[Scan]
initial_time=2016-01-18T18:47:33
final_time=2016-01-18T18:47:52
ip_count=19
run=1024
dataset=4
scan=267
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.10051E-2
qbias_imon=-3.82182E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-8.09217E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.34944E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.52507E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.5823E-8
mult1=-1.78437E-8
mult2=-2.77251E-9
rf_tmon=-4.10987E-3
rf_agc=3.38984E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.16307E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67936E0
bslens_imon=2.42239E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19454E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53441E1
cs_ef1b_imon=2.85567E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04333E1
cs_ea1_imon=2.51552E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97707E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65303E1
os_ef1alow_imon=3.0058E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03618E1
cs_ea2_imon=1.49208E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84429E1
cs_ef1a_imon=2.91475E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.36346E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10689E1
os_restr1_imon=4.24369E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14939E1
os_ea1_imon=2.35222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=1.19972E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91946E2
cs_nozzle_imon=1.93539E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02319E1
cs_anode1_imon=2.98947E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=4.04048E-8
tplens_vset=1.4E-1
tplens_vmon=1.67568E0
tplens_imon=-4.07495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26158E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.52721E-2
ql6_imon=8.96132E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29836E0
ionrepsh_imon=1.80751E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74293E1
cs_ef2b_imon=3.10068E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51406E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00684E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71298E1
cs_ef2a_imon=3.17435E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.109E0
os_ef2alow_imon=-2.21316E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41048E-1
os_ef2bup_imon=-5.40691E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10747E1
os_restr2_imon=3.40824E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.28198E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01126E1
cs_anode2_imon=2.25932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73472E1
iondef1_imon=1.11031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68412E1
iondef4_imon=1.10206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.09468E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=7.96815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17879E0
cs_ionaccel_imon=-1.53548E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02131E2
cs_ionfocb_imon=1.4699E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55803E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.66339E-1
window_imon=-4.12975E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82749E2
mask1_imon=2.39032E-4
mask2_vset=0.0E0
mask2_vmon=-1.8569E1
mask2_imon=-1.01072E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.03313E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23314E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33321E1
os_fil1_imon=9.42385E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07433E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66688E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30886E1
cs_fil1_imon=9.96078E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63061E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68231E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.32359E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76749E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38142E-1
cs_fil2_imon=-2.96458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.38443E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22877E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=7.04994E-1
res40_imon=-2.53983E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.111E3	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80018E1	-3.33786E-4	-8.8001E1	6.67572E-4	4.05312E-3	9.52005E-2	2.73297E1	-3.26573E1	-3.26332E1	2.6774E1	1.2212E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.02769E-1
2.0E0	1.11768E5	1.14E2	3.16E2	1.6E2	-7.25507E-2	-8.80019E1	-4.76837E-4	-8.80008E1	5.24521E-4	4.22001E-3	9.53436E-2	2.73159E1	-3.2644E1	-3.26422E1	2.68593E1	1.20487E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80019E1	-5.24521E-4	-8.8001E1	2.38419E-4	4.50611E-3	9.55343E-2	2.7337E1	-3.26579E1	-3.26419E1	2.6804E1	1.20854E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.04241E-1
4.0E0	2.4777E4	1.5E1	6.55E2	3.98E2	-7.35556E-2	-8.80017E1	-3.09944E-4	-8.80007E1	5.48363E-4	4.48227E-3	9.54151E-2	2.73051E1	-3.26732E1	-3.26296E1	2.68609E1	1.21394E-7	2.51954E-3	2.51954E-3	6.28592E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80019E1	-5.48363E-4	-8.80009E1	4.76837E-4	4.36306E-3	9.55343E-2	2.73219E1	-3.26843E1	-3.26152E1	2.67956E1	1.2212E-7	2.52647E-3	2.52647E-3	6.28552E-3	3.01871E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80019E1	-4.05312E-4	-8.8001E1	1.00136E-3	4.673E-3	9.55343E-2	2.73303E1	-3.26422E1	-3.26182E1	2.68617E1	1.2212E-7	2.52923E-3	2.52923E-3	6.32356E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-1.66893E-4	-8.80011E1	5.00679E-4	4.43459E-3	9.52721E-2	2.73417E1	-3.26272E1	-3.25894E1	2.68274E1	1.22067E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80019E1	-6.19888E-4	-8.80011E1	6.19888E-4	4.57764E-3	9.52244E-2	2.72998E1	-3.26396E1	-3.26054E1	2.68274E1	1.22067E-7	2.52428E-3	2.52428E-3	6.3074E-3	2.9978E-1
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-3.8147E-4	-8.8001E1	1.0252E-3	4.69685E-3	9.53197E-2	2.73285E1	-3.26591E1	-3.26086E1	2.68484E1	1.2212E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03976E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80017E1	-2.14577E-4	-8.80011E1	5.96046E-4	4.31538E-3	9.53674E-2	2.73269E1	-3.2649E1	-3.26402E1	2.684E1	1.2212E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
1.4E1	3.602E3	3.0E0	5.66E2	3.82E2	-7.14689E-2	-8.8002E1	-2.14577E-4	-8.80012E1	6.91414E-4	4.14848E-3	9.52005E-2	2.73448E1	-3.27221E1	-3.262E1	2.68371E1	1.2212E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.5E1	1.3E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80019E1	-2.14577E-4	-8.80009E1	7.15256E-4	4.36306E-3	9.53197E-2	2.73093E1	-3.26789E1	-3.2611E1	2.68166E1	1.2212E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99175E-1
1.6E1	5.04E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80018E1	-1.19209E-4	-8.80009E1	4.76837E-4	3.98159E-3	9.52721E-2	2.72937E1	-3.26284E1	-3.26452E1	2.68442E1	1.21313E-7	2.51581E-3	2.51581E-3	6.32978E-3	3.00676E-1
1.7E1	1.167E3	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80015E1	-2.86102E-4	-8.8001E1	5.72205E-4	4.45843E-3	9.54628E-2	2.73045E1	-3.2659E1	-3.25812E1	2.68412E1	1.20517E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01995E-1
1.8E1	4.777E3	2.0E0	7.27E2	5.0E2	-7.07733E-2	-8.80018E1	-2.6226E-4	-8.8001E1	7.86781E-4	4.41074E-3	9.5439E-2	2.73369E1	-3.26536E1	-3.26395E1	2.68418E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31837E-3	2.9952E-1
1.9E1	2.281E3	0.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80018E1	-3.8147E-4	-8.80009E1	8.82149E-4	4.48227E-3	9.56297E-2	2.73207E1	-3.26915E1	-3.26206E1	2.6849E1	1.20907E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00041E-1
2.0E1	2.6945E4	9.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80017E1	-4.05312E-4	-8.80013E1	9.53674E-4	4.52995E-3	9.52244E-2	2.73195E1	-3.26554E1	-3.262E1	2.68382E1	1.20802E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.1E1	4.9E1	1.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80018E1	-3.8147E-4	-8.80013E1	4.05312E-4	4.45843E-3	9.52244E-2	2.73275E1	-3.26703E1	-3.26213E1	2.68184E1	1.2054E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
2.2E1	1.966E3	0.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80017E1	-4.76837E-4	-8.80013E1	6.19888E-4	4.69685E-3	9.54151E-2	2.72892E1	-3.26166E1	-3.26602E1	2.68212E1	1.20106E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0071E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.10051E-2	-8.80016E1	-5.96046E-4	-8.80014E1	2.38419E-4	4.81606E-3	9.52721E-2	2.73472E1	-3.26573E1	-3.26158E1	2.68412E1	1.20226E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9874E-1
