[Scan]
initial_time=2016-01-18T18:46:13
final_time=2016-01-18T18:46:33
ip_count=19
run=1024
dataset=4
scan=264
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.74874E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-8.01218E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.39246E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.64999E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.58292E-8
mult1=-2.1793E-8
mult2=-2.85035E-9
rf_tmon=-4.58452E-3
rf_agc=3.38923E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.41115E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68777E0
bslens_imon=2.33948E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19448E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04658E1
cs_ea1_imon=2.52778E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96926E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64993E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.49136E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=2.93729E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.36747E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.24733E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=2.35402E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=1.20909E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=2.98378E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=4.04047E-8
tplens_vset=1.4E-1
tplens_vmon=1.68289E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26092E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.55697E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03007E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.53197E-2
ql6_imon=9.52709E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.80535E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12253E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51766E0
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71438E1
cs_ef2a_imon=3.17011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08519E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.28283E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.42923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.24569E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.13835E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.98999E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13675E0
cs_ionaccel_imon=-1.79419E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.80677E-6
window_vset=0.0E0
window_vmon=2.36564E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82719E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86374E1
mask2_imon=-7.38233E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=8.20113E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50101E3
multb_neg_imon=7.26385E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33335E1
os_fil1_imon=9.44018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66567E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.95723E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62684E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68017E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.7546E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.03129E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.1215E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.196E3	2.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80014E1	-2.6226E-4	-8.80014E1	5.24521E-4	4.36306E-3	9.53436E-2	2.73411E1	-3.26705E1	-3.26164E1	2.68484E1	1.20435E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00302E-1
2.0E0	1.1214E5	1.01E2	3.16E2	1.6E2	-7.23189E-2	-8.80014E1	-9.53674E-5	-8.80014E1	1.90735E-4	4.3869E-3	9.55582E-2	2.73442E1	-3.26729E1	-3.2623E1	2.6828E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
3.0E0	1.7E1	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80016E1	-2.38419E-4	-8.80014E1	6.91414E-4	4.50611E-3	9.55105E-2	2.73423E1	-3.26585E1	-3.26278E1	2.68214E1	1.20191E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01209E-1
4.0E0	2.4226E4	1.5E1	6.55E2	3.98E2	-7.25507E-2	-8.80017E1	2.38419E-5	-8.80015E1	3.57628E-4	4.86374E-3	9.52482E-2	2.73339E1	-3.26705E1	-3.26729E1	2.68184E1	1.20092E-7	2.51603E-3	2.51603E-3	6.29684E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80015E1	-1.90735E-4	-8.80016E1	3.57628E-4	4.60148E-3	9.53436E-2	2.73175E1	-3.26632E1	-3.26054E1	2.68524E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80015E1	-4.76837E-5	-8.80016E1	8.82149E-4	4.52995E-3	9.56297E-2	2.73604E1	-3.26657E1	-3.25954E1	2.68241E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.11597E-2	-8.80013E1	-1.66893E-4	-8.80011E1	4.52995E-4	4.33922E-3	9.56059E-2	2.73273E1	-3.26657E1	-3.26332E1	2.68526E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80016E1	-1.66893E-4	-8.80011E1	2.38419E-4	3.98159E-3	9.54628E-2	2.73021E1	-3.26314E1	-3.26158E1	2.6816E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03712E-1
1.2E1	1.26E2	0.0E0	4.85E2	3.23E2	-7.11597E-2	-8.80012E1	2.38419E-4	-8.80011E1	7.86781E-4	4.64916E-3	9.53674E-2	2.73098E1	-3.26478E1	-3.26242E1	2.68689E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.03712E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80013E1	-1.19209E-4	-8.80009E1	6.19888E-4	4.81606E-3	9.54628E-2	2.73399E1	-3.26549E1	-3.26182E1	2.6837E1	1.20568E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
1.4E1	3.537E3	4.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80015E1	-1.43051E-4	-8.8001E1	5.24521E-4	4.36306E-3	9.55105E-2	2.73311E1	-3.2662E1	-3.25859E1	2.68244E1	1.2212E-7	2.51915E-3	2.51915E-3	6.28511E-3	2.99879E-1
1.5E1	9.3E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80018E1	-1.43051E-4	-8.80013E1	5.24521E-4	4.52995E-3	9.56297E-2	2.72867E1	-3.26487E1	-3.26493E1	2.68406E1	1.20929E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99941E-1
1.6E1	5.21E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	0.0E0	-8.80012E1	3.8147E-4	4.64916E-3	9.5439E-2	2.73562E1	-3.26747E1	-3.25785E1	2.68436E1	1.20802E-7	2.51552E-3	2.51552E-3	6.28006E-3	3.01609E-1
1.7E1	1.16E3	1.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80019E1	0.0E0	-8.80012E1	2.6226E-4	4.29153E-3	9.57012E-2	2.72967E1	-3.26104E1	-3.26482E1	2.68454E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.8E1	4.635E3	3.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80018E1	0.0E0	-8.80013E1	6.4373E-4	4.57764E-3	9.57489E-2	2.73417E1	-3.26773E1	-3.26095E1	2.68325E1	1.19766E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00676E-1
1.9E1	2.228E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80017E1	-9.53674E-5	-8.8001E1	1.19209E-4	4.673E-3	9.56535E-2	2.7337E1	-3.2679E1	-3.26325E1	2.68588E1	1.20092E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.00348E-1
2.0E1	2.692E4	1.0E1	8.08E2	5.58E2	-7.23964E-2	-8.80015E1	2.6226E-4	-8.80009E1	4.52995E-4	4.29153E-3	9.53436E-2	2.73285E1	-3.26429E1	-3.25981E1	2.68101E1	1.20242E-7	2.51623E-3	2.51623E-3	6.3074E-3	3.02931E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80017E1	1.43051E-4	-8.8001E1	5.48363E-4	4.41074E-3	9.55105E-2	2.73393E1	-3.26956E1	-3.26012E1	2.68412E1	1.21058E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.00639E-1
2.2E1	1.888E3	1.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80017E1	1.90735E-4	-8.80011E1	4.52995E-4	4.24385E-3	9.52482E-2	2.72779E1	-3.25739E1	-3.26503E1	2.68267E1	1.20592E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80015E1	-1.66893E-4	-8.8001E1	5.48363E-4	4.36306E-3	9.53197E-2	2.73279E1	-3.26561E1	-3.26092E1	2.6825E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.03129E-1
