[Scan]
initial_time=2016-01-18T18:56:14
final_time=2016-01-18T18:56:35
ip_count=19
run=1024
dataset=4
scan=285
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.85877E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.00021E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.38559E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.44958E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.58927E-8
mult1=-1.91802E-8
mult2=-2.79846E-9
rf_tmon=-4.09786E-3
rf_agc=3.38503E-2
counter1=1
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.70655E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6666E0
bslens_imon=2.43252E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19844E1
lens5a_imon=1.98665E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5368E1
cs_ef1b_imon=2.83132E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04671E2
lens23_imon=1.02398E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0457E1
cs_ea1_imon=2.51075E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96417E0
lens1_imon=1.42174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64696E1
os_ef1alow_imon=2.97915E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.50934E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84531E1
cs_ef1a_imon=2.95183E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.3378E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11211E1
os_restr1_imon=4.26548E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15212E1
os_ea1_imon=2.34903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63841E1
os_ef1bup_imon=3.08095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22215E0
cs_ionrep_imon=1.1975E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91954E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02021E1
cs_anode1_imon=2.97167E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20389E0
olens4_imon=4.0307E-8
tplens_vset=1.4E-1
tplens_vmon=1.66701E0
tplens_imon=-1.46829E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26434E1
iondef3_imon=1.51308E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.56961E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03012E2
lens6_imon=2.98237E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=9.07731E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2939E0
ionrepsh_imon=1.79535E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33708E1
lens5b_imon=2.18132E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74713E1
cs_ef2b_imon=3.13185E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4867E0
os_ea2_imon=-8.31908E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06133E2
lens4b_imon=2.00656E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71189E1
cs_ef2a_imon=3.14794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07452E0
os_ef2alow_imon=-2.56683E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18216E-1
os_ef2bup_imon=-5.44487E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11548E1
os_restr2_imon=3.43275E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.2903E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0189E1
cs_anode2_imon=2.25459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.11776E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.09364E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.19878E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.88996E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15946E0
cs_ionaccel_imon=-1.81831E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02107E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56524E1
einzel_imon=7.78889E-6
window_vset=0.0E0
window_vmon=2.35686E-1
window_imon=-1.17085E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8271E2
mask1_imon=2.3923E-4
mask2_vset=0.0E0
mask2_vmon=-1.85951E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.69977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.08582E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42435E0
defgridb_imon=6.07504E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=9.42682E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07629E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65965E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=9.96544E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62858E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67436E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38474E-2
os_fil2_imon=-2.76854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98453E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75183E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36106E-1
cs_fil2_imon=-2.28824E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.93542E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22547E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32418E-3
inlet_lpb_pmon=2.99083E-1
chamber_ion_pmon=1.19766E-7
chamber_cvt_pmon=2.51248E-3
foreline_cvt_pmon=2.51248E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.648E-1
res40_imon=-2.41713E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.146E3	2.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80024E1	-4.52995E-4	-8.80009E1	4.76837E-4	4.12464E-3	9.53913E-2	2.73405E1	-3.26703E1	-3.26378E1	2.68458E1	1.20191E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99879E-1
2.0E0	1.10725E5	9.8E1	3.16E2	1.6E2	-7.22418E-2	-8.80023E1	-4.76837E-4	-8.80012E1	6.4373E-4	4.29153E-3	9.54866E-2	2.73387E1	-3.26801E1	-3.25761E1	2.68124E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80025E1	-3.33786E-4	-8.80009E1	3.09944E-4	4.22001E-3	9.55343E-2	2.73004E1	-3.26537E1	-3.26189E1	2.68244E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
4.0E0	2.3729E4	1.1E1	6.55E2	3.98E2	-7.23964E-2	-8.80023E1	-7.15256E-4	-8.8001E1	5.24521E-4	4.14848E-3	9.52244E-2	2.73352E1	-3.26567E1	-3.26101E1	2.68424E1	1.20158E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80025E1	-7.15256E-4	-8.80006E1	5.24521E-4	4.24385E-3	9.57489E-2	2.73216E1	-3.26874E1	-3.26195E1	2.68358E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80026E1	-3.09944E-4	-8.80009E1	2.38419E-4	3.76701E-3	9.56774E-2	2.73129E1	-3.26567E1	-3.26386E1	2.68725E1	1.20414E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80024E1	-9.53674E-5	-8.80011E1	5.24521E-4	3.98159E-3	9.55343E-2	2.73039E1	-3.26717E1	-3.26224E1	2.68208E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80028E1	-2.6226E-4	-8.8001E1	5.48363E-4	3.86238E-3	9.56059E-2	2.73448E1	-3.26416E1	-3.26272E1	2.68348E1	1.19809E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.2E1	1.17E2	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80028E1	-3.33786E-4	-8.80012E1	8.10623E-4	4.22001E-3	9.51529E-2	2.73291E1	-3.26579E1	-3.259E1	2.68456E1	1.19902E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00966E-1
1.3E1	1.1E1	0.0E0	5.25E2	3.53E2	-7.13143E-2	-8.80031E1	-3.33786E-4	-8.80007E1	4.52995E-4	4.00543E-3	9.56297E-2	2.73315E1	-3.26747E1	-3.2626E1	2.6814E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.02545E-1
1.4E1	3.509E3	1.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80029E1	-3.09944E-4	-8.80006E1	6.67572E-4	4.24385E-3	9.55582E-2	2.73189E1	-3.26759E1	-3.26194E1	2.68469E1	1.2026E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.00966E-1
1.5E1	9.5E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80029E1	-4.29153E-4	-8.80005E1	3.09944E-4	4.33922E-3	9.53674E-2	2.73564E1	-3.26655E1	-3.26343E1	2.68354E1	1.19978E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.0041E-1
1.6E1	5.09E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80027E1	-4.52995E-4	-8.80007E1	5.24521E-4	4.52995E-3	9.55343E-2	2.73942E1	-3.27163E1	-3.26142E1	2.68298E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99686E-1
1.7E1	1.159E3	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80029E1	-3.57628E-4	-8.80005E1	6.4373E-4	4.24385E-3	9.56059E-2	2.73508E1	-3.27029E1	-3.26518E1	2.68412E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
1.8E1	4.624E3	8.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80027E1	-4.05312E-4	-8.80005E1	7.86781E-4	4.31538E-3	9.57012E-2	2.73399E1	-3.26711E1	-3.26344E1	2.68605E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.9E1	2.293E3	1.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80028E1	-7.62939E-4	-8.80006E1	4.05312E-4	4.41074E-3	9.5582E-2	2.72965E1	-3.26713E1	-3.26462E1	2.67764E1	1.19497E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
2.0E1	2.6556E4	9.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80027E1	-5.72205E-4	-8.80007E1	6.4373E-4	4.50611E-3	9.54866E-2	2.73375E1	-3.26537E1	-3.26307E1	2.68376E1	1.19925E-7	2.50803E-3	2.50803E-3	6.32978E-3	3.02545E-1
2.1E1	4.2E1	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80028E1	-9.53674E-4	-8.8001E1	5.96046E-4	4.22001E-3	9.53197E-2	2.7337E1	-3.26503E1	-3.26104E1	2.68731E1	1.20004E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.0148E-1
2.2E1	1.966E3	1.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80029E1	-4.29153E-4	-8.80008E1	4.05312E-4	4.22001E-3	9.54151E-2	2.73755E1	-3.26554E1	-3.26327E1	2.6807E1	1.20142E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.006E-1
2.3E1	1.0E0	1.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80027E1	-3.57628E-4	-8.80007E1	4.52995E-4	4.36306E-3	9.55105E-2	2.73225E1	-3.26416E1	-3.26434E1	2.68214E1	1.19766E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.99083E-1
