[Scan]
initial_time=2016-01-18T18:51:43
final_time=2016-01-18T18:52:05
ip_count=19
run=1024
dataset=4
scan=276
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79262E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.91395E-10
ql2_vset=
ql2_vmon=-2.38419E-5
ql2_imon=1.38496E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.53469E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.5885E-8
mult1=-1.68761E-8
mult2=-2.76245E-9
rf_tmon=-5.00499E-3
rf_agc=3.34153E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.66709E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.38995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19424E1
lens5a_imon=2.00001E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53986E1
cs_ef1b_imon=2.83274E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02016E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.51733E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00711E0
lens1_imon=1.42743E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64788E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.93352E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.36001E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.2569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.35222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0156E1
cs_anode1_imon=2.986E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20425E0
olens4_imon=4.01889E-8
tplens_vset=1.4E-1
tplens_vmon=1.70692E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26809E1
iondef2_imon=1.55949E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03003E2
lens6_imon=2.98184E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=9.14574E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=1.78444E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33375E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52607E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00792E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71374E1
cs_ef2a_imon=3.15142E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03487E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25612E-1
os_ef2bup_imon=-5.17407E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11367E1
os_restr2_imon=3.43465E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.23743E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73305E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.10067E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.13734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81307E-1
olens1_imon=7.89852E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14404E0
cs_ionaccel_imon=-1.75095E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56469E1
einzel_imon=7.77472E-6
window_vset=0.0E0
window_vmon=2.26374E-1
window_imon=-8.9951E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8268E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.13767E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.067E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5016E3
multb_neg_imon=7.27827E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33296E1
os_fil1_imon=9.41795E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08128E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66459E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30755E1
cs_fil1_imon=9.94097E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6327E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67363E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.26717E-2
os_fil2_imon=-2.66919E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81968E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75589E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.61706E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.5973E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22503E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53993E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.178E3	2.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80025E1	-5.48363E-4	-8.80009E1	3.57628E-4	4.60148E-3	9.55105E-2	2.73297E1	-3.26735E1	-3.2626E1	2.68487E1	1.19851E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.00966E-1
2.0E0	1.11074E5	1.08E2	3.16E2	1.6E2	-7.32464E-2	-8.80024E1	-2.86102E-4	-8.80007E1	7.86781E-4	4.673E-3	9.55582E-2	2.73322E1	-3.26661E1	-3.26077E1	2.68204E1	1.20297E-7	2.51804E-3	2.51804E-3	6.34661E-3	3.00942E-1
3.0E0	2.0E1	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80024E1	-2.86102E-4	-8.80008E1	5.72205E-4	4.33922E-3	9.5439E-2	2.73429E1	-3.26969E1	-3.26314E1	2.68226E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
4.0E0	2.4123E4	6.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80022E1	-2.14577E-4	-8.80008E1	4.76837E-4	4.12464E-3	9.55343E-2	2.73161E1	-3.2644E1	-3.26637E1	2.68151E1	1.19749E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00966E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80024E1	-2.14577E-4	-8.80007E1	4.29153E-4	4.02927E-3	9.53913E-2	2.72933E1	-3.26472E1	-3.26673E1	2.6855E1	1.198E-7	2.52492E-3	2.52492E-3	6.33436E-3	2.99686E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80023E1	-1.19209E-4	-8.80008E1	5.48363E-4	4.17233E-3	9.53197E-2	2.72985E1	-3.2653E1	-3.26278E1	2.68274E1	1.19953E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.97647E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80026E1	-3.57628E-4	-8.80009E1	8.82149E-4	4.05312E-3	9.52721E-2	2.73435E1	-3.26302E1	-3.26308E1	2.6846E1	1.20017E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80026E1	-4.76837E-4	-8.80009E1	4.52995E-4	4.12464E-3	9.52959E-2	2.73027E1	-3.26738E1	-3.26443E1	2.68574E1	1.20106E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
1.2E1	9.2E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80026E1	-2.38419E-4	-8.80004E1	5.96046E-4	4.3869E-3	9.5129E-2	2.73087E1	-3.26585E1	-3.2602E1	2.68695E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01609E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80026E1	-2.14577E-4	-8.80005E1	7.15256E-5	4.12464E-3	9.53197E-2	2.73135E1	-3.26681E1	-3.26452E1	2.68016E1	1.19861E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.00824E-1
1.4E1	3.564E3	1.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80022E1	-4.76837E-5	-8.80007E1	9.05991E-4	4.50611E-3	9.54151E-2	2.73399E1	-3.26741E1	-3.2614E1	2.6813E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.98665E-1
1.5E1	1.0E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80022E1	0.0E0	-8.80006E1	6.19888E-4	4.1008E-3	9.52959E-2	2.73111E1	-3.26482E1	-3.25882E1	2.68142E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99879E-1
1.6E1	5.22E2	2.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80023E1	-7.15256E-5	-8.80008E1	1.00136E-3	4.07696E-3	9.53436E-2	2.7301E1	-3.26773E1	-3.26343E1	2.68406E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	2.98665E-1
1.7E1	1.183E3	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80023E1	-1.43051E-4	-8.80008E1	9.05991E-4	4.19617E-3	9.55105E-2	2.73496E1	-3.26633E1	-3.26711E1	2.68208E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.8E1	4.759E3	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80024E1	-3.33786E-4	-8.80009E1	4.76837E-4	4.31538E-3	9.54628E-2	2.73594E1	-3.26815E1	-3.26189E1	2.68227E1	1.19697E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.00966E-1
1.9E1	2.308E3	1.0E0	7.68E2	5.29E2	-7.10051E-2	-8.80024E1	4.76837E-5	-8.8001E1	2.86102E-4	4.48227E-3	9.52959E-2	2.73642E1	-3.26782E1	-3.26231E1	2.68366E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02133E-1
2.0E1	2.7107E4	2.0E1	8.08E2	5.58E2	-7.23189E-2	-8.80022E1	-3.33786E-4	-8.80009E1	5.48363E-4	4.19617E-3	9.5439E-2	2.73455E1	-3.26695E1	-3.26272E1	2.68394E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.006E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80022E1	-1.43051E-4	-8.80008E1	2.86102E-4	4.3869E-3	9.54628E-2	2.73092E1	-3.26626E1	-3.26154E1	2.68314E1	1.19925E-7	2.52921E-3	2.52921E-3	6.30182E-3	3.01742E-1
2.2E1	1.923E3	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80023E1	-7.15256E-5	-8.80009E1	1.66893E-4	4.19617E-3	9.49621E-2	2.73183E1	-3.26759E1	-3.26308E1	2.68214E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.0071E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80026E1	-2.38419E-5	-8.80013E1	4.05312E-4	4.33922E-3	9.53913E-2	2.73305E1	-3.26809E1	-3.26396E1	2.68154E1	1.20069E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9952E-1
