[Scan]
initial_time=2016-01-18T19:14:05
final_time=2016-01-18T19:14:25
ip_count=19
run=1024
dataset=5
scan=324
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08754E-4
ql1_vset=
ql1_vmon=-8.82888E-1
ql1_imon=1.39556E-8
ql2_vset=
ql2_vmon=-8.97264E-1
ql2_imon=1.88318E-9
ql3_vset=
ql3_vmon=-9.04596E0
ql3_imon=2.10766E-9
ql4_vset=
ql4_vmon=-9.04226E0
ql4_imon=-7.14898E-11
mult1=-1.03785E-8
mult2=-2.80045E-9
rf_tmon=-3.38888E-3
rf_agc=3.44812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.66596E-9
bslens_vset=-6.2E0
bslens_vmon=-6.84939E0
bslens_imon=3.51109E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19592E1
lens5a_imon=1.92936E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1228E2
lens4a_imon=2.04595E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53935E1
cs_ef1b_imon=3.16578E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04719E2
lens23_imon=1.03242E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.06003E1
cs_ea1_imon=1.0894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.16588E0
lens1_imon=1.96096E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64903E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.43115E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.37867E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.25959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16826E1
os_ea1_imon=2.38611E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63395E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.17519E0
cs_ionrep_imon=8.57605E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91809E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.40536E-8
tplens_vset=1.4E-1
tplens_vmon=1.77121E0
tplens_imon=5.29793E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.44557E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2632E1
iondef2_imon=1.53389E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03059E2
lens6_imon=2.99056E-4
ql6_vset=1.0E-1
ql6_vmon=9.5129E-2
ql6_imon=4.05201E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.4017E0
ionrepsh_imon=8.55442E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32456E1
lens5b_imon=2.07824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53208E0
os_ea2_imon=1.068E-8
lens4b_vset=-4.05E2
lens4b_vmon=-4.06258E2
lens4b_imon=2.00965E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08219E0
os_ef2alow_imon=-2.39245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.49681E-1
os_ef2bup_imon=-5.0666E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11093E1
os_restr2_imon=3.45914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23021E2
cs_ionfoca_imon=6.19149E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.12798E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68599E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.30586E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=8.02727E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47478E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=2.63593E-1
window_imon=-7.34629E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82702E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92582E3
multa_neg_imon=8.56884E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=5.50463E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50187E3
multb_neg_imon=8.14706E-5
defgridb_vset=0.0E0
defgridb_vmon=-8.66218E-1
defgridb_imon=5.8507E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.42462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0844E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66879E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31716E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.51544E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69926E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.15007E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.63476E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.21549E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.73708E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.8377E-1	-8.96907E-1	-9.04615E0	-9.0421E0	4.26769E-3	9.52244E-2	2.72084E1	-3.25149E1	-3.27312E1	2.67776E1	1.20137E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01209E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.83937E-1	-8.97431E-1	-9.04617E0	-9.04212E0	4.74453E-3	9.4986E-2	2.73448E1	-3.26326E1	-3.26284E1	2.68346E1	1.20122E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.83818E-1	-8.97074E-1	-9.04608E0	-9.04179E0	4.95911E-3	9.49383E-2	2.7312E1	-3.26498E1	-3.26324E1	2.68354E1	1.20517E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.01738E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.83889E-1	-8.97121E-1	-9.04639E0	-9.04155E0	4.55379E-3	9.48906E-2	2.73352E1	-3.26561E1	-3.26124E1	2.68268E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.83818E-1	-8.97145E-1	-9.04632E0	-9.04155E0	4.55379E-3	9.51529E-2	2.73009E1	-3.26573E1	-3.26242E1	2.6846E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.83818E-1	-8.97336E-1	-9.04629E0	-9.04191E0	4.57764E-3	9.50813E-2	2.73051E1	-3.26331E1	-3.26384E1	2.68359E1	1.19809E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.83651E-1	-8.97264E-1	-9.04634E0	-9.04188E0	4.57764E-3	9.51529E-2	2.72984E1	-3.2664E1	-3.2607E1	2.68229E1	1.19851E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.83508E-1	-8.97431E-1	-9.04617E0	-9.04188E0	4.81606E-3	9.46522E-2	2.73165E1	-3.26392E1	-3.26212E1	2.68496E1	1.20137E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.83341E-1	-8.97074E-1	-9.04605E0	-9.04152E0	4.64916E-3	9.51529E-2	2.72952E1	-3.26486E1	-3.26678E1	2.68076E1	1.20017E-7	2.52428E-3	2.52428E-3	6.3514E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.83317E-1	-8.97002E-1	-9.04641E0	-9.04157E0	4.36306E-3	9.47475E-2	2.73019E1	-3.26922E1	-3.26419E1	2.68603E1	1.20146E-7	2.51623E-3	2.51623E-3	6.31744E-3	3.0101E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.83412E-1	-8.97193E-1	-9.04639E0	-9.04191E0	4.31538E-3	9.48429E-2	2.73098E1	-3.26425E1	-3.26337E1	2.68418E1	1.19937E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.00794E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.83579E-1	-8.96978E-1	-9.04636E0	-9.04198E0	4.93526E-3	9.47952E-2	2.73345E1	-3.26428E1	-3.26524E1	2.68051E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.03185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.83389E-1	-8.97098E-1	-9.04598E0	-9.04205E0	4.55379E-3	9.48191E-2	2.73222E1	-3.26567E1	-3.25912E1	2.68267E1	1.19705E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.83555E-1	-8.97264E-1	-9.04622E0	-9.04207E0	4.52995E-3	9.48906E-2	2.73247E1	-3.26585E1	-3.26193E1	2.6804E1	1.20568E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.03027E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.83365E-1	-8.97217E-1	-9.04605E0	-9.04195E0	4.74453E-3	9.51052E-2	2.73051E1	-3.26549E1	-3.25989E1	2.68226E1	1.20191E-7	2.52139E-3	2.52139E-3	6.28511E-3	3.01742E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.83245E-1	-8.97145E-1	-9.04648E0	-9.04171E0	4.57764E-3	9.50813E-2	2.73562E1	-3.26687E1	-3.2626E1	2.68316E1	1.21135E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.8315E-1	-8.97312E-1	-9.04636E0	-9.04171E0	4.57764E-3	9.51052E-2	2.73231E1	-3.26987E1	-3.26266E1	2.6825E1	1.21591E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.83055E-1	-8.97217E-1	-9.0462E0	-9.0415E0	4.57764E-3	9.50098E-2	2.73316E1	-3.26449E1	-3.26124E1	2.68034E1	1.21497E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01995E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.8315E-1	-8.97241E-1	-9.04627E0	-9.04193E0	4.14848E-3	9.48191E-2	2.73316E1	-3.26862E1	-3.26301E1	2.68516E1	1.2212E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.82888E-1	-8.97264E-1	-9.04596E0	-9.04226E0	4.72069E-3	9.5129E-2	2.73213E1	-3.2632E1	-3.26506E1	2.68599E1	1.21549E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01738E-1
