[Scan]
initial_time=2016-01-18T18:38:14
final_time=2016-01-18T18:38:33
ip_count=19
run=1024
dataset=4
scan=246
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.88787E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-1.12662E-9
ql2_vset=
ql2_vmon=1.43051E-4
ql2_imon=1.3606E-9
ql3_vset=
ql3_vmon=-8.80019E1
ql3_imon=-3.7644E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.59647E-8
mult1=-1.64539E-8
mult2=-2.82975E-9
rf_tmon=-4.97592E-3
rf_agc=3.24628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.1008E-3
ql5_imon=5.71859E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.47601E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=2.01023E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.82474E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.0216E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=2.51459E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98346E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64823E1
os_ef1alow_imon=2.98043E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03454E1
cs_ea2_imon=1.50197E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.93734E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.35131E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11911E1
os_restr1_imon=4.26558E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.36806E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63294E1
os_ef1bup_imon=3.06419E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19429E0
cs_ionrep_imon=1.19262E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93579E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02261E1
cs_anode1_imon=2.99225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=4.01419E-8
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-3.16584E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26086E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03044E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=9.53138E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29516E0
ionrepsh_imon=1.79361E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50753E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71576E1
cs_ef2a_imon=3.1615E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0534E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11309E1
os_restr2_imon=3.4277E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.28548E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73097E1
iondef1_imon=1.10626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68302E1
iondef4_imon=1.10554E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.15817E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.85753E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14752E0
cs_ionaccel_imon=-1.76137E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47393E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.71217E-6
window_vset=0.0E0
window_vmon=2.40854E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82718E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-7.39649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.40287E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.3375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29925E0
defgridb_imon=5.92339E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.42588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65802E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30894E1
cs_fil1_imon=9.94659E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62221E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67593E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.64602E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34771E-1
cs_fil2_imon=-2.40275E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1478E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.79478E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.118E3	3.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80006E1	-1.66893E-4	-8.80016E1	4.29153E-4	4.52995E-3	9.54866E-2	2.73568E1	-3.26789E1	-3.26248E1	2.68286E1	1.20055E-7	2.50882E-3	2.50882E-3	6.28592E-3	3.02511E-1
2.0E0	1.11228E5	1.07E2	3.16E2	1.6E2	-7.27828E-2	-8.80005E1	-7.15256E-5	-8.80018E1	5.24521E-4	4.48227E-3	9.53674E-2	2.73442E1	-3.26969E1	-3.26302E1	2.6843E1	1.20017E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01609E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80003E1	-1.66893E-4	-8.80014E1	3.09944E-4	4.45843E-3	9.51052E-2	2.73216E1	-3.26667E1	-3.26042E1	2.6847E1	1.20959E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9978E-1
4.0E0	2.4226E4	1.5E1	6.55E2	3.98E2	-7.35556E-2	-8.80005E1	-1.90735E-4	-8.80015E1	5.00679E-4	4.31538E-3	9.50813E-2	2.73204E1	-3.26573E1	-3.26065E1	2.6837E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80008E1	-9.53674E-5	-8.80013E1	3.33786E-4	4.3869E-3	9.52005E-2	2.73496E1	-3.26561E1	-3.265E1	2.68412E1	1.20877E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80005E1	-1.43051E-4	-8.80013E1	5.48363E-4	4.02927E-3	9.51767E-2	2.73129E1	-3.26464E1	-3.26284E1	2.68316E1	1.19861E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80004E1	9.53674E-5	-8.80013E1	7.39098E-4	4.45843E-3	9.5439E-2	2.73135E1	-3.26512E1	-3.26266E1	2.68358E1	1.20122E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80004E1	-7.15256E-5	-8.80013E1	6.67572E-4	4.52995E-3	9.54866E-2	2.73181E1	-3.26644E1	-3.26178E1	2.68436E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.2E1	1.04E2	1.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80004E1	-2.38419E-5	-8.80012E1	6.19888E-4	4.3869E-3	9.52721E-2	2.73167E1	-3.2678E1	-3.2637E1	2.68304E1	1.20158E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99686E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80003E1	-3.33786E-4	-8.80009E1	7.39098E-4	4.41074E-3	9.56535E-2	2.73145E1	-3.26791E1	-3.26225E1	2.68302E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.01347E-1
1.4E1	3.513E3	1.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80005E1	-4.76837E-4	-8.80011E1	6.91414E-4	4.07696E-3	9.5582E-2	2.7337E1	-3.26933E1	-3.26006E1	2.68328E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.5E1	9.1E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80002E1	-5.00679E-4	-8.80015E1	2.38419E-4	4.24385E-3	9.55343E-2	2.73314E1	-3.26627E1	-3.26181E1	2.68268E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99686E-1
1.6E1	5.48E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80004E1	0.0E0	-8.80012E1	6.67572E-4	4.41074E-3	9.54628E-2	2.73237E1	-3.26591E1	-3.25996E1	2.68743E1	1.20031E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.00676E-1
1.7E1	1.141E3	2.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80003E1	9.53674E-5	-8.80015E1	5.72205E-4	4.52995E-3	9.55343E-2	2.73081E1	-3.26554E1	-3.2611E1	2.68296E1	1.20278E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00824E-1
1.8E1	4.701E3	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80006E1	7.15256E-5	-8.80016E1	7.86781E-4	4.26769E-3	9.54866E-2	2.73039E1	-3.26585E1	-3.26452E1	2.68244E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.9E1	2.247E3	2.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80007E1	2.14577E-4	-8.80015E1	8.34465E-4	4.72069E-3	9.54866E-2	2.73225E1	-3.26687E1	-3.2611E1	2.68394E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
2.0E1	2.6576E4	2.4E1	8.08E2	5.58E2	-7.33239E-2	-8.80009E1	4.76837E-5	-8.80014E1	6.67572E-4	4.55379E-3	9.54628E-2	2.73482E1	-3.2662E1	-3.26024E1	2.68292E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.01609E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80009E1	-2.38419E-5	-8.80017E1	5.72205E-4	4.26769E-3	9.52959E-2	2.73352E1	-3.26644E1	-3.26113E1	2.68487E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03545E-1
2.2E1	1.818E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80006E1	2.14577E-4	-8.80015E1	8.58307E-4	4.45843E-3	9.54151E-2	2.73198E1	-3.26667E1	-3.26231E1	2.68352E1	1.20004E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80007E1	1.43051E-4	-8.80019E1	7.86781E-4	4.1008E-3	9.55105E-2	2.73097E1	-3.26608E1	-3.26086E1	2.68302E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1
