[Scan]
initial_time=2016-01-18T18:42:40
final_time=2016-01-18T18:43:00
ip_count=19
run=1024
dataset=4
scan=256
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.88659E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-8.32796E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.38694E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.82487E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.5851E-8
mult1=-1.25694E-8
mult2=-2.73051E-9
rf_tmon=-4.14256E-3
rf_agc=3.40772E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.83494E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19677E1
lens5a_imon=2.01589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=2.85046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=2.53406E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00941E0
lens1_imon=1.63717E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65298E1
os_ef1alow_imon=3.00858E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03448E1
cs_ea2_imon=1.491E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84695E1
cs_ef1a_imon=2.92066E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.35894E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10573E1
os_restr1_imon=4.23952E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.3447E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63936E1
os_ef1bup_imon=3.10902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21906E0
cs_ionrep_imon=1.20076E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91952E2
cs_nozzle_imon=1.93732E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02383E1
cs_anode1_imon=2.99781E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20411E0
olens4_imon=4.0208E-8
tplens_vset=1.4E-1
tplens_vmon=1.69924E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26247E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26513E1
iondef2_imon=1.56638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98102E-4
ql6_vset=1.0E-1
ql6_vmon=9.56297E-2
ql6_imon=9.35173E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=1.79078E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.16879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74217E1
cs_ef2b_imon=3.09859E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4739E0
os_ea2_imon=-6.77604E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71188E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13449E0
os_ef2alow_imon=-2.35912E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55528E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10677E1
os_restr2_imon=3.41032E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.28159E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01346E1
cs_anode2_imon=2.24194E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73103E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68348E1
iondef4_imon=1.10345E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.16394E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.93372E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19501E0
cs_ionaccel_imon=-1.36867E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47066E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55756E1
einzel_imon=7.4828E-6
window_vset=0.0E0
window_vmon=2.4375E-1
window_imon=-3.4347E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82719E2
mask1_imon=2.38883E-4
mask2_vset=0.0E0
mask2_vmon=-1.8573E1
mask2_imon=-1.13583E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.63481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.14095E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28744E0
defgridb_imon=6.17823E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33338E1
os_fil1_imon=9.43046E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66303E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30912E1
cs_fil1_imon=9.96437E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63663E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.33518E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64581E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36394E-1
cs_fil2_imon=-2.94141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.90225E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22847E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31242E-3
inlet_lpb_pmon=3.00293E-1
chamber_ion_pmon=1.20146E-7
chamber_cvt_pmon=2.52023E-3
foreline_cvt_pmon=2.52023E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.82781E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.189E3	5.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80014E1	-3.09944E-4	-8.8001E1	6.4373E-4	4.673E-3	9.52721E-2	2.73664E1	-3.2685E1	-3.26767E1	2.68034E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
2.0E0	1.11459E5	1.04E2	3.16E2	1.6E2	-7.36328E-2	-8.80013E1	-9.53674E-5	-8.80013E1	6.91414E-4	4.43459E-3	9.54151E-2	2.7329E1	-3.2675E1	-3.26511E1	2.68046E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80013E1	-1.90735E-4	-8.80011E1	7.62939E-4	4.3869E-3	9.5129E-2	2.73092E1	-3.26341E1	-3.25982E1	2.68447E1	1.20031E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.00942E-1
4.0E0	2.4478E4	1.9E1	6.55E2	3.98E2	-7.22418E-2	-8.80014E1	1.19209E-4	-8.80015E1	6.4373E-4	4.26769E-3	9.52959E-2	2.73484E1	-3.26699E1	-3.26585E1	2.68004E1	1.20042E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80015E1	3.09944E-4	-8.80016E1	5.72205E-4	4.24385E-3	9.53197E-2	2.73237E1	-3.26735E1	-3.26176E1	2.68172E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80011E1	3.57628E-4	-8.80017E1	6.19888E-4	4.05312E-3	9.53913E-2	2.73009E1	-3.26693E1	-3.26416E1	2.68596E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.8001E1	4.29153E-4	-8.80016E1	3.57628E-4	4.17233E-3	9.54866E-2	2.73303E1	-3.26627E1	-3.25882E1	2.68436E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80012E1	4.76837E-5	-8.80015E1	6.67572E-4	4.05312E-3	9.52482E-2	2.73141E1	-3.26663E1	-3.26338E1	2.68352E1	1.20017E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.00563E-1
1.2E1	1.11E2	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.8001E1	4.05312E-4	-8.80014E1	4.29153E-4	4.64916E-3	9.52005E-2	2.73269E1	-3.26419E1	-3.26437E1	2.68563E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80011E1	1.19209E-4	-8.80016E1	7.86781E-4	4.62532E-3	9.55105E-2	2.73171E1	-3.26693E1	-3.26278E1	2.68605E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.99E-1
1.4E1	3.49E3	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80011E1	1.43051E-4	-8.80014E1	1.43051E-4	4.41074E-3	9.51767E-2	2.73297E1	-3.26344E1	-3.26194E1	2.6846E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
1.5E1	1.24E2	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80011E1	4.29153E-4	-8.80014E1	4.29153E-4	4.48227E-3	9.54151E-2	2.73351E1	-3.26705E1	-3.26476E1	2.68532E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	1.66893E-4	-8.80016E1	6.19888E-4	4.31538E-3	9.54866E-2	2.73009E1	-3.26633E1	-3.25936E1	2.68316E1	1.19913E-7	2.51334E-3	2.51334E-3	6.28552E-3	2.9926E-1
1.7E1	1.158E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80014E1	2.38419E-4	-8.80015E1	4.05312E-4	4.93526E-3	9.52482E-2	2.73171E1	-3.26446E1	-3.26272E1	2.6816E1	1.20017E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.00302E-1
1.8E1	4.683E3	2.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80013E1	7.15256E-5	-8.80012E1	3.09944E-4	5.126E-3	9.52244E-2	2.73622E1	-3.26663E1	-3.26404E1	2.68202E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.9E1	2.256E3	2.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80013E1	3.57628E-4	-8.80015E1	7.39098E-4	4.64916E-3	9.52244E-2	2.73433E1	-3.2626E1	-3.26162E1	2.68493E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
2.0E1	2.678E4	9.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80013E1	-1.90735E-4	-8.80015E1	3.8147E-4	4.3869E-3	9.5129E-2	2.73171E1	-3.26589E1	-3.26277E1	2.68236E1	1.19991E-7	2.51709E-3	2.51709E-3	6.29684E-3	2.99845E-1
2.1E1	6.9E1	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80013E1	-4.76837E-5	-8.80013E1	5.24521E-4	4.36306E-3	9.5129E-2	2.72903E1	-3.2667E1	-3.26966E1	2.68445E1	1.20001E-7	2.51911E-3	2.51911E-3	6.29951E-3	3.00761E-1
2.2E1	1.964E3	1.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80013E1	-2.38419E-5	-8.80012E1	7.15256E-4	4.45843E-3	9.53197E-2	2.73843E1	-3.26497E1	-3.25666E1	2.68529E1	1.20064E-7	2.51447E-3	2.51447E-3	6.33297E-3	3.01121E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80011E1	-2.38419E-5	-8.80011E1	6.91414E-4	4.3869E-3	9.56297E-2	2.73103E1	-3.26513E1	-3.26247E1	2.68348E1	1.20146E-7	2.52023E-3	2.52023E-3	6.31242E-3	3.00293E-1
