[Scan]
initial_time=2016-01-18T18:35:24
final_time=2016-01-18T18:35:43
ip_count=19
run=1024
dataset=3
scan=240
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.79812E-1
ql1_imon=1.33756E-8
ql2_vset=
ql2_vmon=-8.95905E-1
ql2_imon=1.87258E-9
ql3_vset=
ql3_vmon=-9.04696E0
ql3_imon=1.63651E-10
ql4_vset=
ql4_vmon=-9.04198E0
ql4_imon=-1.63674E-11
mult1=-9.74761E-9
mult2=-2.70366E-9
rf_tmon=-4.46818E-3
rf_agc=3.27723E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.14848E-3
ql5_imon=1.66206E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65014E0
bslens_imon=2.4145E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19737E1
lens5a_imon=2.01256E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04817E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54103E1
cs_ef1b_imon=2.82593E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04731E1
cs_ea1_imon=2.53302E-5
lens1_vset=-5.0E0
lens1_vmon=-5.32481E0
lens1_imon=2.6863E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03549E1
cs_ea2_imon=1.4943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8467E1
cs_ef1a_imon=2.94342E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=1.35276E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11604E1
os_restr1_imon=4.25166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15471E1
os_ea1_imon=2.35414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.06631E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25087E0
cs_ionrep_imon=1.19606E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91924E2
cs_nozzle_imon=1.93589E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=2.99135E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.33171E-8
tplens_vset=1.4E-1
tplens_vmon=1.63898E0
tplens_imon=-5.09181E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26649E1
iondef3_imon=1.50532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.58466E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0303E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.56535E-2
ql6_imon=4.1048E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26006E0
ionrepsh_imon=1.78704E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34013E1
lens5b_imon=2.16462E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.11641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50002E0
os_ea2_imon=-8.80152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.15785E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05936E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86011E-1
os_ef2bup_imon=-5.09543E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11292E1
os_restr2_imon=3.43392E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.30149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7347E1
iondef1_imon=1.11635E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.08761E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.86846E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02127E2
cs_ionfocb_imon=1.47446E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.47376E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82694E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92611E3
multa_neg_imon=7.36567E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.79636E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.46484E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36371E0
defgridb_imon=5.98096E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33308E1
os_fil1_imon=9.42901E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06843E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65732E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30942E1
cs_fil1_imon=9.96209E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62648E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67504E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76375E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.65395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.32262E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.79431E-1	-8.95858E-1	-9.04675E0	-9.04191E0	4.12464E-3	9.53913E-2	2.73111E1	-3.26843E1	-3.26086E1	2.6837E1	1.19757E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.79693E-1	-8.96168E-1	-9.04686E0	-9.04231E0	4.41074E-3	9.55582E-2	2.73473E1	-3.26591E1	-3.26615E1	2.68076E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.79812E-1	-8.96144E-1	-9.04698E0	-9.04198E0	4.36306E-3	9.5582E-2	2.73178E1	-3.26741E1	-3.26272E1	2.68343E1	1.19883E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.00522E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.79836E-1	-8.9612E-1	-9.04701E0	-9.04198E0	4.36306E-3	9.52959E-2	2.73261E1	-3.26543E1	-3.26176E1	2.68112E1	1.19991E-7	2.51393E-3	2.51393E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.79812E-1	-8.95882E-1	-9.04717E0	-9.04212E0	4.02927E-3	9.53197E-2	2.73163E1	-3.26815E1	-3.26178E1	2.68499E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09634E0	-8.79931E-1	-8.95786E-1	-9.04708E0	-9.04202E0	4.26769E-3	9.52959E-2	2.73201E1	-3.26488E1	-3.2641E1	2.68707E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09742E0	-8.79669E-1	-8.96335E-1	-9.04737E0	-9.04195E0	4.45843E-3	9.51767E-2	2.72945E1	-3.26422E1	-3.26171E1	2.6811E1	1.19991E-7	2.51603E-3	2.51603E-3	6.32063E-3	3.01735E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09773E0	-8.79693E-1	-8.95905E-1	-9.04715E0	-9.04179E0	4.31538E-3	9.53197E-2	2.73019E1	-3.26351E1	-3.26474E1	2.68335E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.79741E-1	-8.96144E-1	-9.04715E0	-9.04176E0	4.19617E-3	9.53913E-2	2.73159E1	-3.26699E1	-3.26116E1	2.68292E1	1.20132E-7	2.51557E-3	2.51557E-3	6.33112E-3	2.99916E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0958E0	-8.80122E-1	-8.96239E-1	-9.04715E0	-9.04167E0	4.12464E-3	9.58443E-2	2.73442E1	-3.26969E1	-3.26128E1	2.68178E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.80218E-1	-8.95524E-1	-9.04684E0	-9.04164E0	4.31538E-3	9.54628E-2	2.73538E1	-3.27312E1	-3.25713E1	2.68142E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00676E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.79908E-1	-8.95715E-1	-9.04729E0	-9.04202E0	4.3869E-3	9.54151E-2	2.73273E1	-3.26482E1	-3.26176E1	2.68442E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.80361E-1	-8.95905E-1	-9.04751E0	-9.04217E0	4.19617E-3	9.56535E-2	2.73375E1	-3.2648E1	-3.26474E1	2.68316E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.80313E-1	-8.95882E-1	-9.04717E0	-9.04212E0	4.19617E-3	9.55105E-2	2.73357E1	-3.26278E1	-3.26302E1	2.68284E1	1.20137E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.99348E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.80051E-1	-8.95953E-1	-9.0472E0	-9.04183E0	4.22001E-3	9.58204E-2	2.73345E1	-3.26873E1	-3.26266E1	2.68418E1	1.20017E-7	2.52318E-3	2.52318E-3	6.33486E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.80241E-1	-8.95739E-1	-9.04722E0	-9.04183E0	4.19617E-3	9.54151E-2	2.73207E1	-3.26464E1	-3.2602E1	2.68448E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.80504E-1	-8.96215E-1	-9.04717E0	-9.04202E0	3.95775E-3	9.5439E-2	2.73216E1	-3.26885E1	-3.26236E1	2.68286E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.80218E-1	-8.96192E-1	-9.0472E0	-9.04233E0	4.00543E-3	9.59158E-2	2.73417E1	-3.26744E1	-3.26378E1	2.68238E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.8017E-1	-8.95905E-1	-9.04689E0	-9.04198E0	4.33922E-3	9.56297E-2	2.73393E1	-3.26585E1	-3.26482E1	2.68238E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.79812E-1	-8.95905E-1	-9.04696E0	-9.04198E0	4.14848E-3	9.56535E-2	2.7347E1	-3.26874E1	-3.26649E1	2.68304E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01223E-1
