[Scan]
initial_time=2016-01-18T18:50:42
final_time=2016-01-18T18:51:04
ip_count=19
run=1024
dataset=4
scan=274
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.82497E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-7.60376E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.38022E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.46803E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.58398E-8
mult1=-1.56162E-8
mult2=-2.86832E-9
rf_tmon=-4.5665E-3
rf_agc=3.35379E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=5.76389E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66503E0
bslens_imon=2.34151E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19653E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05012E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53644E1
cs_ef1b_imon=2.82266E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=2.52592E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9988E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64794E1
os_ef1alow_imon=2.98043E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.48462E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84637E1
cs_ef1a_imon=2.94047E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.36089E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.25133E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14957E1
os_ea1_imon=2.36629E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21022E0
cs_ionrep_imon=1.18696E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91936E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.99573E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=4.02613E-8
tplens_vset=1.4E-1
tplens_vmon=1.68096E0
tplens_imon=-3.09505E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.55293E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98187E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.10473E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26862E0
ionrepsh_imon=1.79751E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.16702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12223E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48157E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00577E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.15663E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06614E0
os_ef2alow_imon=-2.39734E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05919E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11419E1
os_restr2_imon=3.43187E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.28866E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.25932E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.09883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.09928E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.17162E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.91104E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15968E0
cs_ionaccel_imon=-1.58414E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02123E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=2.54176E-1
window_imon=-7.29223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82726E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-9.6554E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.42056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=6.9392E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52367E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=9.43469E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66207E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30762E1
cs_fil1_imon=9.9562E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62667E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67535E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26858E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.65467E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.15369E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22583E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28132E-1
res40_imon=-2.30699E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.147E3	4.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80022E1	-2.86102E-4	-8.80008E1	5.00679E-4	4.62532E-3	9.55343E-2	2.73488E1	-3.26655E1	-3.26225E1	2.68569E1	1.19991E-7	2.51603E-3	2.51603E-3	6.32328E-3	2.99343E-1
2.0E0	1.11033E5	1.28E2	3.16E2	1.6E2	-7.23964E-2	-8.80026E1	-2.86102E-4	-8.8001E1	7.62939E-4	4.1008E-3	9.52005E-2	2.73486E1	-3.26658E1	-3.26291E1	2.68538E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80024E1	-4.76837E-4	-8.80009E1	7.39098E-4	4.76837E-3	9.54151E-2	2.7347E1	-3.26649E1	-3.26207E1	2.68283E1	1.19978E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.0041E-1
4.0E0	2.4626E4	1.4E1	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-5.00679E-4	-8.80011E1	7.62939E-4	4.55379E-3	9.5439E-2	2.73198E1	-3.26667E1	-3.25835E1	2.68642E1	1.20042E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80023E1	-4.05312E-4	-8.80011E1	4.76837E-4	4.57764E-3	9.54151E-2	2.73093E1	-3.26675E1	-3.26086E1	2.68484E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80024E1	-1.43051E-4	-8.80011E1	4.05312E-4	4.36306E-3	9.55105E-2	2.7324E1	-3.26655E1	-3.26124E1	2.68202E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80024E1	-2.6226E-4	-8.80014E1	2.6226E-4	4.3869E-3	9.54628E-2	2.73213E1	-3.26669E1	-3.25978E1	2.68484E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80024E1	-3.57628E-4	-8.80013E1	2.86102E-4	4.17233E-3	9.51052E-2	2.73069E1	-3.26434E1	-3.2614E1	2.68526E1	1.20304E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.98611E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80024E1	-6.19888E-4	-8.80013E1	5.96046E-4	4.26769E-3	9.5439E-2	2.73123E1	-3.26603E1	-3.26038E1	2.68412E1					
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80026E1	-3.09944E-4	-8.80009E1	5.72205E-4	4.31538E-3	9.53913E-2	2.73045E1	-3.26537E1	-3.26349E1	2.68395E1	1.19757E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9978E-1
1.4E1	3.474E3	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80027E1	-1.90735E-4	-8.80011E1	1.00136E-3	4.55379E-3	9.55343E-2	2.73808E1	-3.26543E1	-3.25948E1	2.68256E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.02511E-1
1.5E1	1.14E2	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80027E1	-3.8147E-4	-8.80009E1	4.29153E-4	4.02927E-3	9.52959E-2	2.73345E1	-3.26561E1	-3.26182E1	2.68466E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.6E1	4.89E2	1.0E0	6.47E2	4.41E2	-7.286E-2	-8.80024E1	-3.33786E-4	-8.8001E1	4.29153E-4	4.00543E-3	9.5439E-2	2.73118E1	-3.2664E1	-3.26027E1	2.68531E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9952E-1
1.7E1	1.12E3	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80022E1	-2.6226E-4	-8.80011E1	8.10623E-4	4.26769E-3	9.55105E-2	2.73175E1	-3.2688E1	-3.26307E1	2.68453E1	1.19713E-7	2.5225E-3	2.5225E-3	6.32978E-3	2.98819E-1
1.8E1	4.708E3	2.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80021E1	-5.96046E-4	-8.80008E1	4.05312E-4	3.98159E-3	9.53913E-2	2.73237E1	-3.26434E1	-3.26194E1	2.68304E1	1.20192E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99343E-1
1.9E1	2.407E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80021E1	-5.00679E-4	-8.80012E1	5.00679E-4	4.02927E-3	9.55582E-2	2.73315E1	-3.26723E1	-3.26092E1	2.68214E1	1.20137E-7	2.52139E-3	2.52139E-3	6.29067E-3	2.99348E-1
2.0E1	2.6844E4	1.7E1	8.08E2	5.58E2	-7.3401E-2	-8.80021E1	-4.05312E-4	-8.80009E1	7.15256E-4	4.1008E-3	9.5439E-2	2.73437E1	-3.26419E1	-3.26162E1	2.68132E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9952E-1
2.1E1	6.3E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80019E1	-4.05312E-4	-8.80009E1	2.6226E-4	3.91006E-3	9.52482E-2	2.73311E1	-3.26679E1	-3.2629E1	2.68505E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
2.2E1	1.884E3	3.0E0	8.89E2	6.17E2	-7.19325E-2	-8.8002E1	-2.14577E-4	-8.80011E1	6.19888E-4	4.14848E-3	9.56774E-2	2.73558E1	-3.26885E1	-3.2626E1	2.68388E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80021E1	-3.09944E-4	-8.80012E1	2.6226E-4	4.3869E-3	9.54628E-2	2.73183E1	-3.26681E1	-3.2623E1	2.68334E1	1.198E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
