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00563E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.80027E-1	-8.96096E-1	-9.04675E0	-9.04179E0	3.71933E-3	9.52959E-2	2.73195E1	-3.26975E1	-3.26104E1	2.6837E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.80122E-1	-8.96335E-1	-9.04689E0	-9.04202E0	3.76701E-3	9.54628E-2	2.73204E1	-3.26455E1	-3.26413E1	2.68376E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.80241E-1	-8.96311E-1	-9.0466E0	-9.04202E0	3.93391E-3	9.57727E-2	2.73092E1	-3.2662E1	-3.26744E1	2.68476E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.79955E-1	-8.96215E-1	-9.04708E0	-9.04198E0	3.93391E-3	9.55105E-2	2.73393E1	-3.26428E1	-3.26116E1	2.68316E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.7986E-1	-8.96144E-1	-9.04701E0	-9.04243E0	3.91006E-3	9.53197E-2	2.73165E1	-3.26651E1	-3.25972E1	2.68274E1	1.20226E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.79908E-1	-8.95977E-1	-9.04696E0	-9.04167E0	4.14848E-3	9.55582E-2	2.73123E1	-3.26344E1	-3.26272E1	2.68202E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.79979E-1	-8.96072E-1	-9.04682E0	-9.04198E0	4.33922E-3	9.55343E-2	2.73364E1	-3.26278E1	-3.26107E1	2.68382E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.79908E-1	-8.96144E-1	-9.04698E0	-9.04171E0	4.24385E-3	9.56535E-2	2.73165E1	-3.2647E1	-3.2605E1	2.68442E1	1.20383E-7	2.51116E-3	2.51116E-3	6.34037E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.79955E-1	-8.95905E-1	-9.04737E0	-9.04183E0	3.98159E-3	9.56535E-2	2.73279E1	-3.26554E1	-3.26374E1	2.68532E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.80003E-1	-8.95858E-1	-9.04739E0	-9.04207E0	3.74317E-3	9.54866E-2	2.73105E1	-3.26825E1	-3.26675E1	2.68337E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09704E0	-8.79955E-1	-8.96025E-1	-9.04708E0	-9.04212E0	4.19617E-3	9.60588E-2	2.73159E1	-3.26326E1	-3.26434E1	2.68376E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0968E0	-8.80051E-1	-8.96096E-1	-9.04713E0	-9.04198E0	4.1008E-3	9.57727E-2	2.73488E1	-3.27098E1	-3.2639E1	2.68508E1	1.19697E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.00453E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.80218E-1	-8.96239E-1	-9.04706E0	-9.04224E0	4.02927E-3	9.55582E-2	2.73406E1	-3.26334E1	-3.26376E1	2.68247E1	1.19653E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02133E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.80051E-1	-8.95786E-1	-9.04715E0	-9.04167E0	3.98159E-3	9.57251E-2	2.73159E1	-3.26368E1	-3.26032E1	2.68358E1	1.19978E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.02277E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.79884E-1	-8.96239E-1	-9.04689E0	-9.04193E0	3.79086E-3	9.54151E-2	2.73207E1	-3.26585E1	-3.2653E1	2.68306E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.79741E-1	-8.96287E-1	-9.04717E0	-9.04167E0	3.91006E-3	9.56297E-2	2.73452E1	-3.26602E1	-3.25912E1	2.68322E1	1.20069E-7	2.52099E-3	2.52099E-3	6.26916E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09657E0	-8.79693E-1	-8.95905E-1	-9.04715E0	-9.04167E0	4.02927E-3	9.54866E-2	2.73144E1	-3.26747E1	-3.26243E1	2.68319E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98156E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.79812E-1	-8.96168E-1	-9.04722E0	-9.04181E0	4.43459E-3	9.52959E-2	2.72877E1	-3.26476E1	-3.26561E1	2.68316E1	1.19891E-7	2.51498E-3	2.51498E-3	6.32328E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.79622E-1	-8.96311E-1	-9.04689E0	-9.04169E0	4.31538E-3	9.55582E-2	2.73261E1	-3.26747E1	-3.25996E1	2.68322E1	1.20209E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99941E-1
