[Scan]
initial_time=2016-01-18T18:43:33
final_time=2016-01-18T18:43:53
ip_count=19
run=1024
dataset=4
scan=258
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.77525E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.4753E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.35636E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.75881E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=1.58109E-8
mult1=-1.62141E-8
mult2=-2.64094E-9
rf_tmon=-5.02269E-3
rf_agc=3.26425E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=5.50556E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69276E0
bslens_imon=2.35567E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19506E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5453E1
cs_ef1b_imon=2.86193E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.02174E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04268E1
cs_ea1_imon=2.51211E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02062E0
lens1_imon=1.85661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.95333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03448E1
cs_ea2_imon=1.47896E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83728E1
cs_ef1a_imon=2.92587E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.36564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11957E1
os_restr1_imon=4.28852E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14834E1
os_ea1_imon=2.35143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63925E1
os_ef1bup_imon=3.07044E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=1.19722E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01323E1
cs_anode1_imon=2.96514E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=4.02248E-8
tplens_vset=1.4E-1
tplens_vmon=1.68037E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26207E1
iondef3_imon=1.5225E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26791E1
iondef2_imon=1.54373E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02996E2
lens6_imon=2.98158E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.32324E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30991E0
ionrepsh_imon=1.78087E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.16879E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.1608E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52522E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06129E2
lens4b_imon=2.00743E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71727E1
cs_ef2a_imon=3.16671E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04124E0
os_ef2alow_imon=-2.98814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.60365E-1
os_ef2bup_imon=-5.49032E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11616E1
os_restr2_imon=3.43986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.27663E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.22109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.11546E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.1104E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.18091E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.96035E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-2.20273E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47407E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57019E1
einzel_imon=8.03189E-6
window_vset=0.0E0
window_vmon=2.28691E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.38938E-4
mask2_vset=0.0E0
mask2_vmon=-1.86842E1
mask2_imon=-3.4347E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.51613E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93686E3
defgrida_imon=5.98356E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40556E0
defgridb_imon=6.36228E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=9.42663E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.077E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66546E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30874E1
cs_fil1_imon=9.94914E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62766E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67942E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10396E-2
os_fil2_imon=-3.08622E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.59958E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.49521E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37517E-1
cs_fil2_imon=-2.20003E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17097E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22746E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20023E-1
res40_imon=-2.93948E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.187E3	1.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80015E1	-1.66893E-4	-8.80012E1	8.34465E-4	4.50611E-3	9.52959E-2	2.73287E1	-3.26313E1	-3.26219E1	2.69001E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
2.0E0	1.12404E5	1.03E2	3.16E2	1.6E2	-7.25507E-2	-8.80013E1	-3.09944E-4	-8.80013E1	8.58307E-4	4.45843E-3	9.53197E-2	2.73284E1	-3.26536E1	-3.26083E1	2.6816E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0148E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80013E1	-7.15256E-5	-8.80012E1	8.82149E-4	4.43459E-3	9.53913E-2	2.73269E1	-3.26708E1	-3.26172E1	2.6837E1	1.19965E-7	2.51826E-3	2.51826E-3	6.30466E-3	3.00302E-1
4.0E0	2.4382E4	1.3E1	6.55E2	3.98E2	-7.24736E-2	-8.80014E1	4.76837E-5	-8.80012E1	6.4373E-4	4.45843E-3	9.51529E-2	2.73311E1	-3.26691E1	-3.26384E1	2.68406E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80018E1	-1.90735E-4	-8.80011E1	5.96046E-4	4.26769E-3	9.55105E-2	2.73333E1	-3.26705E1	-3.26338E1	2.68304E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80014E1	-1.19209E-4	-8.80011E1	8.34465E-4	4.673E-3	9.52721E-2	2.73177E1	-3.26482E1	-3.26122E1	2.68232E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80012E1	-7.15256E-5	-8.80011E1	8.82149E-4	4.48227E-3	9.52959E-2	2.73297E1	-3.26482E1	-3.26645E1	2.68563E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80013E1	-1.90735E-4	-8.80014E1	6.67572E-4	4.24385E-3	9.53913E-2	2.72889E1	-3.26567E1	-3.25864E1	2.68647E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9952E-1
1.2E1	1.16E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80012E1	-2.6226E-4	-8.80016E1	6.19888E-4	4.36306E-3	9.55582E-2	2.73357E1	-3.26675E1	-3.26356E1	2.68274E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.00041E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80013E1	-1.43051E-4	-8.80011E1	5.48363E-4	4.52995E-3	9.52005E-2	2.73311E1	-3.26514E1	-3.26272E1	2.68514E1	1.20278E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01347E-1
1.4E1	3.582E3	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80017E1	-1.90735E-4	-8.80012E1	2.14577E-4	4.41074E-3	9.56535E-2	2.74144E1	-3.27113E1	-3.25972E1	2.6834E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80014E1	-9.53674E-5	-8.80011E1	4.52995E-4	4.64916E-3	9.52244E-2	2.73069E1	-3.26395E1	-3.26217E1	2.68448E1	1.20174E-7	2.51116E-3	2.51116E-3	6.29098E-3	2.97187E-1
1.6E1	4.55E2	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.8001E1	-2.6226E-4	-8.80009E1	6.67572E-4	4.1008E-3	9.55343E-2	2.73098E1	-3.26997E1	-3.26425E1	2.68352E1	1.20031E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.97236E-1
1.7E1	1.148E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80013E1	-2.86102E-4	-8.80009E1	8.10623E-4	4.14848E-3	9.55582E-2	2.73431E1	-3.2664E1	-3.26327E1	2.68606E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.96634E-1
1.8E1	4.593E3	4.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80013E1	-4.76837E-5	-8.80012E1	5.48363E-4	4.17233E-3	9.58681E-2	2.72927E1	-3.26265E1	-3.26234E1	2.68442E1	1.19872E-7	2.51915E-3	2.51915E-3	6.29624E-3	2.97499E-1
1.9E1	2.313E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.8001E1	-2.38419E-4	-8.80012E1	5.96046E-4	4.14848E-3	9.53436E-2	2.73123E1	-3.26561E1	-3.26392E1	2.6834E1	1.19958E-7	2.5124E-3	2.5124E-3	6.3121E-3	3.01272E-1
2.0E1	2.6574E4	1.3E1	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	-3.09944E-4	-8.80012E1	8.58307E-4	4.57764E-3	9.53913E-2	2.73181E1	-3.26703E1	-3.26172E1	2.68436E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3514E-3	3.02133E-1
2.1E1	4.4E1	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80013E1	1.19209E-4	-8.8001E1	6.67572E-4	4.45843E-3	9.55582E-2	2.73105E1	-3.26777E1	-3.2614E1	2.68202E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01738E-1
2.2E1	1.971E3	2.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80013E1	2.38419E-5	-8.80008E1	4.76837E-4	4.14848E-3	9.55582E-2	2.73472E1	-3.26723E1	-3.26374E1	2.68487E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80015E1	-1.90735E-4	-8.80008E1	8.34465E-4	4.17233E-3	9.54628E-2	2.73387E1	-3.26791E1	-3.26207E1	2.68214E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
