[Scan]
initial_time=2016-01-18T19:01:22
final_time=2016-01-18T19:01:42
ip_count=19
run=1024
dataset=4
scan=296
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.84274E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-7.81763E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.40119E-9
ql3_vset=
ql3_vmon=-8.80012E1
ql3_imon=-2.31625E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.59052E-8
mult1=-2.50921E-8
mult2=-3.26083E-9
rf_tmon=-1.06681E-3
rf_agc=3.65949E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.91006E-3
ql5_imon=5.78439E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=2.00903E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.85043E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=2.53211E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95784E0
lens1_imon=1.73745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65011E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.48703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84016E1
cs_ef1a_imon=2.92576E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.33461E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=4.27508E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.3414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22326E0
cs_ionrep_imon=1.19142E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91965E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=2.96973E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20418E0
olens4_imon=4.0338E-8
tplens_vset=1.4E-1
tplens_vmon=1.67508E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26559E1
iondef3_imon=1.5065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26987E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03023E2
lens6_imon=2.9813E-4
ql6_vset=1.0E-1
ql6_vmon=9.53913E-2
ql6_imon=9.179E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31278E0
ionrepsh_imon=1.78155E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.14488E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49063E0
os_ea2_imon=-8.54509E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06113E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71588E1
cs_ef2a_imon=3.15497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03113E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.73998E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=3.43175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01665E1
cs_anode2_imon=2.26695E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73272E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66895E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.23872E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.88389E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.84105E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02128E2
cs_ionfocb_imon=1.47547E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.65395E-1
window_imon=-8.57164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82732E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86284E1
mask2_imon=-9.86907E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=8.05694E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.90335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=6.95382E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.16096E0
defgridb_imon=6.26167E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33322E1
os_fil1_imon=9.41729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65897E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30702E1
cs_fil1_imon=9.94702E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63039E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6719E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.79811E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.77892E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.93119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05853E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22246E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34245E-3
inlet_lpb_pmon=3.00886E-1
chamber_ion_pmon=1.20063E-7
chamber_cvt_pmon=2.51556E-3
foreline_cvt_pmon=2.51556E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8452E-1
res40_imon=-2.66635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.164E3	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80029E1	-7.86781E-4	-8.80011E1	2.38419E-5	4.45843E-3	9.5439E-2	2.7337E1	-3.26403E1	-3.26304E1	2.67847E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
2.0E0	1.0989E5	1.07E2	3.16E2	1.6E2	-7.36328E-2	-8.80029E1	-5.24521E-4	-8.80008E1	3.09944E-4	4.62532E-3	9.51767E-2	2.7323E1	-3.26267E1	-3.26273E1	2.68867E1	1.20051E-7	2.52123E-3	2.52123E-3	6.33757E-3	3.00771E-1
3.0E0	2.1E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80028E1	-6.67572E-4	-8.80009E1	3.8147E-4	4.33922E-3	9.52959E-2	2.72962E1	-3.26756E1	-3.26166E1	2.688E1	1.1992E-7	2.51588E-3	2.51588E-3	6.33161E-3	3.02042E-1
4.0E0	2.4208E4	1.3E1	6.55E2	3.98E2	-7.14689E-2	-8.80029E1	-7.39098E-4	-8.8001E1	5.00679E-4	4.02927E-3	9.56297E-2	2.73093E1	-3.26837E1	-3.2611E1	2.69604E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.16233E-2	-8.80026E1	-5.48363E-4	-8.80012E1	2.86102E-4	4.36306E-3	9.55105E-2	2.73321E1	-3.26621E1	-3.26146E1	2.67283E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80027E1	-6.67572E-4	-8.80011E1	3.57628E-4	4.22001E-3	9.54628E-2	2.73104E1	-3.26608E1	-3.26001E1	2.67415E1	1.2054E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.13915E-2	-8.80028E1	-1.0252E-3	-8.80008E1	4.05312E-4	4.45843E-3	9.54151E-2	2.72943E1	-3.26579E1	-3.2635E1	2.66676E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80029E1	-8.34465E-4	-8.80009E1	7.62939E-4	4.33922E-3	9.52482E-2	2.73281E1	-3.26762E1	-3.26402E1	2.6655E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98222E-1
1.2E1	1.07E2	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80028E1	-5.48363E-4	-8.80009E1	8.10623E-4	4.33922E-3	9.53674E-2	2.73157E1	-3.26779E1	-3.26124E1	2.66912E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9943E-1
1.3E1	1.8E1	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80022E1	-3.57628E-4	-8.80011E1	8.10623E-4	4.41074E-3	9.54151E-2	2.73532E1	-3.2632E1	-3.26224E1	2.66773E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00824E-1
1.4E1	3.462E3	1.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80028E1	-7.86781E-4	-8.80011E1	1.04904E-3	4.41074E-3	9.52005E-2	2.73321E1	-3.26849E1	-3.26422E1	2.66586E1	1.19749E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00453E-1
1.5E1	9.7E1	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80025E1	-8.10623E-4	-8.80012E1	9.29832E-4	4.95911E-3	9.52244E-2	2.73267E1	-3.26825E1	-3.26212E1	2.67319E1	1.20278E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.9952E-1
1.6E1	4.9E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.8003E1	-4.52995E-4	-8.80007E1	7.15256E-4	4.57764E-3	9.54866E-2	2.73081E1	-3.26609E1	-3.26428E1	2.70731E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.97445E-1
1.7E1	1.092E3	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80028E1	-6.19888E-4	-8.80009E1	7.62939E-4	4.64916E-3	9.5582E-2	2.7337E1	-3.26644E1	-3.259E1	2.69313E1	1.20017E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.8E1	4.678E3	3.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80029E1	-4.76837E-4	-8.80008E1	6.19888E-4	4.48227E-3	9.5582E-2	2.73213E1	-3.26717E1	-3.26242E1	2.69199E1	1.20209E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.9E1	2.302E3	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80027E1	-3.57628E-4	-8.80007E1	4.05312E-4	4.76837E-3	9.55105E-2	2.73293E1	-3.26183E1	-3.26119E1	2.67149E1	1.19653E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.0E1	2.6853E4	1.2E1	8.08E2	5.58E2	-7.40967E-2	-8.80028E1	-3.09944E-4	-8.80007E1	5.00679E-4	4.43459E-3	9.54628E-2	2.73333E1	-3.26499E1	-3.26303E1	2.66644E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.1E1	5.7E1	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80029E1	-4.52995E-4	-8.80011E1	6.4373E-4	4.36306E-3	9.54151E-2	2.73243E1	-3.26621E1	-3.26122E1	2.69615E1	1.20191E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01209E-1
2.2E1	1.881E3	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80033E1	-5.72205E-4	-8.80011E1	5.48363E-4	4.26769E-3	9.5439E-2	2.73295E1	-3.26559E1	-3.26121E1	2.67698E1	1.20122E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80031E1	-6.19888E-4	-8.80012E1	6.91414E-4	3.91006E-3	9.53913E-2	2.73272E1	-3.26987E1	-3.26559E1	2.66895E1	1.20063E-7	2.51556E-3	2.51556E-3	6.34245E-3	3.00886E-1
