[Scan]
initial_time=2016-01-18T18:47:06
final_time=2016-01-18T18:47:26
ip_count=19
run=1024
dataset=4
scan=266
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79073E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-7.88164E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.39961E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.66207E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.58382E-8
mult1=-2.44788E-8
mult2=-2.85819E-9
rf_tmon=-4.8583E-3
rf_agc=3.23489E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.12464E-3
ql5_imon=5.63633E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64931E0
bslens_imon=2.59543E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20373E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.85836E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=2.53823E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96625E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65521E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.52092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=2.92864E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.3647E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.23904E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15113E1
os_ea1_imon=2.35042E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6408E1
os_ef1bup_imon=3.11352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=1.18818E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91949E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.98342E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=4.03083E-8
tplens_vset=1.4E-1
tplens_vmon=1.67268E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03031E2
lens6_imon=2.98166E-4
ql6_vset=1.0E-1
ql6_vmon=9.57251E-2
ql6_imon=9.27699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=1.77471E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.08974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49123E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.19786E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10481E1
os_restr2_imon=3.42527E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28054E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.2165E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.12413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.20675E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=8.00137E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.21423E0
cs_ionaccel_imon=-1.80861E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55822E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-6.15698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.86134E1
mask2_imon=-9.36451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.7397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=5.93362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.43159E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0811E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.96107E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62792E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68035E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84483E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.85818E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-1.85238E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22786E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=3.00741E-1
chamber_ion_pmon=1.20424E-7
chamber_cvt_pmon=2.52509E-3
foreline_cvt_pmon=2.52509E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.87854E-1
res40_imon=-2.68798E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.233E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80021E1	1.66893E-4	-8.80012E1	1.19209E-4	4.43459E-3	9.53913E-2	2.73653E1	-3.26461E1	-3.26148E1	2.68783E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.0E0	1.12181E5	1.0E2	3.16E2	1.6E2	-7.17779E-2	-8.80023E1	4.52995E-4	-8.80012E1	2.14577E-4	4.31538E-3	9.55582E-2	2.73443E1	-3.26689E1	-3.26548E1	2.68163E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
3.0E0	1.6E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80022E1	1.43051E-4	-8.80011E1	5.48363E-4	4.31538E-3	9.54628E-2	2.73489E1	-3.26573E1	-3.26385E1	2.68267E1	1.20062E-7	2.51863E-3	2.51863E-3	6.31283E-3	2.99991E-1
4.0E0	2.438E4	7.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80024E1	0.0E0	-8.80011E1	1.90735E-4	4.07696E-3	9.53197E-2	2.73123E1	-3.26831E1	-3.25978E1	2.68538E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80021E1	-2.38419E-4	-8.80012E1	6.19888E-4	4.22001E-3	9.51529E-2	2.73157E1	-3.26638E1	-3.26614E1	2.68424E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80018E1	-1.66893E-4	-8.80011E1	7.86781E-4	3.86238E-3	9.51052E-2	2.73363E1	-3.26995E1	-3.26021E1	2.68112E1	1.20106E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80022E1	4.76837E-5	-8.80013E1	4.76837E-4	3.76701E-3	9.50098E-2	2.73552E1	-3.26472E1	-3.26307E1	2.68635E1	1.19925E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00676E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80022E1	-1.66893E-4	-8.80013E1	6.91414E-4	4.02927E-3	9.4986E-2	2.73112E1	-3.2645E1	-3.26254E1	2.6813E1	1.20158E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.01995E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80024E1	-2.6226E-4	-8.80015E1	6.67572E-4	4.19617E-3	9.51052E-2	2.7406E1	-3.26272E1	-3.26443E1	2.67824E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.03185E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80026E1	4.76837E-5	-8.80013E1	7.39098E-4	4.14848E-3	9.53436E-2	2.72654E1	-3.26554E1	-3.26158E1	2.68641E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02396E-1
1.4E1	3.546E3	3.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80024E1	-1.43051E-4	-8.80011E1	5.48363E-4	4.17233E-3	9.54151E-2	2.73641E1	-3.27245E1	-3.2616E1	2.683E1	1.19933E-7	2.51755E-3	2.51755E-3	6.32371E-3	2.99475E-1
1.5E1	1.09E2	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80021E1	2.38419E-5	-8.80012E1	6.4373E-4	4.17233E-3	9.57012E-2	2.73195E1	-3.27011E1	-3.26122E1	2.68155E1					
1.6E1	4.97E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80023E1	-1.43051E-4	-8.80015E1	4.76837E-4	3.91006E-3	9.52959E-2	2.73333E1	-3.26771E1	-3.26278E1	2.68406E1	1.20383E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9926E-1
1.7E1	1.092E3	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80022E1	-7.15256E-5	-8.80013E1	8.82149E-4	4.00543E-3	9.55105E-2	2.73745E1	-3.27E1	-3.26368E1	2.68424E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
1.8E1	4.694E3	3.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80021E1	1.66893E-4	-8.80014E1	7.62939E-4	4.1008E-3	9.56535E-2	2.73E1	-3.26725E1	-3.26018E1	2.68082E1	1.20177E-7	2.52093E-3	2.52093E-3	6.30221E-3	3.0223E-1
1.9E1	2.323E3	1.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80019E1	2.6226E-4	-8.80013E1	5.48363E-4	4.14848E-3	9.57251E-2	2.73201E1	-3.26801E1	-3.26134E1	2.68214E1	1.1984E-7	2.51758E-3	2.51758E-3	6.3016E-3	2.99811E-1
2.0E1	2.6841E4	1.7E1	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	4.76837E-5	-8.80011E1	5.72205E-4	4.36306E-3	9.56774E-2	2.73364E1	-3.26555E1	-3.26089E1	2.68292E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
2.1E1	6.2E1	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.8002E1	-2.86102E-4	-8.80009E1	8.58307E-4	4.50611E-3	9.56535E-2	2.73759E1	-3.26655E1	-3.26372E1	2.68569E1	1.19851E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.9943E-1
2.2E1	1.884E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80021E1	-9.53674E-5	-8.80008E1	6.19888E-4	4.3869E-3	9.56774E-2	2.73149E1	-3.26631E1	-3.26503E1	2.68644E1	1.20122E-7	2.52867E-3	2.52867E-3	6.31837E-3	2.9926E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80022E1	-1.66893E-4	-8.8001E1	4.52995E-4	4.12464E-3	9.57251E-2	2.73027E1	-3.26627E1	-3.26266E1	2.684E1	1.20424E-7	2.52509E-3	2.52509E-3	6.3126E-3	3.00741E-1
