[Scan]
initial_time=2016-01-18T19:11:15
final_time=2016-01-18T19:11:34
ip_count=19
run=1024
dataset=4
scan=318
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.80478E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-6.72352E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.4048E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.19619E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.58513E-8
mult1=-1.78798E-8
mult2=-2.61681E-9
rf_tmon=-4.206E-3
rf_agc=3.26727E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.75006E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60073E0
bslens_imon=2.34505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12545E2
lens4a_imon=2.05281E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54097E1
cs_ef1b_imon=2.84647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04638E2
lens23_imon=1.01799E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.50928E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0159E0
lens1_imon=2.15392E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64813E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.44746E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.9463E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.36672E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.24409E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14727E1
os_ea1_imon=2.34293E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07136E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=1.21988E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92004E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=3.00649E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20446E0
olens4_imon=4.04713E-8
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.51471E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.56568E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.97971E-4
ql6_vset=1.0E-1
ql6_vmon=9.57966E-2
ql6_imon=9.60481E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.7876E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34153E1
lens5b_imon=2.20065E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74309E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52522E0
os_ea2_imon=-9.00587E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00425E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.1456E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12063E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2145E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11472E1
os_restr2_imon=3.4195E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23019E2
cs_ionfoca_imon=6.30884E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02097E1
cs_anode2_imon=2.22875E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73496E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68489E1
iondef4_imon=1.08521E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.34209E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.93757E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16978E0
cs_ionaccel_imon=-1.70049E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.4257E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8269E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-8.28332E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92658E3
multa_neg_imon=7.16927E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.4543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50091E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61226E0
defgridb_imon=5.94817E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33262E1
os_fil1_imon=9.39387E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06674E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6669E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30724E1
cs_fil1_imon=9.95531E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62972E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.68514E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24325E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.27374E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.34762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.37905E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.28368E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.222E3	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80033E1	-5.24521E-4	-8.80006E1	2.14577E-4	4.64916E-3	9.55343E-2	2.72991E1	-3.2602E1	-3.26392E1	2.6834E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.97901E-1
2.0E0	1.11428E5	1.15E2	3.16E2	1.6E2	-7.201E-2	-8.80033E1	-5.48363E-4	-8.80009E1	-2.38419E-5	4.48227E-3	9.53674E-2	2.72992E1	-3.26419E1	-3.25959E1	2.6831E1	1.198E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99175E-1
3.0E0	2.5E1	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80035E1	-4.05312E-4	-8.80006E1	1.43051E-4	4.41074E-3	9.52959E-2	2.73578E1	-3.26834E1	-3.25965E1	2.68325E1	1.20226E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00563E-1
4.0E0	2.4608E4	2.0E1	6.55E2	3.98E2	-7.33239E-2	-8.8003E1	-5.00679E-4	-8.80011E1	6.4373E-4	4.76837E-3	9.52244E-2	2.72959E1	-3.26174E1	-3.26315E1	2.68016E1	1.20092E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8003E1	-3.57628E-4	-8.80009E1	5.96046E-4	4.57764E-3	9.47475E-2	2.73075E1	-3.26639E1	-3.26464E1	2.68298E1	1.20122E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80034E1	-5.96046E-4	-8.80008E1	6.19888E-4	4.41074E-3	9.50336E-2	2.73267E1	-3.26891E1	-3.26218E1	2.68532E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80033E1	-5.96046E-4	-8.80008E1	3.09944E-4	4.45843E-3	9.53674E-2	2.73399E1	-3.26785E1	-3.26101E1	2.68499E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80033E1	-5.72205E-4	-8.80012E1	9.53674E-5	4.45843E-3	9.53913E-2	2.73293E1	-3.2659E1	-3.2639E1	2.684E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00453E-1
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80035E1	-5.48363E-4	-8.80011E1	5.00679E-4	4.52995E-3	9.51529E-2	2.72739E1	-3.27227E1	-3.26536E1	2.68767E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80031E1	-6.91414E-4	-8.80013E1	2.86102E-4	4.72069E-3	9.55105E-2	2.73735E1	-3.26832E1	-3.26077E1	2.68175E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
1.4E1	3.527E3	4.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80032E1	-8.34465E-4	-8.80011E1	3.09944E-4	4.74453E-3	9.53913E-2	2.73091E1	-3.265E1	-3.2611E1	2.68487E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02511E-1
1.5E1	1.04E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80032E1	-9.05991E-4	-8.80012E1	4.29153E-4	4.55379E-3	9.53197E-2	2.73461E1	-3.26927E1	-3.26401E1	2.67866E1	1.19913E-7	2.51428E-3	2.51428E-3	6.3168E-3	3.01048E-1
1.6E1	5.03E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.8003E1	-7.86781E-4	-8.80006E1	9.53674E-5	4.43459E-3	9.51529E-2	2.7328E1	-3.26562E1	-3.26452E1	2.68565E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00197E-1
1.7E1	1.158E3	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80031E1	-5.48363E-4	-8.80011E1	4.05312E-4	4.57764E-3	9.54151E-2	2.73021E1	-3.26921E1	-3.26278E1	2.6863E1	1.20139E-7	2.51121E-3	2.51121E-3	6.31429E-3	2.97524E-1
1.8E1	4.678E3	0.0E0	7.27E2	5.0E2	-7.13143E-2	-8.80032E1	-9.29832E-4	-8.8001E1	2.6226E-4	4.62532E-3	9.57489E-2	2.73027E1	-3.26615E1	-3.26182E1	2.68202E1	1.20517E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.97901E-1
1.9E1	2.351E3	2.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80033E1	-7.15256E-4	-8.8001E1	3.8147E-4	4.74453E-3	9.54151E-2	2.73658E1	-3.26645E1	-3.26038E1	2.68382E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.0E1	2.6983E4	1.4E1	8.08E2	5.58E2	-7.17007E-2	-8.80035E1	-9.53674E-4	-8.80009E1	2.86102E-4	4.8399E-3	9.53674E-2	2.73399E1	-3.26849E1	-3.26224E1	2.684E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
2.1E1	4.5E1	0.0E0	8.49E2	5.88E2	-7.12368E-2	-8.80033E1	-4.76837E-4	-8.80011E1	4.29153E-4	4.48227E-3	9.56774E-2	2.73257E1	-3.26413E1	-3.25947E1	2.68184E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.03449E-1
2.2E1	1.811E3	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80031E1	-9.05991E-4	-8.80008E1	6.91414E-4	4.72069E-3	9.56297E-2	2.73476E1	-3.2652E1	-3.26419E1	2.68376E1	1.20517E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.8003E1	-8.58307E-4	-8.80009E1	4.29153E-4	4.62532E-3	9.57966E-2	2.73496E1	-3.26536E1	-3.26128E1	2.68489E1	1.20122E-7	2.51116E-3	2.51116E-3	6.37905E-3	3.01085E-1
