[Scan]
initial_time=2016-01-18T18:40:54
final_time=2016-01-18T18:41:13
ip_count=19
run=1024
dataset=4
scan=252
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.77365E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-9.01043E-10
ql2_vset=
ql2_vmon=1.19209E-4
ql2_imon=1.37925E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-3.04706E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.58552E-8
mult1=-2.05408E-8
mult2=-2.73306E-9
rf_tmon=-5.18196E-3
rf_agc=3.35392E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.07696E-3
ql5_imon=5.34117E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.09021E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19541E1
lens5a_imon=2.0035E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=2.82521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04546E1
cs_ea1_imon=2.5468E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02534E0
lens1_imon=1.64779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.50232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.93513E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.34877E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.2567E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.3355E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=1.18661E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91919E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=2.99207E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20406E0
olens4_imon=4.01753E-8
tplens_vset=1.4E-1
tplens_vmon=1.67565E0
tplens_imon=-2.38717E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.51117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.56426E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03079E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.53674E-2
ql6_imon=9.21917E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=1.77521E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.14826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53466E0
os_ea2_imon=-7.94404E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00761E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07498E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.12066E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.12396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.14456E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.88844E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.75816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.5999E-1
window_imon=-8.03104E-7
mask1_vset=-4.8E2
mask1_vmon=-4.827E2
mask1_imon=2.39372E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.50905E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.80471E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33366E1
os_fil1_imon=9.43063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07257E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66177E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3091E1
cs_fil1_imon=9.94906E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67802E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.14195E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.50281E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22887E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=2.99093E-1
chamber_ion_pmon=1.1969E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.2145E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.213E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80008E1	2.38419E-5	-8.80015E1	3.09944E-4	4.3869E-3	9.5892E-2	2.73104E1	-3.26797E1	-3.26396E1	2.68487E1	1.20017E-7	2.50898E-3	2.50898E-3	6.3074E-3	3.00824E-1
2.0E0	1.10741E5	9.3E1	3.16E2	1.6E2	-7.22418E-2	-8.80008E1	-9.53674E-5	-8.80013E1	8.34465E-4	4.26769E-3	9.55582E-2	2.73132E1	-3.26538E1	-3.26434E1	2.68352E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
3.0E0	1.2E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80007E1	-4.76837E-5	-8.80011E1	5.00679E-4	4.45843E-3	9.56535E-2	2.72971E1	-3.26903E1	-3.26095E1	2.68502E1	1.20106E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9943E-1
4.0E0	2.4354E4	1.1E1	6.55E2	3.98E2	-7.21643E-2	-8.80008E1	4.76837E-5	-8.80013E1	5.24521E-4	4.22001E-3	9.56297E-2	2.73228E1	-3.26343E1	-3.26384E1	2.6843E1	1.20084E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.8001E1	4.76837E-5	-8.80012E1	4.05312E-4	4.74453E-3	9.53674E-2	2.73192E1	-3.26634E1	-3.26462E1	2.68532E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80009E1	-1.90735E-4	-8.80012E1	5.48363E-4	4.29153E-3	9.55343E-2	2.73193E1	-3.26644E1	-3.26201E1	2.68192E1	1.19965E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.8001E1	3.57628E-4	-8.80011E1	5.48363E-4	4.57764E-3	9.57251E-2	2.73273E1	-3.26386E1	-3.25888E1	2.6831E1	1.19851E-7	2.52061E-3	2.52061E-3	6.33977E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80013E1	4.76837E-5	-8.80009E1	4.52995E-4	4.50611E-3	9.57012E-2	2.73119E1	-3.26254E1	-3.2622E1	2.6858E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03712E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80017E1	-3.33786E-4	-8.80013E1	1.90735E-4	4.74453E-3	9.53913E-2	2.73333E1	-3.26517E1	-3.25923E1	2.68356E1	1.20127E-7	2.51783E-3	2.51783E-3	6.34907E-3	3.01981E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80009E1	1.19209E-4	-8.80013E1	3.09944E-4	4.98295E-3	9.56297E-2	2.73147E1	-3.26711E1	-3.26609E1	2.68319E1	1.20045E-7	2.52293E-3	2.52293E-3	6.31879E-3	3.04068E-1
1.4E1	3.553E3	6.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8001E1	-1.66893E-4	-8.80012E1	2.38419E-4	4.88758E-3	9.54866E-2	2.72997E1	-3.26585E1	-3.2623E1	2.68466E1	1.21964E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
1.5E1	1.18E2	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80006E1	-1.43051E-4	-8.80016E1	4.52995E-4	4.12464E-3	9.56059E-2	2.73285E1	-3.26494E1	-3.26182E1	2.6831E1	1.2142E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.0201E-1
1.6E1	4.75E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80007E1	-5.48363E-4	-8.80016E1	3.09944E-4	4.22001E-3	9.54628E-2	2.73381E1	-3.26386E1	-3.26236E1	2.6834E1	1.2212E-7	2.51954E-3	2.51954E-3	6.28056E-3	3.00966E-1
1.7E1	1.18E3	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80008E1	-1.90735E-4	-8.80015E1	4.52995E-4	4.26769E-3	9.55105E-2	2.73435E1	-3.26903E1	-3.26615E1	2.6816E1	1.2142E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.00676E-1
1.8E1	4.715E3	7.0E0	7.27E2	5.0E2	-7.286E-2	-8.80009E1	2.38419E-5	-8.80013E1	4.52995E-4	4.22001E-3	9.53436E-2	2.73093E1	-3.26837E1	-3.26134E1	2.68154E1	1.2098E-7	2.52599E-3	2.52599E-3	6.32356E-3	2.99941E-1
1.9E1	2.355E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80009E1	1.43051E-4	-8.80011E1	4.52995E-4	4.24385E-3	9.5582E-2	2.73315E1	-3.26903E1	-3.25924E1	2.68444E1	1.2054E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9978E-1
2.0E1	2.6559E4	2.1E1	8.08E2	5.58E2	-7.286E-2	-8.80007E1	4.76837E-4	-8.80012E1	5.00679E-4	4.24385E-3	9.53436E-2	2.73482E1	-3.26644E1	-3.26461E1	2.68528E1	1.19872E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.02277E-1
2.1E1	5.6E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80008E1	-2.14577E-4	-8.80011E1	1.66893E-4	4.33922E-3	9.50575E-2	2.737E1	-3.26603E1	-3.26663E1	2.68364E1	1.2062E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9892E-1
2.2E1	1.935E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.8001E1	2.38419E-5	-8.80014E1	1.90735E-4	4.14848E-3	9.49621E-2	2.73535E1	-3.26467E1	-3.26296E1	2.68551E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80009E1	1.19209E-4	-8.80011E1	7.86781E-4	4.07696E-3	9.53674E-2	2.73375E1	-3.26685E1	-3.26207E1	2.6837E1	1.1969E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.99093E-1
