[Scan]
initial_time=2016-01-18T18:39:07
final_time=2016-01-18T18:39:26
ip_count=19
run=1024
dataset=4
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79809E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-1.03071E-9
ql2_vset=
ql2_vmon=-9.53674E-5
ql2_imon=1.40045E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-3.54548E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.59548E-8
mult1=-1.70432E-8
mult2=-2.69535E-9
rf_tmon=-5.58086E-3
rf_agc=3.18758E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.53823E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19616E1
lens5a_imon=2.02381E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=2.83638E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04447E1
cs_ea1_imon=2.53175E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95243E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.52308E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84706E1
cs_ef1a_imon=2.93765E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.34461E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.25886E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.33888E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63479E1
os_ef1bup_imon=3.07244E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26532E0
cs_ionrep_imon=1.19755E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=2.98955E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20408E0
olens4_imon=4.02104E-8
tplens_vset=1.4E-1
tplens_vmon=1.6907E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26042E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.56201E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03035E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.38678E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=1.78876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.18747E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53749E0
os_ea2_imon=-8.43694E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.15353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.42129E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22051E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11208E1
os_restr2_imon=3.43284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.27044E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.23884E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7318E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68725E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.1674E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81236E-1
olens1_imon=7.86452E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16258E0
cs_ionaccel_imon=-1.61039E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-5.97678E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82686E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.26385E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.88893E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.38281E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33324E1
os_fil1_imon=9.39789E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06885E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66038E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30922E1
cs_fil1_imon=9.9529E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6269E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67411E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55094E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.20947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22855E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33767E-3
inlet_lpb_pmon=2.98306E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.5195E-3
foreline_cvt_pmon=2.5195E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22962E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.101E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80005E1	-2.14577E-4	-8.80013E1	5.48363E-4	4.50611E-3	9.52959E-2	2.73104E1	-3.26461E1	-3.26124E1	2.68292E1	1.20278E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
2.0E0	1.10515E5	9.9E1	3.16E2	1.6E2	-7.21643E-2	-8.80005E1	-1.90735E-4	-8.80016E1	5.48363E-4	4.12464E-3	9.55582E-2	2.7329E1	-3.2675E1	-3.26254E1	2.68448E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.0071E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80006E1	9.53674E-5	-8.80015E1	4.76837E-4	4.24385E-3	9.56059E-2	2.73358E1	-3.26454E1	-3.26135E1	2.68012E1	1.20297E-7	2.5225E-3	2.5225E-3	6.31299E-3	2.99083E-1
4.0E0	2.408E4	1.3E1	6.55E2	3.98E2	-7.27828E-2	-8.80005E1	0.0E0	-8.80014E1	2.14577E-4	4.41074E-3	9.55343E-2	2.73399E1	-3.26518E1	-3.26398E1	2.68592E1	1.19831E-7	2.51472E-3	2.51472E-3	6.3126E-3	2.99014E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80008E1	9.53674E-5	-8.80014E1	6.91414E-4	3.83854E-3	9.55582E-2	2.73189E1	-3.26404E1	-3.26549E1	2.68151E1	1.2033E-7	2.51007E-3	2.51007E-3	6.29645E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80008E1	4.76837E-5	-8.80015E1	7.86781E-4	4.22001E-3	9.56535E-2	2.73098E1	-3.26691E1	-3.26142E1	2.68551E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80006E1	-1.66893E-4	-8.80014E1	6.19888E-4	4.05312E-3	9.56297E-2	2.73075E1	-3.26657E1	-3.2599E1	2.68016E1	1.20158E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80007E1	9.53674E-5	-8.80014E1	6.67572E-4	4.36306E-3	9.55343E-2	2.73339E1	-3.26729E1	-3.26038E1	2.68923E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80004E1	4.76837E-5	-8.80014E1	4.05312E-4	4.26769E-3	9.55343E-2	2.73231E1	-3.26639E1	-3.26338E1	2.68226E1	1.19809E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.9978E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80007E1	0.0E0	-8.80016E1	5.48363E-4	3.91006E-3	9.55343E-2	2.73417E1	-3.26987E1	-3.26416E1	2.68244E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.97963E-1
1.4E1	3.548E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80008E1	1.90735E-4	-8.80017E1	2.86102E-4	4.14848E-3	9.56535E-2	2.73393E1	-3.26981E1	-3.26206E1	2.68538E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80009E1	1.90735E-4	-8.80015E1	5.72205E-4	4.12464E-3	9.52005E-2	2.73291E1	-3.26597E1	-3.26404E1	2.6792E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.6E1	4.67E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80006E1	-7.15256E-5	-8.80013E1	6.19888E-4	4.05312E-3	9.5439E-2	2.73139E1	-3.26644E1	-3.26307E1	2.68372E1	1.20106E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00197E-1
1.7E1	1.115E3	0.0E0	6.87E2	4.7E2	-7.10051E-2	-8.80006E1	-3.09944E-4	-8.80014E1	3.8147E-4	4.17233E-3	9.50813E-2	2.73478E1	-3.26717E1	-3.26464E1	2.6837E1	1.19913E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
1.8E1	4.496E3	3.0E0	7.27E2	5.0E2	-7.08504E-2	-8.80008E1	-2.38419E-4	-8.80014E1	3.8147E-4	4.41074E-3	9.52482E-2	2.7367E1	-3.26974E1	-3.26095E1	2.6819E1	1.19809E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
1.9E1	2.285E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80008E1	0.0E0	-8.80016E1	4.29153E-4	4.19617E-3	9.54151E-2	2.73004E1	-3.26567E1	-3.26236E1	2.68632E1	1.19749E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.02253E-1
2.0E1	2.6814E4	1.0E1	8.08E2	5.58E2	-7.21643E-2	-8.80007E1	-1.66893E-4	-8.80015E1	8.34465E-4	4.29153E-3	9.53436E-2	2.73283E1	-3.2624E1	-3.26404E1	2.68166E1	1.2026E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01738E-1
2.1E1	4.7E1	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80007E1	-1.66893E-4	-8.80013E1	5.48363E-4	4.36306E-3	9.55343E-2	2.73356E1	-3.26286E1	-3.26279E1	2.68536E1	1.20004E-7	2.51783E-3	2.51783E-3	6.31E-3	2.99753E-1
2.2E1	1.867E3	1.0E0	8.89E2	6.17E2	-7.286E-2	-8.80007E1	-1.66893E-4	-8.80016E1	6.19888E-4	3.98159E-3	9.51529E-2	2.7315E1	-3.26631E1	-3.26419E1	2.68361E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80007E1	-9.53674E-5	-8.80014E1	5.72205E-4	4.3869E-3	9.54628E-2	2.7318E1	-3.26691E1	-3.26042E1	2.68725E1	1.20092E-7	2.5195E-3	2.5195E-3	6.33767E-3	2.98306E-1
