[Scan]
initial_time=2016-01-18T18:42:13
final_time=2016-01-18T18:42:33
ip_count=19
run=1024
dataset=4
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.77447E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.72397E-10
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=1.41441E-9
ql3_vset=
ql3_vmon=-8.80015E1
ql3_imon=-2.97766E-9
ql4_vset=
ql4_vmon=7.39098E-4
ql4_imon=1.58554E-8
mult1=-2.00275E-8
mult2=-2.78879E-9
rf_tmon=-4.60065E-3
rf_agc=3.36896E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.44119E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54229E1
cs_ef1b_imon=2.85404E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=2.5011E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99089E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.95964E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03372E1
cs_ea2_imon=1.47982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.35736E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.12421E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=2.35438E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.05874E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22146E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91966E2
cs_nozzle_imon=1.93741E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.98666E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.04332E-8
tplens_vset=1.4E-1
tplens_vmon=1.66847E0
tplens_imon=-1.69568E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26055E1
iondef3_imon=1.47045E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26556E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.53436E-2
ql6_imon=8.88062E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=1.77218E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33772E1
lens5b_imon=2.17161E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.14236E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49543E0
os_ea2_imon=-5.15643E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00284E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7166E1
cs_ef2a_imon=3.15245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01552E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.44876E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11346E1
os_restr2_imon=3.44076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02067E1
cs_anode2_imon=2.23992E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73535E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68255E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.19141E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.93052E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0953E0
cs_ionaccel_imon=-2.13657E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56748E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.81013E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-3.41797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.91634E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.16434E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.43748E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07341E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66402E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30939E1
cs_fil1_imon=9.95867E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67913E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.64077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.07965E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.227E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9714E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.76401E-1
res40_imon=-2.60148E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.197E3	1.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80011E1	2.38419E-4	-8.80012E1	9.77516E-4	4.62532E-3	9.57012E-2	2.73499E1	-3.26809E1	-3.26172E1	2.68151E1	1.19965E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.02659E-1
2.0E0	1.1124E5	1.05E2	3.16E2	1.6E2	-7.21643E-2	-8.80012E1	2.38419E-5	-8.80014E1	7.86781E-4	4.48227E-3	9.54866E-2	2.73438E1	-3.26435E1	-3.26441E1	2.68163E1	1.19902E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.00966E-1
3.0E0	1.0E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80012E1	1.43051E-4	-8.80016E1	2.86102E-4	4.52995E-3	9.56297E-2	2.73387E1	-3.27002E1	-3.26249E1	2.68418E1	1.19766E-7	2.51248E-3	2.51248E-3	6.3074E-3	2.99348E-1
4.0E0	2.4415E4	2.1E1	6.55E2	3.98E2	-7.27828E-2	-8.80014E1	4.29153E-4	-8.80018E1	3.57628E-4	4.48227E-3	9.53197E-2	2.73081E1	-3.26561E1	-3.2626E1	2.68605E1	1.2026E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80013E1	4.52995E-4	-8.8001E1	6.91414E-4	4.24385E-3	9.50098E-2	2.73406E1	-3.26903E1	-3.26187E1	2.68172E1	1.198E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80012E1	2.86102E-4	-8.80011E1	4.05312E-4	4.19617E-3	9.52959E-2	2.73523E1	-3.26484E1	-3.26242E1	2.68094E1	1.20137E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80013E1	1.90735E-4	-8.80014E1	3.8147E-4	4.14848E-3	9.53197E-2	2.73255E1	-3.26446E1	-3.26092E1	2.68334E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80011E1	9.53674E-5	-8.80012E1	5.96046E-4	4.26769E-3	9.53674E-2	2.72974E1	-3.26543E1	-3.26107E1	2.68511E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02133E-1
1.2E1	9.8E1	1.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80013E1	1.66893E-4	-8.80011E1	5.72205E-4	4.19617E-3	9.54151E-2	2.73093E1	-3.262E1	-3.26086E1	2.6831E1	1.20311E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01995E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80009E1	0.0E0	-8.80015E1	5.96046E-4	4.36306E-3	9.55582E-2	2.73051E1	-3.26486E1	-3.26057E1	2.6834E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.4E1	3.556E3	2.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80011E1	2.38419E-5	-8.80013E1	7.39098E-4	4.22001E-3	9.52244E-2	2.73572E1	-3.27512E1	-3.2644E1	2.68608E1	1.21445E-7	2.52599E-3	2.52599E-3	6.29128E-3	3.01223E-1
1.5E1	9.6E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80008E1	2.14577E-4	-8.80017E1	3.33786E-4	4.26769E-3	9.53674E-2	2.73191E1	-3.26343E1	-3.26375E1	2.68465E1	1.21669E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.00247E-1
1.6E1	4.82E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.8001E1	-9.53674E-5	-8.80013E1	5.72205E-4	4.673E-3	9.54151E-2	2.7308E1	-3.26732E1	-3.26201E1	2.68418E1	1.19895E-7	2.51874E-3	2.51874E-3	6.31902E-3	2.9926E-1
1.7E1	1.179E3	0.0E0	6.87E2	4.7E2	-7.18554E-2	-8.80011E1	-2.14577E-4	-8.80013E1	6.67572E-4	4.14848E-3	9.56059E-2	2.7355E1	-3.26627E1	-3.2641E1	2.6807E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
1.8E1	4.575E3	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80013E1	2.14577E-4	-8.80012E1	5.24521E-4	4.05312E-3	9.53197E-2	2.73429E1	-3.26723E1	-3.26374E1	2.68418E1	1.19851E-7	2.50882E-3	2.50882E-3	6.3074E-3	3.01223E-1
1.9E1	2.365E3	0.0E0	7.68E2	5.29E2	-7.12368E-2	-8.80015E1	2.6226E-4	-8.80015E1	6.4373E-4	4.26769E-3	9.52721E-2	2.73423E1	-3.26608E1	-3.26148E1	2.68502E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00824E-1
2.0E1	2.6828E4	1.9E1	8.08E2	5.58E2	-7.20871E-2	-8.80013E1	1.43051E-4	-8.80012E1	7.62939E-4	4.33922E-3	9.52005E-2	2.73558E1	-3.26679E1	-3.26278E1	2.68148E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.04063E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80017E1	-4.76837E-5	-8.80013E1	5.48363E-4	4.3869E-3	9.51767E-2	2.73399E1	-3.26452E1	-3.26284E1	2.68401E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02659E-1
2.2E1	1.961E3	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80014E1	9.53674E-5	-8.80013E1	7.15256E-4	4.60148E-3	9.53197E-2	2.73464E1	-3.26496E1	-3.26354E1	2.68274E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.96634E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80015E1	2.38419E-4	-8.80015E1	7.39098E-4	4.62532E-3	9.53436E-2	2.73535E1	-3.26556E1	-3.26055E1	2.68255E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9714E-1
