[Scan]
initial_time=2016-01-18T18:40:27
final_time=2016-01-18T18:40:46
ip_count=19
run=1024
dataset=4
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.86499E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-9.90546E-10
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=1.38222E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-3.36773E-9
ql4_vset=
ql4_vmon=9.29832E-4
ql4_imon=1.58261E-8
mult1=-2.61517E-8
mult2=-2.6727E-9
rf_tmon=-5.31753E-3
rf_agc=3.34117E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.98159E-3
ql5_imon=5.43821E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05133E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54085E1
cs_ef1b_imon=2.83241E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.53499E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.73745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.48198E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=2.94522E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.35602E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11478E1
os_restr1_imon=4.25166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15017E1
os_ea1_imon=2.37169E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63305E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21725E0
cs_ionrep_imon=1.20476E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9198E2
cs_nozzle_imon=1.93442E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01677E1
cs_anode1_imon=2.97693E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.03674E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-2.02012E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2635E1
iondef3_imon=1.49244E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98036E-4
ql6_vset=1.0E-1
ql6_vmon=9.52959E-2
ql6_imon=9.19652E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.76461E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48041E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00374E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7133E1
cs_ef2a_imon=3.15209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.28058E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11442E1
os_restr2_imon=3.44293E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.25974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68632E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.16404E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81545E-1
olens1_imon=7.93414E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.77409E-1
window_imon=-8.82392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82704E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.5234E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93674E3
defgrida_imon=7.0151E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.57027E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=9.44979E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08056E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30913E1
cs_fil1_imon=9.9669E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85701E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.55739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22719E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31157E-3
inlet_lpb_pmon=2.98536E-1
chamber_ion_pmon=1.19922E-7
chamber_cvt_pmon=2.52018E-3
foreline_cvt_pmon=2.52018E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.98335E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=147
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.228E3	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80005E1	4.76837E-5	-8.80011E1	8.82149E-4	4.64916E-3	9.51529E-2	2.73075E1	-3.26543E1	-3.26183E1	2.68244E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.99E-1
2.0E0	1.11158E5	9.0E1	3.16E2	1.6E2	-7.38649E-2	-8.80006E1	1.19209E-4	-8.8001E1	7.39098E-4	4.41074E-3	9.55343E-2	2.73201E1	-3.2644E1	-3.26032E1	2.68244E1	1.20383E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.99E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.47923E-2	-8.80006E1	1.43051E-4	-8.80009E1	1.00136E-3	4.48227E-3	9.54628E-2	2.73977E1	-3.26726E1	-3.26744E1	2.68418E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
4.0E0	2.4155E4	8.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80007E1	-7.15256E-5	-8.80013E1	1.00136E-3	4.36306E-3	9.55582E-2	2.73574E1	-3.26717E1	-3.26284E1	2.68406E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80008E1	-4.76837E-5	-8.80011E1	1.0252E-3	4.07696E-3	9.57251E-2	2.73027E1	-3.26801E1	-3.25942E1	2.6849E1	1.19646E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80012E1	-2.86102E-4	-8.80014E1	1.0252E-3	3.86238E-3	9.53197E-2	2.73069E1	-3.26649E1	-3.26242E1	2.68346E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80009E1	-1.90735E-4	-8.80012E1	1.09673E-3	4.36306E-3	9.52244E-2	2.73015E1	-3.26861E1	-3.25846E1	2.68238E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80012E1	-2.38419E-4	-8.8001E1	9.29832E-4	4.00543E-3	9.5129E-2	2.73375E1	-3.26829E1	-3.25703E1	2.68544E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00302E-1
1.2E1	1.13E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80009E1	2.14577E-4	-8.80013E1	7.15256E-4	4.17233E-3	9.53436E-2	2.73027E1	-3.26476E1	-3.2647E1	2.6822E1	1.20069E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01871E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80007E1	0.0E0	-8.80013E1	8.82149E-4	4.22001E-3	9.54628E-2	2.73231E1	-3.26476E1	-3.26242E1	2.6807E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.03185E-1
1.4E1	3.558E3	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80007E1	4.76837E-5	-8.80014E1	6.91414E-4	4.72069E-3	9.5439E-2	2.73381E1	-3.2635E1	-3.26939E1	2.68376E1	1.20122E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80007E1	2.38419E-5	-8.80017E1	9.05991E-4	4.57764E-3	9.54151E-2	2.73352E1	-3.2659E1	-3.26408E1	2.68389E1	1.20122E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.99E-1
1.6E1	4.68E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80008E1	4.76837E-5	-8.80012E1	4.52995E-4	4.60148E-3	9.52482E-2	2.73818E1	-3.26697E1	-3.2659E1	2.68292E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.99941E-1
1.7E1	1.13E3	1.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80007E1	-4.76837E-5	-8.80013E1	7.15256E-4	4.74453E-3	9.53197E-2	2.73183E1	-3.26873E1	-3.26398E1	2.67992E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
1.8E1	4.694E3	2.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80007E1	-7.15256E-5	-8.80015E1	6.19888E-4	4.45843E-3	9.54151E-2	2.73345E1	-3.26741E1	-3.26627E1	2.6828E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0071E-1
1.9E1	2.346E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80005E1	1.43051E-4	-8.80015E1	6.67572E-4	4.24385E-3	9.53674E-2	2.72961E1	-3.26506E1	-3.2629E1	2.6834E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
2.0E1	2.6499E4	1.4E1	8.08E2	5.58E2	-7.27828E-2	-8.80008E1	-2.6226E-4	-8.80016E1	1.43051E-4	4.05312E-3	9.51052E-2	2.73428E1	-3.26744E1	-3.26148E1	2.68563E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80008E1	-4.76837E-5	-8.80015E1	7.86781E-4	4.1008E-3	9.54866E-2	2.73293E1	-3.26343E1	-3.26284E1	2.68394E1	1.19965E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
2.2E1	1.844E3	0.0E0	8.89E2	6.17E2	-7.13915E-2	-8.80007E1	1.19209E-4	-8.80014E1	7.86781E-4	4.62532E-3	9.52005E-2	2.73444E1	-3.26658E1	-3.26301E1	2.68124E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80009E1	2.38419E-4	-8.80015E1	9.29832E-4	3.98159E-3	9.52959E-2	2.73213E1	-3.26404E1	-3.2635E1	2.68632E1	1.19922E-7	2.52018E-3	2.52018E-3	6.31157E-3	2.98536E-1
