[Scan]
initial_time=2016-01-18T18:59:30
final_time=2016-01-18T18:59:51
ip_count=19
run=1024
dataset=4
scan=292
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.75265E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.3843E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.39165E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.33581E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.58955E-8
mult1=-2.19239E-8
mult2=-2.70758E-9
rf_tmon=-4.61566E-3
rf_agc=3.23122E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=5.77009E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=2.00182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53995E1
cs_ef1b_imon=2.8234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04742E1
cs_ea1_imon=2.53896E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96505E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.95567E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03588E1
cs_ea2_imon=1.49496E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=2.93981E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.33906E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.25742E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.35763E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63377E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=1.19827E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91959E2
cs_nozzle_imon=1.93651E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.98558E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20434E0
olens4_imon=4.01907E-8
tplens_vset=1.4E-1
tplens_vmon=1.64864E0
tplens_imon=-4.14704E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26178E1
iondef3_imon=1.49532E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03025E2
lens6_imon=2.98122E-4
ql6_vset=1.0E-1
ql6_vmon=9.50336E-2
ql6_imon=9.50873E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.78768E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51406E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.15965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04915E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11262E1
os_restr2_imon=3.42563E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.28558E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25326E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.10058E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68713E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.25414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=7.86458E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1836E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.47565E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82705E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.67065E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.0151E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.82261E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31434E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33343E1
os_fil1_imon=9.42282E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07365E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6592E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30723E1
cs_fil1_imon=9.94726E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67065E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.96213E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.97734E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22402E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.10638E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=192
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.152E3	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80025E1	-5.72205E-4	-8.80013E1	6.19888E-4	4.57764E-3	9.49144E-2	2.73265E1	-3.26756E1	-3.26278E1	2.67463E1	1.2026E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.0E0	1.10489E5	9.8E1	3.16E2	1.6E2	-7.31692E-2	-8.80026E1	-6.67572E-4	-8.8001E1	4.76837E-4	4.52995E-3	9.55343E-2	2.73584E1	-3.26891E1	-3.26309E1	2.69092E1	1.19978E-7	2.51693E-3	2.51693E-3	6.29624E-3	3.01209E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80026E1	-4.05312E-4	-8.80011E1	6.67572E-4	4.55379E-3	9.53913E-2	2.73284E1	-3.26772E1	-3.2605E1	2.68861E1	1.19775E-7	2.52066E-3	2.52066E-3	6.3245E-3	2.99981E-1
4.0E0	2.3963E4	1.6E1	6.55E2	3.98E2	-7.23964E-2	-8.80026E1	-4.76837E-4	-8.80008E1	4.05312E-4	4.62532E-3	9.55343E-2	2.73173E1	-3.27001E1	-3.25979E1	2.67752E1	1.20109E-7	2.5158E-3	2.5158E-3	6.32799E-3	3.00236E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80026E1	-2.86102E-4	-8.8001E1	6.67572E-4	4.48227E-3	9.56535E-2	2.73213E1	-3.26597E1	-3.26368E1	2.69067E1	1.20297E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80028E1	-6.67572E-4	-8.80015E1	3.8147E-4	4.673E-3	9.56059E-2	2.73694E1	-3.26508E1	-3.26071E1	2.67481E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80027E1	-5.96046E-4	-8.80013E1	2.86102E-4	4.45843E-3	9.53436E-2	2.73237E1	-3.26603E1	-3.26561E1	2.69013E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80028E1	-5.96046E-4	-8.8001E1	3.09944E-4	4.24385E-3	9.5439E-2	2.73261E1	-3.26651E1	-3.26008E1	2.68178E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
1.2E1	9.7E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80028E1	-8.34465E-4	-8.8001E1	6.67572E-4	4.64916E-3	9.52482E-2	2.73183E1	-3.26921E1	-3.26428E1	2.68064E1	1.19705E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80028E1	-6.91414E-4	-8.8001E1	4.76837E-4	4.76837E-3	9.52005E-2	2.73285E1	-3.26729E1	-3.26314E1	2.68851E1	1.19913E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.01085E-1
1.4E1	3.558E3	4.0E0	5.66E2	3.82E2	-7.286E-2	-8.80029E1	-3.09944E-4	-8.80014E1	5.72205E-4	4.55379E-3	9.52959E-2	2.73263E1	-3.26767E1	-3.25983E1	2.67379E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02659E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8003E1	-3.8147E-4	-8.8001E1	4.76837E-5	4.64916E-3	9.5129E-2	2.7308E1	-3.26378E1	-3.2639E1	2.69397E1	1.20069E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.02922E-1
1.6E1	4.84E2	1.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80028E1	-4.76837E-4	-8.80011E1	7.15256E-4	4.72069E-3	9.54628E-2	2.73216E1	-3.26842E1	-3.2645E1	2.6774E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9943E-1
1.7E1	1.119E3	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80028E1	-2.14577E-4	-8.80008E1	7.15256E-4	4.60148E-3	9.55105E-2	2.73541E1	-3.26744E1	-3.26319E1	2.68623E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	4.58E3	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80028E1	-5.96046E-4	-8.80009E1	3.8147E-4	4.33922E-3	9.5439E-2	2.73514E1	-3.26452E1	-3.26633E1	2.68719E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
1.9E1	2.25E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80029E1	-5.24521E-4	-8.80008E1	4.05312E-4	4.24385E-3	9.52721E-2	2.73189E1	-3.26585E1	-3.26368E1	2.68292E1	1.20137E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.00942E-1
2.0E1	2.6708E4	1.5E1	8.08E2	5.58E2	-7.286E-2	-8.80028E1	-3.09944E-4	-8.80009E1	2.6226E-4	4.41074E-3	9.53674E-2	2.73446E1	-3.26502E1	-3.26301E1	2.68214E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
2.1E1	5.2E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80028E1	-3.33786E-4	-8.80012E1	6.67572E-4	4.33922E-3	9.5129E-2	2.73128E1	-3.26791E1	-3.26585E1	2.69038E1	1.19861E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.03185E-1
2.2E1	1.946E3	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80026E1	-3.8147E-4	-8.80011E1	6.4373E-4	4.62532E-3	9.52244E-2	2.73564E1	-3.27003E1	-3.26343E1	2.68106E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80027E1	-2.14577E-4	-8.80012E1	4.05312E-4	4.26769E-3	9.50336E-2	2.73364E1	-3.26649E1	-3.26178E1	2.68713E1	1.20209E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00966E-1
