[Scan]
initial_time=2016-01-18T19:13:12
final_time=2016-01-18T19:13:31
ip_count=19
run=1024
dataset=5
scan=322
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08727E-4
ql1_vset=
ql1_vmon=-8.84318E-1
ql1_imon=1.4593E-8
ql2_vset=
ql2_vmon=-8.97264E-1
ql2_imon=1.89325E-9
ql3_vset=
ql3_vmon=-9.04629E0
ql3_imon=3.95677E-9
ql4_vset=
ql4_vmon=-9.04226E0
ql4_imon=-2.50292E-10
mult1=-1.05278E-8
mult2=-2.83693E-9
rf_tmon=-3.50074E-3
rf_agc=3.36571E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.59045E-9
bslens_vset=-6.2E0
bslens_vmon=-6.78543E0
bslens_imon=2.27493E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.17821E1
lens5a_imon=1.91963E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05758E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04751E2
lens23_imon=1.02485E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03482E1
cs_ea1_imon=1.01975E-5
lens1_vset=-5.0E0
lens1_vmon=-5.27829E0
lens1_imon=3.20419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64855E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.053E1
cs_ea2_imon=1.43553E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.04181E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.37214E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.26787E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14626E1
os_ea1_imon=2.29134E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.07947E0
cs_ionrep_imon=9.15073E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92022E2
cs_nozzle_imon=1.94338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=1.9635E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20437E0
olens4_imon=3.38745E-8
tplens_vset=1.4E-1
tplens_vmon=1.79692E0
tplens_imon=-4.13684E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.44729E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.62396E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03148E2
lens6_imon=2.98405E-4
ql6_vset=1.0E-1
ql6_vmon=9.51052E-2
ql6_imon=4.02498E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21414E0
ionrepsh_imon=7.81377E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3288E1
lens5b_imon=2.17894E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.69469E0
os_ea2_imon=-2.04325E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=1.99969E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.37443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.51483E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.44653E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22927E2
cs_ionfoca_imon=6.2541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72774E1
iondef1_imon=1.19165E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68545E1
iondef4_imon=1.10503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71776E1
olens3_imon=5.23787E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81784E-1
olens1_imon=7.97829E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14876E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47464E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56495E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.47976E-1
window_imon=-7.63461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86236E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92695E3
multa_neg_imon=8.50429E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93643E3
defgrida_imon=6.27847E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=6.8588E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.86013E0
defgridb_imon=6.95797E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.44096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66491E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31623E1
cs_fil1_imon=6.65629E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69015E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72564E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.35925E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.46775E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3945E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22346E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19646E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.26876E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.84438E-1	-8.97288E-1	-9.04682E0	-9.04233E0	4.62532E-3	9.50336E-2	2.73868E1	-3.27801E1	-3.25982E1	2.68186E1	1.19607E-7	2.51581E-3	2.51581E-3	6.35223E-3	3.01475E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09309E0	-8.84318E-1	-8.97336E-1	-9.0466E0	-9.04145E0	4.52995E-3	9.48191E-2	2.73484E1	-3.26392E1	-3.26152E1	2.68268E1	1.1974E-7	2.51603E-3	2.51603E-3	6.2863E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09325E0	-8.84485E-1	-8.97455E-1	-9.04636E0	-9.04193E0	4.55379E-3	9.47952E-2	2.73309E1	-3.26759E1	-3.26579E1	2.68412E1	1.19705E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-8.84557E-1	-8.97193E-1	-9.04617E0	-9.04202E0	4.43459E-3	9.51529E-2	2.73122E1	-3.26372E1	-3.2659E1	2.68394E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09356E0	-8.8439E-1	-8.97312E-1	-9.04593E0	-9.04195E0	4.33922E-3	9.49383E-2	2.73303E1	-3.26693E1	-3.26152E1	2.68346E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.84676E-1	-8.97121E-1	-9.04577E0	-9.04202E0	4.62532E-3	9.51767E-2	2.73586E1	-3.2614E1	-3.26458E1	2.68484E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09387E0	-8.84581E-1	-8.97074E-1	-9.04572E0	-9.04183E0	4.79221E-3	9.51529E-2	2.72799E1	-3.26843E1	-3.25659E1	2.68292E1	1.19809E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09394E0	-8.84557E-1	-8.97193E-1	-9.04584E0	-9.04198E0	4.69685E-3	9.52959E-2	2.73057E1	-3.26603E1	-3.25828E1	2.68148E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09348E0	-8.84676E-1	-8.97121E-1	-9.04596E0	-9.04238E0	4.60148E-3	9.55105E-2	2.72992E1	-3.26968E1	-3.26213E1	2.68169E1	1.19965E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.84795E-1	-8.96883E-1	-9.04601E0	-9.04205E0	4.64916E-3	9.53436E-2	2.73375E1	-3.2685E1	-3.26183E1	2.68142E1	1.19697E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.84891E-1	-8.97384E-1	-9.04613E0	-9.04186E0	4.76837E-3	9.50098E-2	2.73068E1	-3.2677E1	-3.26104E1	2.68679E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.84461E-1	-8.97455E-1	-9.0461E0	-9.04183E0	4.50611E-3	9.47952E-2	2.73719E1	-3.26191E1	-3.26522E1	2.68069E1	1.1969E-7	2.51182E-3	2.51182E-3	6.31798E-3	3.00348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.84366E-1	-8.97217E-1	-9.04613E0	-9.04202E0	4.55379E-3	9.47952E-2	2.73062E1	-3.26394E1	-3.26014E1	2.68244E1	1.19775E-7	2.51611E-3	2.51611E-3	6.30171E-3	3.01065E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.84247E-1	-8.97193E-1	-9.04605E0	-9.04183E0	4.17233E-3	9.47714E-2	2.73032E1	-3.26403E1	-3.2602E1	2.68108E1	1.20064E-7	2.50939E-3	2.50939E-3	6.3074E-3	3.00149E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.84366E-1	-8.97336E-1	-9.04634E0	-9.04136E0	4.36306E-3	9.50336E-2	2.73039E1	-3.27053E1	-3.26104E1	2.67956E1	1.20076E-7	2.52029E-3	2.52029E-3	6.33706E-3	3.01043E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.84247E-1	-8.97145E-1	-9.04622E0	-9.04183E0	4.57764E-3	9.51052E-2	2.72892E1	-3.26767E1	-3.26284E1	2.68441E1	1.19965E-7	2.52099E-3	2.52099E-3	6.35692E-3	3.01085E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.84438E-1	-8.97384E-1	-9.0461E0	-9.04162E0	4.81606E-3	9.52482E-2	2.73568E1	-3.26536E1	-3.26338E1	2.68238E1	1.20158E-7	2.52707E-3	2.52707E-3	6.3074E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09387E0	-8.84199E-1	-8.97479E-1	-9.04632E0	-9.0415E0	4.74453E-3	9.50575E-2	2.73329E1	-3.26457E1	-3.26254E1	2.68412E1	1.20174E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.84342E-1	-8.9736E-1	-9.04632E0	-9.04181E0	4.57764E-3	9.51052E-2	2.72991E1	-3.26428E1	-3.26284E1	2.68412E1	1.19841E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.84318E-1	-8.97264E-1	-9.04629E0	-9.04226E0	4.57764E-3	9.51052E-2	2.72774E1	-3.26372E1	-3.26248E1	2.68545E1	1.19646E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
