[Scan]
initial_time=2016-01-18T18:49:46
final_time=2016-01-18T18:50:06
ip_count=19
run=1024
dataset=4
scan=272
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8235E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-8.00991E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.36442E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.4994E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.59029E-8
mult1=-1.34022E-8
mult2=-2.70464E-9
rf_tmon=-3.67427E-3
rf_agc=3.40763E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.50926E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69027E0
bslens_imon=2.36585E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=2.00123E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.83795E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04674E2
lens23_imon=1.02138E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04624E1
cs_ea1_imon=2.53469E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98532E0
lens1_imon=1.53937E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6491E1
os_ef1alow_imon=2.98669E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0377E1
cs_ea2_imon=1.51251E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.92831E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.35642E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11564E1
os_restr1_imon=4.26385E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15322E1
os_ea1_imon=2.34138E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63386E1
os_ef1bup_imon=3.06801E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27088E0
cs_ionrep_imon=1.21402E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93563E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=2.98217E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20396E0
olens4_imon=4.03971E-8
tplens_vset=1.4E-1
tplens_vmon=1.68583E0
tplens_imon=-5.26837E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26118E1
iondef3_imon=1.5272E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.56408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03006E2
lens6_imon=2.97898E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=8.92544E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28682E0
ionrepsh_imon=1.79393E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33726E1
lens5b_imon=2.17301E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52987E0
os_ea2_imon=-8.51283E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00459E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.16845E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.47032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01864E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11303E1
os_restr2_imon=3.43604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.29689E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01682E1
cs_anode2_imon=2.24021E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73125E1
iondef1_imon=1.11703E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68433E1
iondef4_imon=1.08642E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.19736E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.92989E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-1.71619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02105E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.61138E-6
window_vset=0.0E0
window_vmon=2.69815E-1
window_imon=-6.90995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82737E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-7.95253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.52966E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.43679E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5011E3
multb_neg_imon=6.94566E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2792E0
defgridb_imon=6.16699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33289E1
os_fil1_imon=9.42107E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07184E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6613E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30772E1
cs_fil1_imon=9.94242E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63698E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67564E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29568E-2
os_fil2_imon=-2.60547E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77183E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35028E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2268E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=3.00097E-1
chamber_ion_pmon=1.20243E-7
chamber_cvt_pmon=2.50867E-3
foreline_cvt_pmon=2.50867E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71573E-1
res40_imon=-2.44252E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.173E3	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80024E1	-2.86102E-4	-8.80012E1	4.29153E-4	4.12464E-3	9.54628E-2	2.73419E1	-3.26585E1	-3.26354E1	2.68319E1	1.20226E-7	2.51369E-3	2.51369E-3	6.29703E-3	3.0E-1
2.0E0	1.10822E5	1.04E2	3.16E2	1.6E2	-7.21643E-2	-8.80024E1	-4.05312E-4	-8.80008E1	5.48363E-4	4.29153E-3	9.56297E-2	2.73296E1	-3.26572E1	-3.26138E1	2.68322E1	1.20479E-7	2.51725E-3	2.51725E-3	6.33592E-3	2.9971E-1
3.0E0	2.4E1	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80028E1	-5.48363E-4	-8.80009E1	3.8147E-4	4.36306E-3	9.52005E-2	2.73331E1	-3.26719E1	-3.2635E1	2.6858E1	1.21313E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.00942E-1
4.0E0	2.4386E4	1.3E1	6.55E2	3.98E2	-7.22418E-2	-8.80023E1	-2.38419E-4	-8.80009E1	2.38419E-4	4.24385E-3	9.52244E-2	2.73488E1	-3.26467E1	-3.26242E1	2.68262E1	1.19822E-7	2.51244E-3	2.51244E-3	6.31761E-3	3.00878E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80024E1	-1.19209E-4	-8.80013E1	1.43051E-4	4.12464E-3	9.51529E-2	2.73466E1	-3.26771E1	-3.26362E1	2.68214E1	1.2186E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80023E1	7.15256E-5	-8.80011E1	2.14577E-4	4.05312E-3	9.53913E-2	2.73039E1	-3.26455E1	-3.26166E1	2.68372E1	1.21591E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80031E1	-3.33786E-4	-8.80013E1	2.86102E-4	4.33922E-3	9.53913E-2	2.73033E1	-3.26566E1	-3.26334E1	2.68706E1	1.2062E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80024E1	-5.48363E-4	-8.8001E1	5.48363E-4	4.31538E-3	9.56535E-2	2.73169E1	-3.26903E1	-3.2616E1	2.68719E1	1.20644E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
1.2E1	8.3E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80023E1	-5.72205E-4	-8.80009E1	8.58307E-4	4.1008E-3	9.5439E-2	2.73429E1	-3.26344E1	-3.26585E1	2.68088E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00824E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	-3.8147E-4	-8.80013E1	8.82149E-4	4.05312E-3	9.56297E-2	2.73375E1	-3.26482E1	-3.26146E1	2.68617E1	1.20854E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01609E-1
1.4E1	3.527E3	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80023E1	-2.14577E-4	-8.80012E1	8.34465E-4	4.12464E-3	9.51767E-2	2.73033E1	-3.26771E1	-3.26771E1	2.68046E1	1.2117E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
1.5E1	1.27E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80024E1	-4.76837E-4	-8.80012E1	6.19888E-4	4.48227E-3	9.55105E-2	2.73333E1	-3.26903E1	-3.26422E1	2.68394E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.6E1	5.05E2	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80024E1	-5.00679E-4	-8.80011E1	6.19888E-4	3.93391E-3	9.52005E-2	2.73358E1	-3.26738E1	-3.26189E1	2.68502E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
1.7E1	1.113E3	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80023E1	-3.57628E-4	-8.80012E1	3.09944E-4	4.43459E-3	9.56774E-2	2.72955E1	-3.26819E1	-3.26326E1	2.68466E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.8E1	4.659E3	5.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80023E1	-4.29153E-4	-8.80014E1	3.57628E-4	4.07696E-3	9.56059E-2	2.73075E1	-3.26729E1	-3.26236E1	2.6852E1	1.20697E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01347E-1
1.9E1	2.267E3	1.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80022E1	-4.29153E-4	-8.80011E1	5.00679E-4	4.33922E-3	9.57489E-2	2.73157E1	-3.26606E1	-3.26329E1	2.68176E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00302E-1
2.0E1	2.7173E4	1.2E1	8.08E2	5.58E2	-7.23189E-2	-8.80023E1	-7.15256E-5	-8.80013E1	6.19888E-4	4.33922E-3	9.56297E-2	2.73314E1	-3.26693E1	-3.26495E1	2.68225E1	1.20045E-7	2.51884E-3	2.51884E-3	6.31879E-3	3.00739E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80023E1	-4.05312E-4	-8.80014E1	5.72205E-4	4.12464E-3	9.56297E-2	2.7354E1	-3.26602E1	-3.2552E1	2.6863E1					
2.2E1	1.969E3	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80024E1	-1.66893E-4	-8.80014E1	4.52995E-4	4.24385E-3	9.54151E-2	2.73324E1	-3.26869E1	-3.26909E1	2.68401E1	1.19979E-7	2.51679E-3	2.51679E-3	6.3282E-3	3.01981E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80023E1	-3.33786E-4	-8.80012E1	3.33786E-4	4.36306E-3	9.53913E-2	2.73125E1	-3.2647E1	-3.26118E1	2.68433E1	1.20243E-7	2.50867E-3	2.50867E-3	6.31798E-3	3.00097E-1
