[Scan]
initial_time=2016-01-18T18:41:20
final_time=2016-01-18T18:41:40
ip_count=19
run=1024
dataset=4
scan=253
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.76093E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.99577E-10
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=1.34988E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.04085E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.58639E-8
mult1=-2.1191E-8
mult2=-2.76053E-9
rf_tmon=-5.42568E-3
rf_agc=3.28469E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.69499E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.26017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=2.83674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02002E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=2.5422E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95424E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.48379E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8449E1
cs_ef1a_imon=2.94414E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.35481E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12277E1
os_restr1_imon=4.26175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.37529E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.17592E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9199E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20394E0
olens4_imon=4.02324E-8
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-3.35395E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26002E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.98339E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.42934E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.78119E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33538E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49303E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06139E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=3.42959E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23002E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.09842E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.16645E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.90541E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.67197E-1
window_imon=-8.06708E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86777E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=6.80602E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9376E3
defgrida_imon=6.66182E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=6.72671E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=5.98409E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=9.41982E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07305E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6592E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30897E1
cs_fil1_imon=9.94618E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62912E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67786E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.73688E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6618E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.11859E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22846E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.10038E-1
res40_imon=-2.28433E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.124E3	3.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80013E1	3.8147E-4	-8.8001E1	7.86781E-4	4.50611E-3	9.56297E-2	2.73458E1	-3.26596E1	-3.26585E1	2.68148E1	1.19757E-7	2.51771E-3	2.51771E-3	6.28006E-3	2.98222E-1
2.0E0	1.10511E5	1.11E2	3.16E2	1.6E2	-7.03869E-2	-8.80013E1	2.6226E-4	-8.80014E1	7.15256E-4	4.12464E-3	9.55105E-2	2.73259E1	-3.26456E1	-3.26462E1	2.6825E1	1.198E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00453E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80011E1	1.19209E-4	-8.80011E1	1.04904E-3	4.22001E-3	9.5582E-2	2.73021E1	-3.26703E1	-3.26242E1	2.68394E1	1.19766E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00144E-1
4.0E0	2.3856E4	8.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80009E1	4.29153E-4	-8.80009E1	8.34465E-4	4.17233E-3	9.53674E-2	2.73069E1	-3.26785E1	-3.26278E1	2.68123E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.03027E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.27053E-2	-8.8001E1	2.38419E-4	-8.80012E1	6.91414E-4	4.1008E-3	9.53674E-2	2.73081E1	-3.26783E1	-3.26176E1	2.68581E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80008E1	-2.14577E-4	-8.80013E1	7.15256E-4	4.48227E-3	9.53913E-2	2.73163E1	-3.26449E1	-3.26496E1	2.68262E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80007E1	3.57628E-4	-8.80017E1	6.67572E-4	4.26769E-3	9.54628E-2	2.73418E1	-3.2648E1	-3.2634E1	2.68298E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80006E1	2.86102E-4	-8.80015E1	6.91414E-4	4.29153E-3	9.55343E-2	2.73039E1	-3.26508E1	-3.25983E1	2.6828E1	1.20487E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.2E1	1.02E2	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80007E1	2.86102E-4	-8.80014E1	4.29153E-4	4.74453E-3	9.56059E-2	2.7318E1	-3.26401E1	-3.26107E1	2.68502E1	1.2212E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.02659E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80006E1	0.0E0	-8.80012E1	7.86781E-4	4.72069E-3	9.53436E-2	2.73476E1	-3.26508E1	-3.26484E1	2.68418E1	1.2212E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.4E1	3.565E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80006E1	3.8147E-4	-8.80014E1	7.39098E-4	4.45843E-3	9.55105E-2	2.73646E1	-3.26747E1	-3.25954E1	2.68526E1	1.2212E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.98156E-1
1.5E1	9.9E1	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80007E1	1.66893E-4	-8.80014E1	1.00136E-3	4.673E-3	9.5439E-2	2.73357E1	-3.26645E1	-3.2623E1	2.6834E1	1.20854E-7	2.52647E-3	2.52647E-3	6.34588E-3	2.98222E-1
1.6E1	5.1E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80008E1	1.19209E-4	-8.80012E1	6.19888E-4	4.41074E-3	9.54628E-2	2.73309E1	-3.26609E1	-3.26182E1	2.68196E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.7E1	1.139E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80008E1	3.09944E-4	-8.80011E1	3.57628E-4	4.26769E-3	9.56297E-2	2.72901E1	-3.26855E1	-3.26218E1	2.68406E1	1.20031E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
1.8E1	4.698E3	5.0E0	7.27E2	5.0E2	-7.286E-2	-8.80011E1	1.19209E-4	-8.80013E1	5.96046E-4	4.45843E-3	9.56774E-2	2.72974E1	-3.26484E1	-3.26461E1	2.6819E1	1.198E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03286E-1
1.9E1	2.261E3	3.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80013E1	-2.86102E-4	-8.80013E1	5.72205E-4	4.673E-3	9.56535E-2	2.73526E1	-3.2653E1	-3.26482E1	2.6831E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00563E-1
2.0E1	2.6759E4	1.3E1	8.08E2	5.58E2	-7.24736E-2	-8.80012E1	2.6226E-4	-8.8001E1	5.00679E-4	4.57764E-3	9.55343E-2	2.73502E1	-3.2641E1	-3.2626E1	2.68302E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.1E1	4.8E1	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80012E1	0.0E0	-8.80011E1	9.53674E-4	4.60148E-3	9.54628E-2	2.73228E1	-3.26997E1	-3.26083E1	2.68334E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
2.2E1	1.863E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80012E1	-2.6226E-4	-8.80013E1	8.10623E-4	4.79221E-3	9.55105E-2	2.72895E1	-3.26669E1	-3.26681E1	2.68617E1	1.20158E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.01995E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80015E1	7.15256E-5	-8.80013E1	6.67572E-4	4.60148E-3	9.54628E-2	2.73237E1	-3.26711E1	-3.26002E1	2.68064E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
