[Scan]
initial_time=2016-01-18T18:39:34
final_time=2016-01-18T18:39:53
ip_count=19
run=1024
dataset=4
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.80498E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-9.95612E-10
ql2_vset=
ql2_vmon=3.57628E-4
ql2_imon=1.40122E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.40642E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.59121E-8
mult1=-1.75522E-8
mult2=-2.73395E-9
rf_tmon=-5.23816E-3
rf_agc=3.28017E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.50611E-3
ql5_imon=6.02913E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67329E0
bslens_imon=2.41938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19341E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04976E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53997E1
cs_ef1b_imon=2.82579E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02351E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04475E1
cs_ea1_imon=2.52486E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0218E0
lens1_imon=1.52037E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03802E1
cs_ea2_imon=1.49878E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84267E1
cs_ef1a_imon=2.95298E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.35895E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1216E1
os_restr1_imon=4.26176E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.34152E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.07183E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20609E0
cs_ionrep_imon=1.20112E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93763E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=3.00059E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.02216E-8
tplens_vset=1.4E-1
tplens_vmon=1.69098E0
tplens_imon=-3.51978E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2618E1
iondef3_imon=1.51966E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26715E1
iondef2_imon=1.56214E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03042E2
lens6_imon=2.98095E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=8.91995E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33114E0
ionrepsh_imon=1.78937E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.15994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74617E1
cs_ef2b_imon=3.12396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50045E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71159E1
cs_ef2a_imon=3.16532E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06788E0
os_ef2alow_imon=-2.35217E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.12869E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11065E1
os_restr2_imon=3.44925E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.2628E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73205E1
iondef1_imon=1.11759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.20313E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.89569E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13593E0
cs_ionaccel_imon=-1.7857E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47469E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56909E1
einzel_imon=7.5106E-6
window_vset=0.0E0
window_vmon=2.78503E-1
window_imon=-9.27312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82701E2
mask1_imon=2.39348E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.15511E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.58526E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.22236E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44394E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.42623E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08314E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66059E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30904E1
cs_fil1_imon=9.94723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63148E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67764E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.69815E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.42434E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.37379E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22605E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60365E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.22E3	2.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80009E1	4.76837E-5	-8.80018E1	3.09944E-4	4.52995E-3	9.51529E-2	2.73222E1	-3.26354E1	-3.26266E1	2.68779E1	1.19953E-7	2.51203E-3	2.51203E-3	6.28056E-3	3.0071E-1
2.0E0	1.11628E5	1.1E2	3.16E2	1.6E2	-7.29374E-2	-8.8001E1	7.15256E-5	-8.80014E1	4.29153E-4	4.36306E-3	9.53913E-2	2.73118E1	-3.26493E1	-3.26089E1	2.68298E1	1.20004E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.03286E-1
3.0E0	1.7E1	2.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80008E1	-1.19209E-4	-8.80015E1	1.66893E-4	4.19617E-3	9.54151E-2	2.7363E1	-3.26753E1	-3.26202E1	2.68372E1	1.20069E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02396E-1
4.0E0	2.4042E4	8.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80009E1	0.0E0	-8.80012E1	3.33786E-4	4.29153E-3	9.54151E-2	2.73129E1	-3.265E1	-3.26272E1	2.6813E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80011E1	7.15256E-5	-8.80011E1	1.19209E-4	4.22001E-3	9.53197E-2	2.73201E1	-3.26597E1	-3.26314E1	2.68298E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80007E1	-2.38419E-5	-8.80012E1	1.43051E-4	4.29153E-3	9.57489E-2	2.73297E1	-3.26711E1	-3.26098E1	2.68358E1	1.20017E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80003E1	1.43051E-4	-8.80015E1	5.00679E-4	4.3869E-3	9.55582E-2	2.73296E1	-3.26425E1	-3.2634E1	2.68394E1	1.2033E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.201E-2	-8.80004E1	2.38419E-5	-8.80013E1	5.24521E-4	4.26769E-3	9.55343E-2	2.73424E1	-3.26561E1	-3.26248E1	2.68022E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.2E1	1.15E2	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80003E1	-4.76837E-5	-8.80014E1	4.76837E-4	4.02927E-3	9.55105E-2	2.73287E1	-3.27115E1	-3.26012E1	2.68376E1	1.20191E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.00144E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80005E1	-2.38419E-4	-8.80014E1	6.4373E-4	4.41074E-3	9.57489E-2	2.73339E1	-3.26597E1	-3.26194E1	2.68292E1	1.19941E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.01104E-1
1.4E1	3.523E3	1.0E0	5.66E2	3.82E2	-7.17779E-2	-8.80005E1	-3.33786E-4	-8.80012E1	5.00679E-4	4.48227E-3	9.56535E-2	2.72955E1	-3.25996E1	-3.2599E1	2.68388E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01475E-1
1.5E1	1.13E2	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80005E1	1.90735E-4	-8.80011E1	1.90735E-4	4.02927E-3	9.57489E-2	2.73328E1	-3.26579E1	-3.26349E1	2.68106E1	1.19544E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.00966E-1
1.6E1	4.96E2	0.0E0	6.47E2	4.41E2	-7.06958E-2	-8.80008E1	-9.53674E-5	-8.80012E1	6.4373E-4	4.41074E-3	9.56297E-2	2.73472E1	-3.26627E1	-3.26356E1	2.68713E1	1.20017E-7	2.50898E-3	2.50898E-3	6.31288E-3	3.00302E-1
1.7E1	1.105E3	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80006E1	2.38419E-5	-8.80015E1	7.15256E-4	4.1008E-3	9.57251E-2	2.73504E1	-3.26872E1	-3.26566E1	2.68618E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01609E-1
1.8E1	4.514E3	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80007E1	-2.38419E-5	-8.80016E1	4.52995E-4	4.41074E-3	9.56297E-2	2.73033E1	-3.26366E1	-3.26284E1	2.68308E1	1.19713E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.02813E-1
1.9E1	2.241E3	3.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80007E1	-2.6226E-4	-8.80013E1	5.00679E-4	4.45843E-3	9.53436E-2	2.73045E1	-3.26811E1	-3.26407E1	2.68331E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.9943E-1
2.0E1	2.644E4	1.1E1	8.08E2	5.58E2	-7.22418E-2	-8.80005E1	2.38419E-4	-8.80011E1	1.90735E-4	4.05312E-3	9.55582E-2	2.73115E1	-3.26596E1	-3.26017E1	2.68812E1	1.19766E-7	2.51248E-3	2.51248E-3	6.31299E-3	2.98819E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80007E1	7.15256E-5	-8.80014E1	3.33786E-4	4.1008E-3	9.55105E-2	2.73394E1	-3.26603E1	-3.26174E1	2.68262E1	1.1949E-7	2.51919E-3	2.51919E-3	6.31269E-3	2.98592E-1
2.2E1	1.955E3	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80005E1	1.90735E-4	-8.80012E1	5.48363E-4	4.41074E-3	9.56535E-2	2.73434E1	-3.26968E1	-3.26166E1	2.6822E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00676E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80003E1	3.57628E-4	-8.80013E1	5.00679E-4	4.50611E-3	9.55343E-2	2.73205E1	-3.26715E1	-3.2618E1	2.68334E1	1.19841E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01609E-1
