[Scan]
initial_time=2016-01-18T18:50:13
final_time=2016-01-18T18:50:34
ip_count=19
run=1024
dataset=4
scan=273
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.78225E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.52807E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.31319E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-2.56838E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.57996E-8
mult1=-2.12891E-8
mult2=-2.68735E-9
rf_tmon=-4.44815E-3
rf_agc=3.30284E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.64241E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54003E1
cs_ef1b_imon=2.84455E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04422E1
cs_ea1_imon=2.51955E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98228E0
lens1_imon=1.39295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64742E1
os_ef1alow_imon=2.98704E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.49312E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84371E1
cs_ef1a_imon=2.92587E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.36092E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.26941E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.367E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.06766E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23735E0
cs_ionrep_imon=1.1728E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91955E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20377E0
olens4_imon=4.02912E-8
tplens_vset=1.4E-1
tplens_vmon=1.68332E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26309E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26444E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03009E2
lens6_imon=2.98073E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=9.53019E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=1.80246E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.15888E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.12431E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50576E0
os_ea2_imon=-7.90865E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71599E1
cs_ef2a_imon=3.16323E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07831E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18082E-1
os_ef2bup_imon=-5.19492E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.42909E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02012E1
cs_anode2_imon=2.23673E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73149E1
iondef1_imon=1.1144E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.10137E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.1755E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=7.96528E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15273E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47383E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.80947E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-7.04896E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82699E2
mask1_imon=2.3898E-4
mask2_vset=0.0E0
mask2_vmon=-1.86269E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.28607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50092E3
multb_neg_imon=7.14449E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29039E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33318E1
os_fil1_imon=9.41343E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07358E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66328E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3077E1
cs_fil1_imon=9.94288E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62412E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67619E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.72711E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03399E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.68758E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.61126E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39686E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.20602E-1
res40_imon=-2.78657E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=487
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.172E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80022E1	-6.67572E-4	-8.80009E1	1.43051E-4	4.31538E-3	9.5582E-2	2.73005E1	-3.26637E1	-3.26474E1	2.68227E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02133E-1
2.0E0	1.11156E5	1.09E2	3.16E2	1.6E2	-7.27053E-2	-8.80021E1	-7.15256E-4	-8.80007E1	4.52995E-4	4.26769E-3	9.55582E-2	2.73481E1	-3.27181E1	-3.25905E1	2.68679E1	1.21254E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01356E-1
3.0E0	1.5E1	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.8002E1	-3.8147E-4	-8.80006E1	3.57628E-4	4.17233E-3	9.53913E-2	2.73265E1	-3.26509E1	-3.26086E1	2.68545E1	1.20633E-7	2.51364E-3	2.51364E-3	6.32087E-3	2.99366E-1
4.0E0	2.3923E4	1.8E1	6.55E2	3.98E2	-7.23964E-2	-8.80021E1	-6.19888E-4	-8.80011E1	3.57628E-4	4.36306E-3	9.56297E-2	2.73117E1	-3.26392E1	-3.26302E1	2.681E1	1.198E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99175E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-5.96046E-4	-8.80012E1	5.24521E-4	4.45843E-3	9.57727E-2	2.73189E1	-3.26723E1	-3.26206E1	2.68304E1	1.19809E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.8002E1	-2.86102E-4	-8.80011E1	5.96046E-4	4.12464E-3	9.55343E-2	2.73381E1	-3.26708E1	-3.26337E1	2.68227E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80018E1	-5.00679E-4	-8.80011E1	3.8147E-4	4.19617E-3	9.53913E-2	2.72823E1	-3.26452E1	-3.26134E1	2.68076E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.8002E1	-3.09944E-4	-8.8001E1	5.00679E-4	4.50611E-3	9.52482E-2	2.73594E1	-3.26514E1	-3.26018E1	2.68785E1	1.2033E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.97963E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.8002E1	-3.33786E-4	-8.80013E1	5.00679E-4	4.57764E-3	9.56059E-2	2.73393E1	-3.26801E1	-3.2635E1	2.684E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.3E1	1.4E1	1.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80021E1	-3.57628E-4	-8.80014E1	3.33786E-4	4.24385E-3	9.56774E-2	2.73271E1	-3.2667E1	-3.26548E1	2.68328E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.97445E-1
1.4E1	3.61E3	2.0E0	5.66E2	3.82E2	-7.201E-2	-8.80021E1	4.76837E-5	-8.80013E1	3.33786E-4	4.62532E-3	9.56297E-2	2.73659E1	-3.26655E1	-3.25576E1	2.68466E1	1.19713E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.00144E-1
1.5E1	1.03E2	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80022E1	-7.15256E-5	-8.8001E1	6.19888E-4	4.45843E-3	9.57251E-2	2.73269E1	-3.26797E1	-3.26236E1	2.6803E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0148E-1
1.6E1	5.11E2	2.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80024E1	-2.6226E-4	-8.80012E1	5.96046E-4	4.33922E-3	9.55582E-2	2.73286E1	-3.26685E1	-3.26048E1	2.68306E1	1.20055E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
1.7E1	1.128E3	1.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80024E1	-1.90735E-4	-8.80011E1	7.62939E-4	4.29153E-3	9.52482E-2	2.73158E1	-3.26831E1	-3.2605E1	2.68421E1	1.20161E-7	2.52364E-3	2.52364E-3	6.31251E-3	3.01853E-1
1.8E1	4.714E3	2.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80025E1	-1.66893E-4	-8.80011E1	6.19888E-4	4.17233E-3	9.54628E-2	2.73303E1	-3.26597E1	-3.262E1	2.68118E1	1.19752E-7	2.51903E-3	2.51903E-3	6.30415E-3	2.99981E-1
1.9E1	2.271E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80024E1	-9.53674E-5	-8.8001E1	7.62939E-4	4.52995E-3	9.52959E-2	2.73628E1	-3.26567E1	-3.26044E1	2.68322E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.00966E-1
2.0E1	2.6674E4	8.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80024E1	-1.66893E-4	-8.80013E1	5.00679E-4	4.74453E-3	9.54628E-2	2.73213E1	-3.26568E1	-3.26439E1	2.68406E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.02545E-1
2.1E1	5.7E1	1.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80023E1	-6.67572E-4	-8.80011E1	5.48363E-4	4.57764E-3	9.53436E-2	2.731E1	-3.26744E1	-3.26523E1	2.6843E1	1.19822E-7	2.51549E-3	2.51549E-3	6.31251E-3	2.99663E-1
2.2E1	1.852E3	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80019E1	-4.76837E-4	-8.80013E1	8.34465E-4	4.26769E-3	9.52482E-2	2.738E1	-3.26461E1	-3.25476E1	2.68058E1	1.20137E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.99613E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80021E1	-5.00679E-4	-8.80011E1	6.67572E-4	4.05312E-3	9.55343E-2	2.73149E1	-3.26444E1	-3.26309E1	2.68178E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99175E-1
