[Scan]
initial_time=2016-01-18T18:38:40
final_time=2016-01-18T18:39:00
ip_count=19
run=1024
dataset=4
scan=247
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.88033E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-1.08198E-9
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.40036E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.63078E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.59387E-8
mult1=-1.89635E-8
mult2=-2.73258E-9
rf_tmon=-3.70131E-3
rf_agc=3.38803E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=5.66959E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20157E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54067E1
cs_ef1b_imon=2.82773E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02409E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04429E1
cs_ea1_imon=2.50471E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9981E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64921E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03234E1
cs_ea2_imon=1.47261E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.35462E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1152E1
os_restr1_imon=4.26319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15107E1
os_ea1_imon=2.37096E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28514E0
cs_ionrep_imon=1.2145E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91969E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.98558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=4.01885E-8
tplens_vset=1.4E-1
tplens_vmon=1.70332E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03035E2
lens6_imon=2.98151E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=9.25493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=1.79093E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33742E1
lens5b_imon=2.15178E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-7.2473E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00749E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.14848E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11213E1
os_restr2_imon=3.43608E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.241E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.11824E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6843E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.18564E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.86368E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86296E1
mask2_imon=-6.6255E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.0836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15194E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.43351E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07377E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65685E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.95615E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67474E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80101E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.95952E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.46678E-1
res40_imon=-2.57265E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.184E3	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80006E1	2.38419E-4	-8.80017E1	7.62939E-4	4.24385E-3	9.56059E-2	2.73351E1	-3.26903E1	-3.26162E1	2.68352E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01347E-1
2.0E0	1.1085E5	1.14E2	3.16E2	1.6E2	-7.29374E-2	-8.80002E1	-2.14577E-4	-8.80014E1	7.62939E-4	4.12464E-3	9.57966E-2	2.73445E1	-3.26428E1	-3.26417E1	2.68065E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.00041E-1
3.0E0	2.3E1	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80003E1	-1.19209E-4	-8.80017E1	4.05312E-4	4.48227E-3	9.55582E-2	2.73088E1	-3.2648E1	-3.26162E1	2.68494E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.98592E-1
4.0E0	2.4313E4	1.6E1	6.55E2	3.98E2	-7.27828E-2	-8.80003E1	-1.90735E-4	-8.80013E1	5.72205E-4	4.673E-3	9.57251E-2	2.73267E1	-3.26771E1	-3.26032E1	2.6816E1	1.20045E-7	2.51611E-3	2.51611E-3	6.30171E-3	2.9971E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80003E1	1.19209E-4	-8.80013E1	5.00679E-4	4.62532E-3	9.55582E-2	2.73281E1	-3.26644E1	-3.26478E1	2.68532E1	1.19913E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80002E1	-4.76837E-5	-8.80017E1	2.38419E-5	4.57764E-3	9.55343E-2	2.73345E1	-3.26488E1	-3.26404E1	2.68296E1	1.20363E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80002E1	1.90735E-4	-8.80014E1	4.76837E-4	4.33922E-3	9.54628E-2	2.7355E1	-3.26885E1	-3.26002E1	2.68232E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80003E1	2.38419E-4	-8.80016E1	3.09944E-4	4.48227E-3	9.54866E-2	2.73311E1	-3.2662E1	-3.26148E1	2.68502E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
1.2E1	1.14E2	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80002E1	4.76837E-5	-8.80015E1	4.52995E-4	4.86374E-3	9.54151E-2	2.73201E1	-3.26579E1	-3.26368E1	2.6837E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80001E1	4.76837E-5	-8.80013E1	0.0E0	4.62532E-3	9.53913E-2	2.73189E1	-3.26524E1	-3.25888E1	2.68226E1	1.20069E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00302E-1
1.4E1	3.556E3	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80002E1	7.15256E-5	-8.80012E1	2.6226E-4	4.62532E-3	9.54866E-2	2.7311E1	-3.2649E1	-3.26183E1	2.68545E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.5E1	1.11E2	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80003E1	-4.76837E-5	-8.80016E1	5.00679E-4	4.60148E-3	9.53913E-2	2.73255E1	-3.26657E1	-3.25996E1	2.68331E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
1.6E1	4.99E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80004E1	-3.09944E-4	-8.80014E1	4.52995E-4	4.60148E-3	9.53674E-2	2.73544E1	-3.26867E1	-3.26248E1	2.68338E1	1.19861E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01609E-1
1.7E1	1.139E3	1.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80003E1	-7.15256E-5	-8.80013E1	6.4373E-4	4.19617E-3	9.53913E-2	2.73273E1	-3.26759E1	-3.26663E1	2.68273E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
1.8E1	4.694E3	2.0E0	7.27E2	5.0E2	-7.10051E-2	-8.80006E1	-5.24521E-4	-8.80015E1	7.86781E-4	4.45843E-3	9.53436E-2	2.73117E1	-3.26236E1	-3.2629E1	2.68269E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.9E1	2.39E3	3.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80002E1	-2.86102E-4	-8.80014E1	3.8147E-4	4.52995E-3	9.49144E-2	2.73195E1	-3.265E1	-3.26236E1	2.68593E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
2.0E1	2.6305E4	1.5E1	8.08E2	5.58E2	-7.18554E-2	-8.80002E1	-3.57628E-4	-8.80015E1	5.48363E-4	4.17233E-3	9.50098E-2	2.73303E1	-3.26681E1	-3.26116E1	2.68448E1	1.20383E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
2.1E1	4.9E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80004E1	-5.48363E-4	-8.80015E1	9.29832E-4	4.24385E-3	9.52959E-2	2.73287E1	-3.26697E1	-3.26313E1	2.68262E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97963E-1
2.2E1	1.881E3	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80003E1	-2.14577E-4	-8.80014E1	5.24521E-4	4.3869E-3	9.52959E-2	2.73151E1	-3.26685E1	-3.26183E1	2.68448E1	1.20209E-7	2.52276E-3	2.52276E-3	6.29128E-3	2.97901E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80002E1	-2.6226E-4	-8.80013E1	7.15256E-4	4.41074E-3	9.54866E-2	2.73117E1	-3.26597E1	-3.26404E1	2.6843E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
