[Scan]
initial_time=2016-01-18T18:37:47
final_time=2016-01-18T18:38:07
ip_count=19
run=1024
dataset=4
scan=245
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.77666E-6
ql1_vset=
ql1_vmon=-8.79999E1
ql1_imon=-1.20999E-9
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=1.33312E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.18698E-9
ql4_vset=
ql4_vmon=1.04904E-3
ql4_imon=1.59638E-8
mult1=-2.25275E-8
mult2=-2.78648E-9
rf_tmon=-4.2E-3
rf_agc=3.24504E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=5.84292E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.31785E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=2.00975E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=2.83962E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04664E1
cs_ea1_imon=2.52742E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96265E0
lens1_imon=1.67977E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64795E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.48523E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.33831E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=4.25814E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14807E1
os_ea1_imon=2.36375E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20644E0
cs_ionrep_imon=1.19431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.97874E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=4.01979E-8
tplens_vset=1.4E-1
tplens_vmon=1.70212E0
tplens_imon=-2.16432E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.55624E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03047E2
lens6_imon=2.98137E-4
ql6_vset=1.0E-1
ql6_vmon=9.55582E-2
ql6_imon=9.38416E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23648E0
ionrepsh_imon=1.77182E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50865E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06141E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.16002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98025E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=3.43392E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73508E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68221E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.14567E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.88444E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-1.90952E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56471E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.45574E-1
window_imon=-7.49045E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82736E2
mask1_imon=2.38933E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.79738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.54646E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.2999E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.42763E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07047E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30909E1
cs_fil1_imon=9.96245E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74945E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.15754E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.204E3	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79999E1	2.6226E-4	-8.80016E1	4.05312E-4	4.22001E-3	9.52959E-2	2.73417E1	-3.26549E1	-3.26437E1	2.6825E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
2.0E0	1.10889E5	1.1E2	3.16E2	1.6E2	-7.29374E-2	-8.79998E1	2.6226E-4	-8.80017E1	1.19209E-4	4.31538E-3	9.50575E-2	2.73155E1	-3.26603E1	-3.26046E1	2.6843E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03027E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80001E1	1.19209E-4	-8.80014E1	5.48363E-4	4.07696E-3	9.52959E-2	2.73364E1	-3.26585E1	-3.25936E1	2.68204E1	1.19766E-7	2.51804E-3	2.51804E-3	6.28511E-3	3.01209E-1
4.0E0	2.4098E4	1.6E1	6.55E2	3.98E2	-7.286E-2	-8.80003E1	2.6226E-4	-8.80017E1	4.29153E-4	4.45843E-3	9.50813E-2	2.7359E1	-3.26277E1	-3.26295E1	2.68401E1	1.20142E-7	2.51919E-3	2.51919E-3	6.29684E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80002E1	0.0E0	-8.80018E1	7.15256E-5	4.24385E-3	9.50575E-2	2.72932E1	-3.26435E1	-3.26591E1	2.68313E1	1.19841E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.01862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80002E1	2.38419E-4	-8.80019E1	1.43051E-4	4.45843E-3	9.5439E-2	2.73045E1	-3.26609E1	-3.26675E1	2.68466E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3074E-3	2.9863E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.8E1	4.76837E-5	-8.80019E1	3.09944E-4	4.43459E-3	9.51767E-2	2.72968E1	-3.26803E1	-3.26077E1	2.68256E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80002E1	-9.53674E-5	-8.80018E1	5.24521E-4	4.36306E-3	9.51767E-2	2.73303E1	-3.26573E1	-3.2629E1	2.68534E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00041E-1
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.79998E1	9.53674E-5	-8.80017E1	9.53674E-4	4.72069E-3	9.52005E-2	2.73285E1	-3.26705E1	-3.26104E1	2.68496E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.0071E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.8E1	5.00679E-4	-8.80016E1	6.91414E-4	4.41074E-3	9.53436E-2	2.7355E1	-3.26549E1	-3.25864E1	2.68304E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.03185E-1
1.4E1	3.468E3	2.0E0	5.66E2	3.82E2	-7.286E-2	-8.80002E1	3.57628E-4	-8.80015E1	7.86781E-4	4.55379E-3	9.50575E-2	2.73464E1	-3.26897E1	-3.25888E1	2.68358E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02659E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80003E1	4.52995E-4	-8.80011E1	7.86781E-4	4.41074E-3	9.52005E-2	2.73159E1	-3.27035E1	-3.26326E1	2.68478E1	1.20517E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
1.6E1	5.11E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.8E1	-2.38419E-5	-8.80014E1	9.77516E-4	3.93391E-3	9.52721E-2	2.73253E1	-3.26474E1	-3.26285E1	2.68169E1	1.20244E-7	2.51804E-3	2.51804E-3	6.27399E-3	3.00942E-1
1.7E1	1.113E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.79999E1	2.14577E-4	-8.80011E1	2.14577E-4	4.12464E-3	9.54628E-2	2.73093E1	-3.26512E1	-3.25797E1	2.68673E1	1.21117E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	4.611E3	2.0E0	7.27E2	5.0E2	-7.3401E-2	-8.79999E1	3.33786E-4	-8.80014E1	4.05312E-4	4.24385E-3	9.54151E-2	2.7252E1	-3.25493E1	-3.2675E1	2.68184E1	1.21961E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
1.9E1	2.221E3	2.0E0	7.68E2	5.29E2	-7.31692E-2	-8.79999E1	3.57628E-4	-8.80012E1	5.24521E-4	4.24385E-3	9.55343E-2	2.73249E1	-3.2641E1	-3.26512E1	2.68334E1	1.21912E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
2.0E1	2.6448E4	1.4E1	8.08E2	5.58E2	-7.30918E-2	-8.8E1	2.38419E-4	-8.80013E1	6.19888E-4	4.29153E-3	9.53674E-2	2.7358E1	-3.26747E1	-3.2647E1	2.68394E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00824E-1
2.1E1	5.0E1	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80002E1	3.33786E-4	-8.80014E1	7.86781E-4	4.22001E-3	9.54151E-2	2.7286E1	-3.26695E1	-3.26556E1	2.68233E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
2.2E1	1.929E3	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80002E1	2.14577E-4	-8.80013E1	6.91414E-4	4.1008E-3	9.51529E-2	2.73122E1	-3.26455E1	-3.26396E1	2.68442E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.01104E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.79999E1	7.15256E-5	-8.80011E1	1.04904E-3	3.95775E-3	9.55582E-2	2.73508E1	-3.26446E1	-3.26146E1	2.68221E1	1.20004E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.00966E-1
