[Scan]
initial_time=2016-01-18T19:08:34
final_time=2016-01-18T19:08:54
ip_count=19
run=1024
dataset=4
scan=312
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.90017E-6
ql1_vset=
ql1_vmon=-8.80031E1
ql1_imon=-6.96838E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.39878E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.2144E-9
ql4_vset=
ql4_vmon=7.86781E-4
ql4_imon=1.58741E-8
mult1=-1.63796E-8
mult2=-2.63507E-9
rf_tmon=-4.16143E-3
rf_agc=3.36395E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.81789E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.32735E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=2.01766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12506E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.84656E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02001E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=2.5245E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97933E0
lens1_imon=1.39649E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64546E1
os_ef1alow_imon=2.97712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.48179E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84356E1
cs_ef1a_imon=2.89362E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.35507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.29413E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.35213E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63727E1
os_ef1bup_imon=3.10238E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22378E0
cs_ionrep_imon=1.20572E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91957E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01626E1
cs_anode1_imon=2.95908E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=4.03019E-8
tplens_vset=1.4E-1
tplens_vmon=1.67919E0
tplens_imon=-2.59954E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26449E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2649E1
iondef2_imon=1.554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03014E2
lens6_imon=2.98119E-4
ql6_vset=1.0E-1
ql6_vmon=9.50813E-2
ql6_imon=9.32527E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27038E0
ionrepsh_imon=1.78087E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.13565E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51165E0
os_ea2_imon=-8.1918E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00584E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.16678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05426E0
os_ef2alow_imon=-2.47456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81108E-1
os_ef2bup_imon=-5.33362E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11241E1
os_restr2_imon=3.435E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02051E1
cs_anode2_imon=2.24714E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7321E1
iondef1_imon=1.11405E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.09786E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.29416E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.89071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1095E0
cs_ionaccel_imon=-1.80933E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47315E-4
einzel_vset=-2.1E1
einzel_vmon=-2.566E1
einzel_imon=7.68076E-6
window_vset=0.0E0
window_vmon=2.46709E-1
window_imon=-9.17645E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8648E1
mask2_imon=-6.45185E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92598E3
multa_neg_imon=7.60461E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.8578E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50091E3
multb_neg_imon=7.40641E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47643E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33355E1
os_fil1_imon=9.45911E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65807E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3071E1
cs_fil1_imon=9.9519E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62543E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68447E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.81504E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34927E-1
cs_fil2_imon=-3.28683E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.82116E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2245E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.8903E-1
res40_imon=-2.39317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.152E3	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80033E1	-6.4373E-4	-8.80008E1	4.76837E-4	4.24385E-3	9.52244E-2	2.73193E1	-3.26608E1	-3.26036E1	2.68046E1	1.19902E-7	2.52061E-3	2.52061E-3	6.34518E-3	3.00453E-1
2.0E0	1.11019E5	1.12E2	3.16E2	1.6E2	-7.34782E-2	-8.80035E1	-6.4373E-4	-8.80007E1	-1.90735E-4	4.22001E-3	9.52005E-2	2.73222E1	-3.26364E1	-3.26248E1	2.68358E1	1.20209E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
3.0E0	1.9E1	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80034E1	-7.39098E-4	-8.80011E1	5.96046E-4	4.43459E-3	9.52721E-2	2.7334E1	-3.26927E1	-3.25912E1	2.68852E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00041E-1
4.0E0	2.458E4	1.8E1	6.55E2	3.98E2	-7.37874E-2	-8.80035E1	-4.76837E-4	-8.80008E1	-4.76837E-5	4.24385E-3	9.51529E-2	2.72732E1	-3.26685E1	-3.26537E1	2.68424E1	1.198E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80034E1	-7.15256E-4	-8.80007E1	5.48363E-4	4.02927E-3	9.53197E-2	2.73086E1	-3.26472E1	-3.26396E1	2.68424E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80032E1	-9.29832E-4	-8.80007E1	5.24521E-4	4.3869E-3	9.53436E-2	2.73526E1	-3.26633E1	-3.26092E1	2.68016E1	1.19705E-7	2.52099E-3	2.52099E-3	6.3514E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.45602E-2	-8.80032E1	-9.05991E-4	-8.80009E1	3.09944E-4	4.07696E-3	9.57251E-2	2.72941E1	-3.26689E1	-3.26627E1	2.68475E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80029E1	-1.07288E-3	-8.80009E1	6.19888E-4	4.3869E-3	9.5129E-2	2.73193E1	-3.26608E1	-3.26001E1	2.68673E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02133E-1
1.2E1	9.5E1	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80031E1	-7.62939E-4	-8.80006E1	1.43051E-4	4.76837E-3	9.4986E-2	2.73141E1	-3.2632E1	-3.2629E1	2.68376E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.8003E1	-4.29153E-4	-8.80005E1	9.53674E-4	4.55379E-3	9.52482E-2	2.73552E1	-3.26343E1	-3.25995E1	2.68226E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00563E-1
1.4E1	3.509E3	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80031E1	-4.76837E-4	-8.80007E1	2.6226E-4	4.48227E-3	9.4986E-2	2.7358E1	-3.26885E1	-3.26416E1	2.68508E1	1.21083E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01223E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80027E1	-7.62939E-4	-8.80006E1	7.39098E-4	4.8399E-3	9.52721E-2	2.73123E1	-3.26404E1	-3.26218E1	2.6855E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.6E1	5.04E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80029E1	-1.23978E-3	-8.80008E1	5.72205E-4	4.64916E-3	9.54866E-2	2.73057E1	-3.26386E1	-3.26044E1	2.6849E1	1.19601E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9926E-1
1.7E1	1.13E3	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80032E1	-9.53674E-4	-8.80008E1	5.24521E-4	4.76837E-3	9.52244E-2	2.73351E1	-3.26543E1	-3.26176E1	2.68298E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
1.8E1	4.738E3	5.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80029E1	-5.72205E-4	-8.80008E1	2.14577E-4	4.48227E-3	9.52005E-2	2.73201E1	-3.26801E1	-3.26284E1	2.68106E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
1.9E1	2.351E3	1.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80031E1	-7.39098E-4	-8.80008E1	6.67572E-4	4.26769E-3	9.52005E-2	2.73446E1	-3.26697E1	-3.26236E1	2.68526E1	1.20671E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
2.0E1	2.6843E4	1.6E1	8.08E2	5.58E2	-7.29374E-2	-8.80031E1	-6.67572E-4	-8.80009E1	5.24521E-4	4.50611E-3	9.52005E-2	2.73363E1	-3.26603E1	-3.26517E1	2.68274E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.1E1	6.0E1	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80033E1	-6.91414E-4	-8.80008E1	7.39098E-4	4.48227E-3	9.51529E-2	2.7337E1	-3.26661E1	-3.26189E1	2.68274E1	1.20122E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.01609E-1
2.2E1	1.956E3	1.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80028E1	-1.04904E-3	-8.8001E1	8.82149E-4	4.50611E-3	9.52005E-2	2.73104E1	-3.26638E1	-3.26172E1	2.68499E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.02396E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80031E1	-9.05991E-4	-8.80007E1	7.86781E-4	4.62532E-3	9.50813E-2	2.7321E1	-3.2649E1	-3.26449E1	2.68022E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0148E-1
