[Scan]
initial_time=2016-01-18T18:51:13
final_time=2016-01-18T18:51:35
ip_count=19
run=1024
dataset=4
scan=275
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.85613E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.63619E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.38499E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-2.47173E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.58944E-8
mult1=-2.3804E-8
mult2=-2.6243E-9
rf_tmon=-5.1705E-3
rf_agc=3.1902E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.46658E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66385E0
bslens_imon=2.60697E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=2.00386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53957E1
cs_ef1b_imon=2.83656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02093E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04699E1
cs_ea1_imon=2.53654E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01944E0
lens1_imon=1.41065E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65332E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.49984E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=2.93699E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.35633E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11297E1
os_restr1_imon=4.24195E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15046E1
os_ea1_imon=2.35567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21729E0
cs_ionrep_imon=1.20855E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91953E2
cs_nozzle_imon=1.93593E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.99607E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=4.02172E-8
tplens_vset=1.4E-1
tplens_vmon=1.66975E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26217E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26468E1
iondef2_imon=1.55789E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03017E2
lens6_imon=2.98006E-4
ql6_vset=1.0E-1
ql6_vmon=9.54628E-2
ql6_imon=9.45103E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27864E0
ionrepsh_imon=1.77415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12779E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52286E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71536E1
cs_ef2a_imon=3.15246E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03139E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1128E1
os_restr2_imon=3.42805E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28371E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01786E1
cs_anode2_imon=2.24542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73088E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68334E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.19901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81474E-1
olens1_imon=7.8977E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12898E0
cs_ionaccel_imon=-1.73705E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.57651E-1
window_imon=-7.39649E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82703E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-7.81352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.60107E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.53925E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.97814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32583E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33301E1
os_fil1_imon=9.41957E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66306E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30731E1
cs_fil1_imon=9.96252E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63455E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67357E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.0031E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.29581E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33919E-3
inlet_lpb_pmon=3.01356E-1
chamber_ion_pmon=1.20394E-7
chamber_cvt_pmon=2.51709E-3
foreline_cvt_pmon=2.51709E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.1229E-1
res40_imon=-2.63019E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.22E3	2.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80021E1	-2.14577E-4	-8.80014E1	2.14577E-4	4.14848E-3	9.57012E-2	2.73375E1	-3.26512E1	-3.26278E1	2.68382E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9952E-1
2.0E0	1.11577E5	1.01E2	3.16E2	1.6E2	-7.20871E-2	-8.80025E1	-9.53674E-5	-8.80011E1	6.4373E-4	4.24385E-3	9.56535E-2	2.73112E1	-3.26591E1	-3.26223E1	2.68444E1	1.19809E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
3.0E0	2.8E1	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80026E1	-2.38419E-5	-8.80013E1	7.15256E-5	4.64916E-3	9.57489E-2	2.73381E1	-3.26795E1	-3.26194E1	2.68268E1	1.19872E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01475E-1
4.0E0	2.3998E4	7.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80023E1	-2.38419E-4	-8.80013E1	3.8147E-4	4.3869E-3	9.56774E-2	2.72973E1	-3.26753E1	-3.25882E1	2.68184E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80023E1	1.19209E-4	-8.80015E1	2.86102E-4	4.26769E-3	9.56059E-2	2.73225E1	-3.26224E1	-3.26164E1	2.68208E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00144E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.03869E-2	-8.80023E1	-7.15256E-5	-8.80009E1	5.24521E-4	4.673E-3	9.54151E-2	2.73321E1	-3.26729E1	-3.26567E1	2.68226E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80024E1	-4.76837E-5	-8.8001E1	3.8147E-4	4.14848E-3	9.54628E-2	2.73411E1	-3.26797E1	-3.26036E1	2.68238E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.11597E-2	-8.80025E1	-9.53674E-5	-8.80011E1	6.67572E-4	4.33922E-3	9.56059E-2	2.73135E1	-3.26567E1	-3.26524E1	2.68587E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
1.2E1	9.4E1	0.0E0	4.85E2	3.23E2	-7.15461E-2	-8.80025E1	-1.19209E-4	-8.8001E1	3.8147E-4	4.43459E-3	9.54628E-2	2.73239E1	-3.26789E1	-3.26374E1	2.68169E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98481E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.10825E-2	-8.80026E1	-2.14577E-4	-8.80009E1	3.09944E-4	4.36306E-3	9.56535E-2	2.73146E1	-3.26476E1	-3.26165E1	2.683E1	1.1974E-7	2.51287E-3	2.51287E-3	6.30212E-3	3.02368E-1
1.4E1	3.532E3	2.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80026E1	1.90735E-4	-8.80013E1	5.48363E-4	4.64916E-3	9.55582E-2	2.73442E1	-3.26789E1	-3.26344E1	2.68424E1	1.20045E-7	2.51158E-3	2.51158E-3	6.30171E-3	3.00794E-1
1.5E1	1.17E2	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80025E1	2.38419E-4	-8.8001E1	5.48363E-4	4.43459E-3	9.54866E-2	2.73201E1	-3.2635E1	-3.26122E1	2.68082E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99613E-1
1.6E1	4.72E2	0.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80024E1	-7.15256E-5	-8.80011E1	5.96046E-4	4.3869E-3	9.55343E-2	2.73476E1	-3.2672E1	-3.26225E1	2.68262E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1
1.7E1	1.048E3	1.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80019E1	-9.53674E-5	-8.80013E1	7.15256E-4	4.33922E-3	9.53197E-2	2.73123E1	-3.26446E1	-3.26236E1	2.68381E1	1.20106E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00197E-1
1.8E1	4.777E3	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80022E1	-4.76837E-5	-8.8001E1	1.12057E-3	4.24385E-3	9.51052E-2	2.73381E1	-3.26831E1	-3.26458E1	2.68587E1	1.19766E-7	2.51359E-3	2.51359E-3	6.29624E-3	2.98026E-1
1.9E1	2.233E3	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80022E1	-3.33786E-4	-8.80009E1	9.53674E-4	4.31538E-3	9.54151E-2	2.73051E1	-3.26615E1	-3.26152E1	2.68538E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
2.0E1	2.6595E4	8.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80024E1	-2.14577E-4	-8.80011E1	7.15256E-4	4.36306E-3	9.55105E-2	2.73273E1	-3.26777E1	-3.2632E1	2.68617E1	1.20563E-7	2.52139E-3	2.52139E-3	6.31299E-3	2.99879E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80021E1	-2.14577E-4	-8.80012E1	9.53674E-4	4.29153E-3	9.55105E-2	2.73466E1	-3.26657E1	-3.26188E1	2.68208E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
2.2E1	1.898E3	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80023E1	4.76837E-5	-8.80013E1	3.09944E-4	4.45843E-3	9.53436E-2	2.73178E1	-3.26254E1	-3.26654E1	2.6843E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00824E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80025E1	-3.09944E-4	-8.80014E1	2.86102E-4	4.36306E-3	9.54628E-2	2.73088E1	-3.26468E1	-3.26217E1	2.68334E1	1.20394E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.01356E-1
