[Scan]
initial_time=2016-01-18T18:54:14
final_time=2016-01-18T18:54:36
ip_count=19
run=1024
dataset=4
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.76895E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-7.38752E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.36999E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-2.38119E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.58708E-8
mult1=-2.15811E-8
mult2=-2.65074E-9
rf_tmon=-5.78956E-3
rf_agc=3.28667E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.05312E-3
ql5_imon=5.36299E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67585E0
bslens_imon=2.36676E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19652E1
lens5a_imon=2.01182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53875E1
cs_ef1b_imon=2.82304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02466E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=2.52751E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99676E0
lens1_imon=1.44851E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65551E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03727E1
cs_ea2_imon=1.47667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.95026E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.35112E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.24769E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14981E1
os_ea1_imon=2.36884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24047E0
cs_ionrep_imon=1.1832E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9194E2
cs_nozzle_imon=1.93365E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.97045E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=4.00945E-8
tplens_vset=1.4E-1
tplens_vmon=1.69714E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.51928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26974E1
iondef2_imon=1.56115E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03019E2
lens6_imon=2.98221E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=9.21333E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24414E0
ionrepsh_imon=1.78887E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.17086E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48288E0
os_ea2_imon=-7.11195E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00777E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.15605E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1134E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.28275E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.24929E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.11268E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68226E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.12187E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81688E-1
olens1_imon=7.87285E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15477E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56357E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.40768E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.60809E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.80003E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.10122E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3821E0
defgridb_imon=6.09115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=9.44498E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06861E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65976E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30742E1
cs_fil1_imon=9.9657E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6272E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67392E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43654E-2
os_fil2_imon=-2.71402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.9371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.57587E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22358E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00137E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.213E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80022E1	-5.48363E-4	-8.80013E1	4.76837E-4	4.43459E-3	9.56297E-2	2.73499E1	-3.26938E1	-3.26325E1	2.68605E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
2.0E0	1.10327E5	9.9E1	3.16E2	1.6E2	-7.18554E-2	-8.80024E1	-2.6226E-4	-8.80009E1	2.6226E-4	4.17233E-3	9.55582E-2	2.73357E1	-3.26756E1	-3.26242E1	2.68358E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.01223E-1
3.0E0	3.1E1	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80025E1	-3.09944E-4	-8.80013E1	2.14577E-4	4.19617E-3	9.56535E-2	2.7321E1	-3.26744E1	-3.26101E1	2.68377E1	1.20208E-7	2.51384E-3	2.51384E-3	6.31879E-3	2.9944E-1
4.0E0	2.3789E4	1.4E1	6.55E2	3.98E2	-7.15461E-2	-8.80025E1	-6.67572E-4	-8.80014E1	5.00679E-4	4.41074E-3	9.54866E-2	2.73101E1	-3.26616E1	-3.26372E1	2.68026E1	1.20016E-7	2.51447E-3	2.51447E-3	6.33297E-3	3.01853E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80023E1	-2.6226E-4	-8.80014E1	4.76837E-4	4.17233E-3	9.55343E-2	2.73279E1	-3.26609E1	-3.2623E1	2.68784E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.03139E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80022E1	-1.90735E-4	-8.80013E1	1.90735E-4	4.07696E-3	9.56059E-2	2.73393E1	-3.26437E1	-3.25912E1	2.67769E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.80024E1	-3.8147E-4	-8.80015E1	2.14577E-4	4.14848E-3	9.54866E-2	2.73102E1	-3.26545E1	-3.26215E1	2.68679E1	1.20174E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8002E1	-4.76837E-5	-8.8001E1	0.0E0	4.26769E-3	9.5439E-2	2.73406E1	-3.26462E1	-3.2637E1	2.68112E1	1.20453E-7	2.52058E-3	2.52058E-3	6.32273E-3	3.00635E-1
1.2E1	9.3E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80023E1	-5.72205E-4	-8.80011E1	6.19888E-4	4.41074E-3	9.57966E-2	2.72962E1	-3.26567E1	-3.26036E1	2.68358E1	1.20191E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00942E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80024E1	-6.67572E-4	-8.8001E1	5.96046E-4	4.24385E-3	9.56297E-2	2.73045E1	-3.26735E1	-3.26134E1	2.68304E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.99941E-1
1.4E1	3.584E3	7.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80025E1	-3.8147E-4	-8.8001E1	6.19888E-4	4.05312E-3	9.52959E-2	2.73339E1	-3.26939E1	-3.26086E1	2.68262E1	1.19861E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.02396E-1
1.5E1	9.8E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80022E1	-3.8147E-4	-8.8001E1	5.00679E-4	4.19617E-3	9.53913E-2	2.73204E1	-3.26461E1	-3.25983E1	2.68328E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02133E-1
1.6E1	4.9E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80021E1	-5.24521E-4	-8.80011E1	5.96046E-4	4.57764E-3	9.52721E-2	2.73237E1	-3.26458E1	-3.26434E1	2.6819E1	1.2212E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00966E-1
1.7E1	1.129E3	3.0E0	6.87E2	4.7E2	-7.10051E-2	-8.80022E1	-7.15256E-4	-8.80011E1	3.57628E-4	4.31538E-3	9.53197E-2	2.73502E1	-3.26579E1	-3.2644E1	2.68466E1	1.2212E-7	2.51804E-3	2.51804E-3	6.29067E-3	3.00676E-1
1.8E1	4.659E3	3.0E0	7.27E2	5.0E2	-7.10825E-2	-8.80022E1	-6.91414E-4	-8.80011E1	4.76837E-4	4.02927E-3	9.52005E-2	2.73033E1	-3.26517E1	-3.26211E1	2.68937E1	1.20802E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.98222E-1
1.9E1	2.333E3	0.0E0	7.68E2	5.29E2	-7.10051E-2	-8.80022E1	-5.96046E-4	-8.80012E1	4.52995E-4	4.22001E-3	9.52005E-2	2.73311E1	-3.26602E1	-3.26384E1	2.68146E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.97445E-1
2.0E1	2.6266E4	1.4E1	8.08E2	5.58E2	-7.14689E-2	-8.80023E1	-3.8147E-4	-8.8001E1	3.33786E-4	4.52995E-3	9.52482E-2	2.73171E1	-3.26813E1	-3.26068E1	2.68514E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
2.1E1	5.2E1	1.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-4.76837E-4	-8.80008E1	3.57628E-4	3.95775E-3	9.56059E-2	2.73289E1	-3.26822E1	-3.26347E1	2.68001E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
2.2E1	1.852E3	1.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80024E1	-5.96046E-4	-8.80013E1	4.76837E-4	4.24385E-3	9.58443E-2	2.73129E1	-3.26482E1	-3.2611E1	2.68665E1	1.19891E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.02621E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.80024E1	-4.29153E-4	-8.80013E1	5.48363E-4	4.05312E-3	9.57966E-2	2.73051E1	-3.26974E1	-3.26296E1	2.68226E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
