[Scan]
initial_time=2016-01-18T18:45:46
final_time=2016-01-18T18:46:06
ip_count=19
run=1024
dataset=4
scan=263
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.8292E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-8.21805E-10
ql2_vset=
ql2_vmon=0.0E0
ql2_imon=1.39916E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.56711E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.58184E-8
mult1=-1.81174E-8
mult2=-2.70954E-9
rf_tmon=-4.12604E-3
rf_agc=3.24125E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.30338E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6955E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19628E1
lens5a_imon=1.98521E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.0518E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54101E1
cs_ef1b_imon=2.84345E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02173E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04518E1
cs_ea1_imon=2.49413E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99351E0
lens1_imon=1.49776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65048E1
os_ef1alow_imon=2.97847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0371E1
cs_ea2_imon=1.48861E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84218E1
cs_ef1a_imon=2.93468E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.36993E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11603E1
os_restr1_imon=4.27914E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15141E1
os_ea1_imon=2.33959E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.0628E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24481E0
cs_ionrep_imon=1.19303E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91945E2
cs_nozzle_imon=1.93476E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01639E1
cs_anode1_imon=2.99022E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20351E0
olens4_imon=4.04299E-8
tplens_vset=1.4E-1
tplens_vmon=1.67388E0
tplens_imon=-2.8603E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.49497E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26956E1
iondef2_imon=1.54701E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03036E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.54866E-2
ql6_imon=9.12452E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31103E0
ionrepsh_imon=1.79531E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33883E1
lens5b_imon=2.17273E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74535E1
cs_ef2b_imon=3.13416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50437E0
os_ea2_imon=-6.95229E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0042E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71116E1
cs_ef2a_imon=3.15686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08091E0
os_ef2alow_imon=-2.53751E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.36617E-1
os_ef2bup_imon=-5.33104E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11103E1
os_restr2_imon=3.44513E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.29412E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01721E1
cs_anode2_imon=2.23974E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73464E1
iondef1_imon=1.10961E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68364E1
iondef4_imon=1.11422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.07851E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=7.976E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15514E0
cs_ionaccel_imon=-1.8442E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02052E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56628E1
einzel_imon=7.81758E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-9.4411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82666E2
mask1_imon=2.39173E-4
mask2_vset=0.0E0
mask2_vmon=-1.86439E1
mask2_imon=-6.52188E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.08353E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.07046E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.25038E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52831E0
defgridb_imon=6.11813E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.4338E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07424E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.96E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63473E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67937E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15978E-2
os_fil2_imon=-2.87094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.72411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84667E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34459E-1
cs_fil2_imon=-2.4182E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.92948E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22764E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.2186E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.7583E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.175E3	4.0E0	1.47E2	4.1E1	-7.27053E-2	-8.8002E1	-7.15256E-5	-8.80015E1	4.29153E-4	4.19617E-3	9.53913E-2	2.73311E1	-3.26779E1	-3.26054E1	2.68331E1	1.2212E-7	2.51468E-3	2.51468E-3	6.33161E-3	3.006E-1
2.0E0	1.12063E5	1.17E2	3.16E2	1.6E2	-7.286E-2	-8.80022E1	3.33786E-4	-8.80011E1	5.00679E-4	3.79086E-3	9.52482E-2	2.7364E1	-3.26711E1	-3.26332E1	2.6831E1	1.22014E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
3.0E0	2.8E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80021E1	2.38419E-5	-8.80012E1	1.90735E-4	3.98159E-3	9.52244E-2	2.73004E1	-3.2652E1	-3.26166E1	2.68238E1	1.2212E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.0071E-1
4.0E0	2.4153E4	1.1E1	6.55E2	3.98E2	-7.26282E-2	-8.80021E1	0.0E0	-8.8001E1	9.53674E-5	4.22001E-3	9.52244E-2	2.73157E1	-3.26626E1	-3.26036E1	2.68366E1	1.2212E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80023E1	1.43051E-4	-8.80011E1	2.14577E-4	4.07696E-3	9.53197E-2	2.73263E1	-3.26449E1	-3.26402E1	2.68244E1	1.21661E-7	2.52131E-3	2.52131E-3	6.3074E-3	3.00097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.8002E1	3.09944E-4	-8.80014E1	7.15256E-4	4.14848E-3	9.5439E-2	2.73195E1	-3.26314E1	-3.26008E1	2.68556E1	1.20435E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00041E-1
7.0E0	0.0E0	1.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80019E1	1.66893E-4	-8.80014E1	8.34465E-4	4.36306E-3	9.5129E-2	2.73249E1	-3.26518E1	-3.26248E1	2.68202E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80017E1	3.8147E-4	-8.80014E1	8.82149E-4	4.26769E-3	9.50575E-2	2.73299E1	-3.26785E1	-3.26101E1	2.68665E1	1.22016E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.03027E-1
1.2E1	1.05E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80016E1	-9.53674E-5	-8.80013E1	6.67572E-4	4.29153E-3	9.5129E-2	2.73192E1	-3.26487E1	-3.26383E1	2.6813E1	1.20435E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80016E1	9.53674E-5	-8.80017E1	7.15256E-4	4.57764E-3	9.50098E-2	2.73594E1	-3.2652E1	-3.2613E1	2.68308E1	1.19965E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.00563E-1
1.4E1	3.426E3	2.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80018E1	-2.38419E-5	-8.80014E1	9.77516E-4	4.19617E-3	9.53913E-2	2.72967E1	-3.26272E1	-3.26326E1	2.67968E1	1.20749E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80018E1	2.38419E-4	-8.80011E1	9.29832E-4	4.45843E-3	9.53197E-2	2.73544E1	-3.26536E1	-3.26068E1	2.68623E1	1.2212E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01085E-1
1.6E1	5.35E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80018E1	9.53674E-5	-8.80013E1	7.15256E-4	4.57764E-3	9.55105E-2	2.73213E1	-3.26543E1	-3.2623E1	2.68376E1	1.2212E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00824E-1
1.7E1	1.189E3	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80017E1	4.76837E-5	-8.80011E1	3.57628E-4	4.50611E-3	9.55582E-2	2.73231E1	-3.26771E1	-3.2641E1	2.68268E1	1.22067E-7	2.52428E-3	2.52428E-3	6.29098E-3	3.02396E-1
1.8E1	4.645E3	2.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80017E1	4.76837E-5	-8.80014E1	6.91414E-4	4.31538E-3	9.56535E-2	2.73357E1	-3.26609E1	-3.26056E1	2.68701E1	1.2212E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
1.9E1	2.233E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80017E1	2.38419E-4	-8.80012E1	3.8147E-4	4.31538E-3	9.53913E-2	2.73476E1	-3.26708E1	-3.26119E1	2.6828E1	1.2212E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.0E1	2.6826E4	2.3E1	8.08E2	5.58E2	-7.19325E-2	-8.80018E1	0.0E0	-8.80013E1	5.48363E-4	4.41074E-3	9.55105E-2	2.73357E1	-3.26603E1	-3.26014E1	2.6843E1	1.2212E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
2.1E1	6.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80017E1	-2.38419E-5	-8.8001E1	6.67572E-4	4.74453E-3	9.53197E-2	2.73201E1	-3.26524E1	-3.26585E1	2.68418E1	1.2212E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.01085E-1
2.2E1	1.923E3	3.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	4.76837E-5	-8.8001E1	6.19888E-4	4.43459E-3	9.54151E-2	2.7406E1	-3.278E1	-3.25894E1	2.68401E1	1.21601E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80019E1	0.0E0	-8.80011E1	2.38419E-4	4.64916E-3	9.54866E-2	2.73464E1	-3.26956E1	-3.26089E1	2.68364E1	1.2186E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
