[Scan]
initial_time=2016-01-18T18:55:45
final_time=2016-01-18T18:56:07
ip_count=19
run=1024
dataset=4
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.81502E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.48873E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.41103E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.37548E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.58315E-8
mult1=-1.61431E-8
mult2=-2.7017E-9
rf_tmon=-4.92831E-3
rf_agc=3.17459E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=6.09303E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.97118E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04963E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54109E1
cs_ef1b_imon=2.83926E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=2.55157E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96625E0
lens1_imon=1.66535E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65347E1
os_ef1alow_imon=2.98666E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.5065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.94306E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.3547E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.25778E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.35366E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.06163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.19431E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91974E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.98126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20403E0
olens4_imon=4.01036E-8
tplens_vset=1.4E-1
tplens_vmon=1.69851E0
tplens_imon=-3.31791E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26136E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.56742E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03026E2
lens6_imon=2.98047E-4
ql6_vset=1.0E-1
ql6_vmon=9.55343E-2
ql6_imon=9.08744E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31278E0
ionrepsh_imon=1.78083E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.16909E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50264E0
os_ea2_imon=-8.50904E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.0072E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.16146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.42699E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11171E1
os_restr2_imon=3.41662E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.24353E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73517E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.19387E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81402E-1
olens1_imon=7.84705E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15837E0
cs_ionaccel_imon=-1.74374E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47442E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56681E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.37765E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-8.7158E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.11244E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37149E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33347E1
os_fil1_imon=9.42588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07726E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30697E1
cs_fil1_imon=9.95224E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62336E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67165E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96213E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.6059E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.81826E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22559E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00738E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.214E3	2.0E0	1.47E2	4.1E1	-7.17007E-2	-8.8003E1	-5.96046E-4	-8.80008E1	3.57628E-4	4.24385E-3	9.5439E-2	2.73263E1	-3.26756E1	-3.26195E1	2.68394E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
2.0E0	1.11023E5	9.0E1	3.16E2	1.6E2	-7.17007E-2	-8.80028E1	-3.33786E-4	-8.8001E1	5.96046E-4	4.22001E-3	9.53674E-2	2.73406E1	-3.26621E1	-3.26327E1	2.68376E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.9943E-1
3.0E0	2.2E1	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80025E1	-3.8147E-4	-8.80011E1	3.09944E-4	4.41074E-3	9.52244E-2	2.73352E1	-3.26655E1	-3.26325E1	2.6825E1	1.20084E-7	2.52697E-3	2.52697E-3	6.32978E-3	3.00676E-1
4.0E0	2.4097E4	1.5E1	6.55E2	3.98E2	-7.26282E-2	-8.80024E1	-5.24521E-4	-8.80008E1	-2.38419E-5	4.74453E-3	9.52482E-2	2.73069E1	-3.26909E1	-3.26308E1	2.68659E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80025E1	-5.00679E-4	-8.80009E1	7.15256E-5	4.673E-3	9.52244E-2	2.73081E1	-3.26945E1	-3.26212E1	2.6814E1	1.19757E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80022E1	-3.8147E-4	-8.80009E1	1.19209E-4	4.52995E-3	9.56297E-2	2.73039E1	-3.2685E1	-3.26413E1	2.69091E1	1.20017E-7	2.52867E-3	2.52867E-3	6.31288E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80025E1	-4.29153E-4	-8.8001E1	1.66893E-4	4.19617E-3	9.5582E-2	2.73369E1	-3.26627E1	-3.26164E1	2.68827E1	1.20004E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80024E1	-7.39098E-4	-8.80009E1	5.24521E-4	4.62532E-3	9.56774E-2	2.73375E1	-3.26484E1	-3.26242E1	2.68124E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80027E1	-4.52995E-4	-8.80007E1	4.05312E-4	4.41074E-3	9.56059E-2	2.72883E1	-3.26819E1	-3.26182E1	2.68256E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.3E1	1.2E1	1.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80026E1	-2.6226E-4	-8.80009E1	7.15256E-4	4.14848E-3	9.5582E-2	2.73189E1	-3.26344E1	-3.26284E1	2.6828E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.4E1	3.44E3	2.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80026E1	-3.57628E-4	-8.80011E1	5.72205E-4	4.14848E-3	9.54151E-2	2.73252E1	-3.26349E1	-3.26195E1	2.6854E1	1.20226E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.02659E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80027E1	-2.6226E-4	-8.80012E1	5.00679E-4	4.29153E-3	9.52005E-2	2.73446E1	-3.26673E1	-3.25971E1	2.68334E1	1.19749E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.02769E-1
1.6E1	4.87E2	1.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80026E1	-3.57628E-4	-8.8001E1	3.8147E-4	4.69685E-3	9.54628E-2	2.72727E1	-3.26518E1	-3.26158E1	2.6834E1	1.20466E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
1.7E1	1.108E3	0.0E0	6.87E2	4.7E2	-7.17007E-2	-8.80023E1	-6.67572E-4	-8.80007E1	5.72205E-4	4.673E-3	9.56535E-2	2.73098E1	-3.26461E1	-3.26119E1	2.68441E1	1.20226E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.9978E-1
1.8E1	4.718E3	7.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80024E1	-2.86102E-4	-8.80008E1	7.39098E-4	4.64916E-3	9.53674E-2	2.73195E1	-3.26909E1	-3.25996E1	2.68388E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98665E-1
1.9E1	2.289E3	4.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80023E1	-3.09944E-4	-8.80007E1	4.52995E-4	4.07696E-3	9.55582E-2	2.73586E1	-3.26879E1	-3.26122E1	2.68737E1	1.20278E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
2.0E1	2.6821E4	1.4E1	8.08E2	5.58E2	-7.29374E-2	-8.80027E1	-5.72205E-4	-8.80007E1	8.34465E-4	3.71933E-3	9.53674E-2	2.7346E1	-3.26699E1	-3.26416E1	2.68545E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
2.1E1	5.8E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80025E1	-4.76837E-4	-8.80006E1	4.29153E-4	4.26769E-3	9.50813E-2	2.73231E1	-3.26543E1	-3.26266E1	2.68028E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02659E-1
2.2E1	1.809E3	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80027E1	-5.00679E-4	-8.80007E1	7.39098E-4	4.76837E-3	9.51767E-2	2.73175E1	-3.26537E1	-3.26307E1	2.6803E1	1.20487E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80026E1	-2.38419E-4	-8.80007E1	5.24521E-4	4.31538E-3	9.55343E-2	2.73517E1	-3.26767E1	-3.26136E1	2.68466E1	1.19953E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.0148E-1
