[Scan]
initial_time=2016-01-18T19:16:45
final_time=2016-01-18T19:17:05
ip_count=19
run=1024
dataset=5
scan=330
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08836E-4
ql1_vset=
ql1_vmon=-8.82435E-1
ql1_imon=1.3653E-8
ql2_vset=
ql2_vmon=-8.97074E-1
ql2_imon=1.91334E-9
ql3_vset=
ql3_vmon=-9.04636E0
ql3_imon=9.17828E-10
ql4_vset=
ql4_vmon=-9.04222E0
ql4_imon=-4.76837E-14
mult1=-9.16835E-9
mult2=-2.60763E-9
rf_tmon=-4.22042E-3
rf_agc=3.41409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.65493E-9
bslens_vset=-6.2E0
bslens_vmon=-6.72954E0
bslens_imon=1.93212E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.17987E1
lens5a_imon=1.92678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12532E2
lens4a_imon=2.0607E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54141E1
cs_ef1b_imon=3.1639E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04802E2
lens23_imon=1.02203E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03161E1
cs_ea1_imon=9.98521E-6
lens1_vset=-5.0E0
lens1_vmon=-5.36516E0
lens1_imon=3.76268E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=2.98636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05608E1
cs_ea2_imon=1.40835E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.04987E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.38106E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11465E1
os_restr1_imon=4.26467E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14577E1
os_ea1_imon=2.25669E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64082E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.09557E0
cs_ionrep_imon=9.06651E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.92006E2
cs_nozzle_imon=1.94424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.019E1
cs_anode1_imon=1.97198E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20401E0
olens4_imon=3.39999E-8
tplens_vset=1.4E-1
tplens_vmon=1.78316E0
tplens_imon=-4.20966E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26508E1
iondef3_imon=1.42918E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26331E1
iondef2_imon=1.66449E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03122E2
lens6_imon=2.98107E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.02453E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.1633E0
ionrepsh_imon=7.75165E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32895E1
lens5b_imon=2.19282E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74507E1
cs_ef2b_imon=3.13522E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.7234E0
os_ea2_imon=-1.85316E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=1.99837E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71463E1
cs_ef2a_imon=3.16664E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09297E0
os_ef2alow_imon=-2.35015E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.38964E-1
os_ef2bup_imon=-5.11572E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11368E1
os_restr2_imon=3.44319E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22867E2
cs_ionfoca_imon=6.27879E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.08397E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72762E1
iondef1_imon=1.22188E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68478E1
iondef4_imon=1.09758E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.29E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81617E-1
olens1_imon=8.02622E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13925E0
cs_ionaccel_imon=-9.33226E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47312E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56473E1
einzel_imon=7.82783E-6
window_vset=0.0E0
window_vmon=2.75607E-1
window_imon=-6.49841E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82682E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86355E1
mask2_imon=-3.73284E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92805E3
multa_neg_imon=7.69018E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93631E3
defgrida_imon=6.7749E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50191E3
multb_neg_imon=5.54201E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.90604E0
defgridb_imon=7.20522E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.42619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07141E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66702E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31758E1
cs_fil1_imon=6.96895E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.42154E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.69622E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.96771E-2
os_fil2_imon=-2.35204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.33589E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3094E-1
cs_fil2_imon=-2.1984E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48334E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22695E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.03545E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.60019E-1
res40_imon=-2.3365E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.82101E-1	-8.96883E-1	-9.0466E0	-9.0421E0	4.62532E-3	9.5129E-2	2.7409E1	-3.27822E1	-3.24908E1	2.68448E1	1.20444E-7	2.52342E-3	2.52342E-3	6.33388E-3	3.00097E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.8222E-1	-8.96716E-1	-9.04646E0	-9.04183E0	4.52995E-3	9.53436E-2	2.73473E1	-3.26646E1	-3.26278E1	2.68294E1	1.21644E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01871E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.82483E-1	-8.97193E-1	-9.0466E0	-9.04205E0	4.3869E-3	9.51052E-2	2.72971E1	-3.26613E1	-3.26197E1	2.68065E1	1.21222E-7	2.53416E-3	2.53416E-3	6.31288E-3	3.00041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.82745E-1	-8.97241E-1	-9.04641E0	-9.04236E0	4.36306E-3	9.47952E-2	2.73956E1	-3.26977E1	-3.26146E1	2.68285E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.82578E-1	-8.97074E-1	-9.04653E0	-9.04198E0	4.45843E-3	9.49621E-2	2.72885E1	-3.26551E1	-3.26207E1	2.68491E1	1.20258E-7	2.51854E-3	2.51854E-3	6.32273E-3	3.01121E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.8253E-1	-8.97217E-1	-9.04658E0	-9.04174E0	4.55379E-3	9.51529E-2	2.73664E1	-3.26621E1	-3.2596E1	2.68286E1	1.20034E-7	2.51347E-3	2.51347E-3	6.3559E-3	3.02042E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.82673E-1	-8.97384E-1	-9.04627E0	-9.04181E0	4.41074E-3	9.48668E-2	2.73129E1	-3.26609E1	-3.26398E1	2.68136E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.82554E-1	-8.97241E-1	-9.04629E0	-9.04176E0	4.45843E-3	9.4986E-2	2.73045E1	-3.26182E1	-3.262E1	2.68256E1	1.20017E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.82101E-1	-8.97121E-1	-9.04627E0	-9.04181E0	4.3869E-3	9.51767E-2	2.7364E1	-3.26446E1	-3.26122E1	2.68388E1	1.20069E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.82244E-1	-8.96907E-1	-9.04632E0	-9.04188E0	4.41074E-3	9.50813E-2	2.72444E1	-3.26747E1	-3.26266E1	2.6837E1	1.19913E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.82173E-1	-8.96955E-1	-9.04653E0	-9.042E0	4.24385E-3	9.50575E-2	2.73724E1	-3.26639E1	-3.26506E1	2.68274E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.8203E-1	-8.96907E-1	-9.04646E0	-9.04212E0	4.29153E-3	9.50575E-2	2.73493E1	-3.25977E1	-3.2606E1	2.6849E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.82173E-1	-8.9705E-1	-9.04629E0	-9.04174E0	4.55379E-3	9.50098E-2	2.73508E1	-3.26627E1	-3.26038E1	2.68124E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.82149E-1	-8.97121E-1	-9.04653E0	-9.04229E0	4.3869E-3	9.4986E-2	2.73153E1	-3.26296E1	-3.26218E1	2.684E1	1.19653E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.82196E-1	-8.97026E-1	-9.04675E0	-9.04238E0	4.26769E-3	9.48668E-2	2.73195E1	-3.26494E1	-3.26158E1	2.68328E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.82387E-1	-8.96883E-1	-9.04658E0	-9.04233E0	4.72069E-3	9.53197E-2	2.73111E1	-3.26819E1	-3.26254E1	2.68274E1	1.19861E-7	2.52757E-3	2.52757E-3	6.34037E-3	3.02659E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.82411E-1	-8.97074E-1	-9.04675E0	-9.04174E0	4.79221E-3	9.51052E-2	2.73736E1	-3.26993E1	-3.26326E1	2.68262E1	1.20017E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.82626E-1	-8.96597E-1	-9.04655E0	-9.04152E0	4.88758E-3	9.48906E-2	2.73135E1	-3.26789E1	-3.26536E1	2.68188E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.82554E-1	-8.96907E-1	-9.04629E0	-9.04193E0	4.673E-3	9.51052E-2	2.7301E1	-3.26697E1	-3.26231E1	2.68306E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.82435E-1	-8.97074E-1	-9.04636E0	-9.04222E0	4.69685E-3	9.52244E-2	2.72762E1	-3.26331E1	-3.26508E1	2.68478E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.03545E-1
