[Scan]
initial_time=2016-01-18T18:57:38
final_time=2016-01-18T18:57:59
ip_count=19
run=1024
dataset=4
scan=288
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.76646E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.4563E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.35645E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.40347E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=1.58717E-8
mult1=-1.6447E-8
mult2=-2.70065E-9
rf_tmon=-4.81284E-3
rf_agc=3.21379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=5.59545E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63977E0
bslens_imon=2.19292E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.99226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04868E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53973E1
cs_ef1b_imon=2.82496E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04651E1
cs_ea1_imon=2.54183E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98414E0
lens1_imon=1.32066E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64577E1
os_ef1alow_imon=2.98027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03746E1
cs_ea2_imon=1.50597E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84575E1
cs_ef1a_imon=2.94397E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.35159E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11417E1
os_restr1_imon=4.25949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14882E1
os_ea1_imon=2.3539E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23463E0
cs_ionrep_imon=1.18701E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93626E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.98739E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=4.01704E-8
tplens_vset=1.4E-1
tplens_vmon=1.66265E0
tplens_imon=-2.96573E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26332E1
iondef3_imon=1.50073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.55688E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02995E2
lens6_imon=2.98147E-4
ql6_vset=1.0E-1
ql6_vmon=9.5439E-2
ql6_imon=9.03845E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27955E0
ionrepsh_imon=1.77588E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3362E1
lens5b_imon=2.16597E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7472E1
cs_ef2b_imon=3.13709E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52413E0
os_ea2_imon=-7.72011E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00731E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7142E1
cs_ef2a_imon=3.14794E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07951E0
os_ef2alow_imon=-2.48824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23206E-1
os_ef2bup_imon=-5.40745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11953E1
os_restr2_imon=3.41703E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.28244E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.24635E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.11813E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.08391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.21222E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81927E-1
olens1_imon=7.85411E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.137E0
cs_ionaccel_imon=-1.78837E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47451E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.36933E-1
window_imon=-8.67698E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82688E2
mask1_imon=2.39166E-4
mask2_vset=0.0E0
mask2_vmon=-1.86562E1
mask2_imon=-7.66649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.4789E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.65156E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.28797E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42435E0
defgridb_imon=5.86914E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.43431E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07142E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65357E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30691E1
cs_fil1_imon=9.97274E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62515E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67106E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33116E-2
os_fil2_imon=-2.58765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.25914E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3382E-1
cs_fil2_imon=-2.43795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.74829E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.42969E-1
res40_imon=-2.55186E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.178E3	0.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80028E1	-3.57628E-4	-8.80011E1	2.38419E-4	4.3869E-3	9.53674E-2	2.73482E1	-3.26596E1	-3.26337E1	2.68447E1	1.201E-7	2.52066E-3	2.52066E-3	6.30171E-3	3.00522E-1
2.0E0	1.10553E5	1.04E2	3.16E2	1.6E2	-7.17007E-2	-8.80027E1	-4.76837E-4	-8.80015E1	9.77516E-4	4.3869E-3	9.54866E-2	2.73265E1	-3.26707E1	-3.26529E1	2.68069E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
3.0E0	1.8E1	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80028E1	-8.34465E-4	-8.8001E1	5.00679E-4	4.24385E-3	9.52721E-2	2.73134E1	-3.26826E1	-3.26402E1	2.68574E1	1.19819E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.01475E-1
4.0E0	2.4007E4	1.7E1	6.55E2	3.98E2	-7.15461E-2	-8.80027E1	-6.19888E-4	-8.80009E1	7.39098E-4	4.36306E-3	9.52721E-2	2.73311E1	-3.26785E1	-3.2606E1	2.68538E1	1.20004E-7	2.50882E-3	2.50882E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80026E1	-5.00679E-4	-8.80007E1	7.15256E-4	4.3869E-3	9.52482E-2	2.73353E1	-3.26744E1	-3.26425E1	2.68132E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80026E1	-3.57628E-4	-8.80008E1	3.57628E-4	4.14848E-3	9.52482E-2	2.73299E1	-3.26655E1	-3.26445E1	2.68251E1	1.19919E-7	2.52364E-3	2.52364E-3	6.32273E-3	2.98937E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80026E1	-3.09944E-4	-8.80011E1	7.62939E-4	4.36306E-3	9.52959E-2	2.73201E1	-3.26482E1	-3.2617E1	2.68737E1	1.20132E-7	2.51203E-3	2.51203E-3	6.33112E-3	2.99353E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80026E1	-2.6226E-4	-8.80009E1	2.14577E-4	4.3869E-3	9.54628E-2	2.73286E1	-3.26534E1	-3.26131E1	2.68138E1	1.19653E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00041E-1
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80025E1	-6.67572E-4	-8.80007E1	5.24521E-4	4.36306E-3	9.5582E-2	2.73121E1	-3.26069E1	-3.26336E1	2.68232E1	1.19919E-7	2.5165E-3	2.5165E-3	6.29211E-3	3.01853E-1
1.3E1	1.3E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80025E1	-4.52995E-4	-8.8001E1	8.58307E-4	4.41074E-3	9.56535E-2	2.73057E1	-3.26296E1	-3.26206E1	2.68701E1	1.20447E-7	2.52106E-3	2.52106E-3	6.31902E-3	3.0147E-1
1.4E1	3.496E3	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80024E1	-5.72205E-4	-8.80013E1	6.67572E-4	4.33922E-3	9.56297E-2	2.73423E1	-3.26608E1	-3.26242E1	2.68274E1	1.20644E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.5E1	1.03E2	1.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80024E1	-8.34465E-4	-8.80011E1	7.86781E-4	4.29153E-3	9.55343E-2	2.73315E1	-3.26488E1	-3.26386E1	2.68046E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0071E-1
1.6E1	5.02E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80026E1	-7.86781E-4	-8.80011E1	5.24521E-4	4.26769E-3	9.55105E-2	2.73363E1	-3.26107E1	-3.26229E1	2.69205E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.02396E-1
1.7E1	1.129E3	1.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80029E1	-5.96046E-4	-8.80009E1	3.8147E-4	4.3869E-3	9.52959E-2	2.73153E1	-3.26963E1	-3.26062E1	2.67625E1	1.19978E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99879E-1
1.8E1	4.61E3	3.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80026E1	-4.52995E-4	-8.80006E1	5.00679E-4	4.00543E-3	9.55343E-2	2.73263E1	-3.26655E1	-3.2626E1	2.68448E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
1.9E1	2.272E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80028E1	-9.53674E-5	-8.8001E1	5.24521E-4	4.17233E-3	9.5129E-2	2.73574E1	-3.26573E1	-3.26206E1	2.66855E1	1.2026E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.97901E-1
2.0E1	2.6988E4	2.0E1	8.08E2	5.58E2	-7.40967E-2	-8.80028E1	-1.90735E-4	-8.80011E1	6.19888E-4	4.22001E-3	9.53436E-2	2.73051E1	-3.26687E1	-3.26098E1	2.66785E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
2.1E1	7.3E1	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80026E1	-4.76837E-5	-8.80008E1	7.86781E-4	4.43459E-3	9.54151E-2	2.73381E1	-3.26478E1	-3.26349E1	2.66738E1	1.19872E-7	2.52027E-3	2.52027E-3	6.34099E-3	2.99613E-1
2.2E1	1.913E3	2.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80027E1	-1.19209E-4	-8.80009E1	5.00679E-4	4.22001E-3	9.52959E-2	2.73003E1	-3.27227E1	-3.2638E1	2.68034E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80027E1	-2.6226E-4	-8.80006E1	5.24521E-4	4.31538E-3	9.5439E-2	2.73279E1	-3.26609E1	-3.26332E1	2.68112E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.99E-1
