[Scan]
initial_time=2016-01-18T18:48:53
final_time=2016-01-18T18:49:12
ip_count=19
run=1024
dataset=4
scan=270
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.79625E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-7.65407E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.37695E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.62783E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.58481E-8
mult1=-1.99379E-8
mult2=-2.73894E-9
rf_tmon=-4.99909E-3
rf_agc=3.26543E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.30696E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69236E0
bslens_imon=2.56595E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19758E1
lens5a_imon=1.98914E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04912E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54038E1
cs_ef1b_imon=2.83934E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0475E1
cs_ea1_imon=2.52065E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0128E0
lens1_imon=1.64128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64857E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.50003E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=2.93665E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.36583E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.27114E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14865E1
os_ea1_imon=2.34301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.07357E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2353E0
cs_ionrep_imon=1.19656E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91933E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.99225E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.04304E-8
tplens_vset=1.4E-1
tplens_vmon=1.67909E0
tplens_imon=-2.70635E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26278E1
iondef3_imon=1.51081E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.54905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03001E2
lens6_imon=2.9805E-4
ql6_vset=1.0E-1
ql6_vmon=9.54151E-2
ql6_imon=9.14395E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26311E0
ionrepsh_imon=1.79308E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33547E1
lens5b_imon=2.18137E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.13161E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51339E0
os_ea2_imon=-8.40733E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.15281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05224E0
os_ef2alow_imon=-2.44252E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03023E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11315E1
os_restr2_imon=3.43361E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.29024E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01751E1
cs_anode2_imon=2.24194E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.10896E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68238E1
iondef4_imon=1.09442E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.20302E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81379E-1
olens1_imon=7.93417E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14462E0
cs_ionaccel_imon=-1.85173E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47456E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.69479E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-8.96035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82698E2
mask1_imon=2.39254E-4
mask2_vset=0.0E0
mask2_vmon=-1.8657E1
mask2_imon=-7.46599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.54387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.48363E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.02244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4007E0
defgridb_imon=6.16034E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33331E1
os_fil1_imon=9.41696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07387E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30791E1
cs_fil1_imon=9.96107E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63994E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67932E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29481E-2
os_fil2_imon=-2.99354E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.54712E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.56493E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.5973E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22716E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.75424E-1
res40_imon=-2.45642E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.179E3	0.0E0	1.47E2	4.1E1	-7.10051E-2	-8.80017E1	-9.53674E-5	-8.80011E1	3.57628E-4	4.22001E-3	9.52482E-2	2.73288E1	-3.26909E1	-3.26372E1	2.68369E1	1.20042E-7	2.52025E-3	2.52025E-3	6.32858E-3	2.99845E-1
2.0E0	1.11183E5	9.2E1	3.16E2	1.6E2	-7.13143E-2	-8.80018E1	-2.6226E-4	-8.80011E1	3.57628E-4	4.12464E-3	9.56535E-2	2.73183E1	-3.26452E1	-3.2626E1	2.68466E1	1.19829E-7	2.51611E-3	2.51611E-3	6.31879E-3	3.01065E-1
3.0E0	2.7E1	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80019E1	-4.05312E-4	-8.80008E1	5.96046E-4	4.31538E-3	9.54151E-2	2.73169E1	-3.2626E1	-3.26178E1	2.6813E1	1.19913E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
4.0E0	2.4316E4	1.7E1	6.55E2	3.98E2	-7.17779E-2	-8.8002E1	-4.76837E-5	-8.80008E1	5.48363E-4	4.12464E-3	9.53436E-2	2.73129E1	-3.26404E1	-3.26152E1	2.684E1	1.20004E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.08504E-2	-8.80019E1	-2.6226E-4	-8.80011E1	4.29153E-4	4.62532E-3	9.52005E-2	2.73423E1	-3.26791E1	-3.2577E1	2.6843E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.8002E1	-3.8147E-4	-8.8001E1	2.86102E-4	4.41074E-3	9.53436E-2	2.73153E1	-3.26464E1	-3.26362E1	2.684E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80019E1	-3.8147E-4	-8.80007E1	5.24521E-4	4.64916E-3	9.54866E-2	2.73213E1	-3.26657E1	-3.26242E1	2.68556E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80018E1	-2.6226E-4	-8.80013E1	7.15256E-4	4.29153E-3	9.56535E-2	2.73323E1	-3.26787E1	-3.2622E1	2.68383E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.99E-1
1.2E1	1.16E2	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.80018E1	-4.76837E-5	-8.80014E1	4.76837E-4	4.17233E-3	9.57251E-2	2.73237E1	-3.26609E1	-3.26134E1	2.682E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99175E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80013E1	-3.09944E-4	-8.80013E1	6.4373E-4	3.74317E-3	9.57966E-2	2.73299E1	-3.26703E1	-3.25989E1	2.68484E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01223E-1
1.4E1	3.646E3	6.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80016E1	-2.38419E-5	-8.80012E1	4.76837E-5	4.3869E-3	9.59396E-2	2.72931E1	-3.2626E1	-3.26633E1	2.67908E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80016E1	4.76837E-5	-8.80013E1	1.19209E-4	4.31538E-3	9.54866E-2	2.73228E1	-3.26682E1	-3.25856E1	2.68448E1	1.20017E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02133E-1
1.6E1	4.94E2	3.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80017E1	7.15256E-5	-8.80013E1	4.05312E-4	4.29153E-3	9.54628E-2	2.73257E1	-3.26797E1	-3.26514E1	2.68328E1	1.20174E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.02396E-1
1.7E1	1.107E3	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.8002E1	-2.38419E-4	-8.80013E1	4.76837E-4	4.05312E-3	9.56774E-2	2.73165E1	-3.26458E1	-3.26122E1	2.68322E1	1.19749E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99175E-1
1.8E1	4.704E3	3.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80018E1	-4.76837E-5	-8.80012E1	3.33786E-4	3.91006E-3	9.55582E-2	2.72991E1	-3.26549E1	-3.2629E1	2.68575E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01085E-1
1.9E1	2.379E3	2.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80018E1	-2.6226E-4	-8.80013E1	6.4373E-4	4.22001E-3	9.57251E-2	2.73309E1	-3.26368E1	-3.26296E1	2.68022E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
2.0E1	2.6879E4	9.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80021E1	-1.43051E-4	-8.8001E1	1.90735E-4	4.05312E-3	9.56774E-2	2.73399E1	-3.26655E1	-3.26284E1	2.68348E1	1.20069E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01871E-1
2.1E1	5.1E1	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80018E1	-1.43051E-4	-8.80008E1	6.19888E-4	4.33922E-3	9.55582E-2	2.73496E1	-3.26729E1	-3.26194E1	2.68496E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
2.2E1	2.031E3	3.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80018E1	-2.14577E-4	-8.80012E1	4.29153E-4	4.41074E-3	9.5129E-2	2.72644E1	-3.25894E1	-3.26496E1	2.68478E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.8002E1	-6.91414E-4	-8.80011E1	3.33786E-4	4.05312E-3	9.54151E-2	2.73375E1	-3.26767E1	-3.26278E1	2.68238E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
