[Scan]
initial_time=2016-01-18T19:04:32
final_time=2016-01-18T19:04:52
ip_count=19
run=1024
dataset=4
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.77464E-6
ql1_vset=
ql1_vmon=-8.80034E1
ql1_imon=-7.26044E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.38116E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.37387E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.59378E-8
mult1=-2.17449E-8
mult2=-2.85834E-9
rf_tmon=-3.64724E-3
rf_agc=3.40546E-2
counter1=4
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=5.38349E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65023E0
bslens_imon=2.43566E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19811E1
lens5a_imon=1.99207E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04769E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5408E1
cs_ef1b_imon=2.83831E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02327E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05338E1
cs_ea1_imon=2.54337E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97101E0
lens1_imon=1.69982E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6479E1
os_ef1alow_imon=2.97843E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03723E1
cs_ea2_imon=1.50423E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84783E1
cs_ef1a_imon=2.94301E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.3418E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11234E1
os_restr1_imon=4.25588E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14962E1
os_ea1_imon=2.3487E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07379E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22679E0
cs_ionrep_imon=1.18965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91951E2
cs_nozzle_imon=1.93502E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.97182E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20413E0
olens4_imon=4.02719E-8
tplens_vset=1.4E-1
tplens_vmon=1.66025E0
tplens_imon=-1.02804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49606E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.55173E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03016E2
lens6_imon=2.9812E-4
ql6_vset=1.0E-1
ql6_vmon=9.55105E-2
ql6_imon=8.97706E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3092E0
ionrepsh_imon=1.76158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3395E1
lens5b_imon=2.17077E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7456E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49868E0
os_ea2_imon=-6.71233E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00697E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71225E1
cs_ef2a_imon=3.16604E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06364E0
os_ef2alow_imon=-2.49048E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14074E-1
os_ef2bup_imon=-5.24622E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11733E1
os_restr2_imon=3.41398E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.2876E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01471E1
cs_anode2_imon=2.24085E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72739E1
iondef1_imon=1.07596E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.08912E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.26335E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81426E-1
olens1_imon=7.82122E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-1.64975E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47211E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5647E1
einzel_imon=7.81628E-6
window_vset=0.0E0
window_vmon=2.6393E-1
window_imon=-8.5183E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82685E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86519E1
mask2_imon=-7.07815E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=6.25114E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.59376E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50161E3
multb_neg_imon=6.42245E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36451E0
defgridb_imon=6.25893E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33327E1
os_fil1_imon=9.42323E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07589E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65967E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30719E1
cs_fil1_imon=9.95167E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62515E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67241E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4142E-2
os_fil2_imon=-2.74309E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93413E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83653E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35944E-1
cs_fil2_imon=-2.47712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.75629E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22475E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40042E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.12679E-1
res40_imon=-2.51773E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=196
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.247E3	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80029E1	-3.57628E-4	-8.80008E1	4.52995E-4	4.31538E-3	9.54866E-2	2.73281E1	-3.2649E1	-3.26036E1	2.68082E1	1.20171E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.02581E-1
2.0E0	1.10429E5	8.7E1	3.16E2	1.6E2	-7.20871E-2	-8.80032E1	-3.8147E-4	-8.80005E1	1.90735E-4	4.3869E-3	9.51767E-2	2.73369E1	-3.26741E1	-3.26236E1	2.68356E1	1.20148E-7	2.51826E-3	2.51826E-3	6.31014E-3	2.9991E-1
3.0E0	1.1E1	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80032E1	-4.29153E-4	-8.80006E1	4.05312E-4	4.43459E-3	9.51767E-2	2.736E1	-3.26779E1	-3.26166E1	2.68574E1					
4.0E0	2.4195E4	1.5E1	6.55E2	3.98E2	-7.23964E-2	-8.80031E1	-2.6226E-4	-8.80004E1	3.8147E-4	4.55379E-3	9.51767E-2	2.73434E1	-3.26478E1	-3.26325E1	2.68388E1	1.19927E-7	2.51686E-3	2.51686E-3	6.30202E-3	2.99047E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80031E1	-4.05312E-4	-8.80007E1	6.4373E-4	4.74453E-3	9.5129E-2	2.73088E1	-3.267E1	-3.26182E1	2.68234E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80032E1	-4.52995E-4	-8.80006E1	1.43051E-4	4.45843E-3	9.52959E-2	2.73189E1	-3.26122E1	-3.26564E1	2.68792E1	1.20196E-7	2.5145E-3	2.5145E-3	6.31696E-3	2.99562E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.8003E1	-3.57628E-4	-8.80006E1	5.72205E-4	4.48227E-3	9.54628E-2	2.73141E1	-3.26663E1	-3.26164E1	2.68556E1	1.2005E-7	2.51621E-3	2.51621E-3	6.33211E-3	3.00139E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.8003E1	-2.86102E-4	-8.80006E1	6.4373E-4	4.64916E-3	9.56059E-2	2.73021E1	-3.26723E1	-3.26044E1	2.67998E1	1.20244E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01742E-1
1.2E1	1.04E2	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.8003E1	-3.09944E-4	-8.80008E1	4.29153E-4	4.24385E-3	9.5439E-2	2.73225E1	-3.26663E1	-3.26182E1	2.68406E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80032E1	-4.76837E-4	-8.80008E1	4.76837E-5	4.45843E-3	9.53913E-2	2.73351E1	-3.26549E1	-3.26032E1	2.68238E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.03449E-1
1.4E1	3.493E3	2.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80029E1	-7.86781E-4	-8.80006E1	5.00679E-4	4.26769E-3	9.55105E-2	2.73234E1	-3.26638E1	-3.26461E1	2.68526E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
1.5E1	1.23E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80027E1	-9.05991E-4	-8.80008E1	4.76837E-4	4.48227E-3	9.54866E-2	2.73237E1	-3.26284E1	-3.26356E1	2.6876E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.6E1	5.33E2	2.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80029E1	-5.00679E-4	-8.80008E1	6.67572E-4	4.64916E-3	9.52005E-2	2.73269E1	-3.26779E1	-3.26183E1	2.68454E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3533E-3	3.00838E-1
1.7E1	1.077E3	2.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80033E1	-6.4373E-4	-8.80008E1	5.72205E-4	4.60148E-3	9.51529E-2	2.73255E1	-3.26723E1	-3.26122E1	2.68436E1					
1.8E1	4.711E3	4.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80032E1	-5.24521E-4	-8.80008E1	1.90735E-4	4.62532E-3	9.51052E-2	2.73538E1	-3.26609E1	-3.2641E1	2.68238E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.9E1	2.302E3	1.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80029E1	-4.52995E-4	-8.80005E1	1.43051E-4	4.69685E-3	9.55105E-2	2.73369E1	-3.27065E1	-3.26831E1	2.68136E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
2.0E1	2.6894E4	2.3E1	8.08E2	5.58E2	-7.37103E-2	-8.8003E1	-9.29832E-4	-8.80009E1	2.38419E-4	4.36306E-3	9.52482E-2	2.73252E1	-3.26408E1	-3.26413E1	2.68238E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.02133E-1
2.1E1	5.4E1	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80032E1	-5.48363E-4	-8.80009E1	2.14577E-4	4.69685E-3	9.54628E-2	2.73151E1	-3.26638E1	-3.26472E1	2.68557E1	1.2033E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9926E-1
2.2E1	1.93E3	3.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80033E1	-3.57628E-4	-8.80007E1	3.33786E-4	4.22001E-3	9.54628E-2	2.7352E1	-3.2629E1	-3.26068E1	2.68316E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9841E-1
2.3E1	4.0E0	1.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80034E1	-5.00679E-4	-8.80008E1	1.66893E-4	4.45843E-3	9.55105E-2	2.72739E1	-3.26825E1	-3.262E1	2.68064E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.97394E-1
