[Scan]
initial_time=2016-01-18T19:18:05
final_time=2016-01-18T19:18:25
ip_count=19
run=1024
dataset=5
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.5
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.81743E-1
ql1_imon=1.3591E-8
ql2_vset=
ql2_vmon=-8.9674E-1
ql2_imon=1.90853E-9
ql3_vset=
ql3_vmon=-9.04665E0
ql3_imon=7.41565E-10
ql4_vset=
ql4_vmon=-9.04164E0
ql4_imon=3.89338E-11
mult1=-9.98679E-9
mult2=-2.87787E-9
rf_tmon=-3.49853E-3
rf_agc=3.46065E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.74139E-9
bslens_vset=-6.2E0
bslens_vmon=-6.57722E0
bslens_imon=2.12679E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=2.03931E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12515E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53881E1
cs_ef1b_imon=3.16362E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01861E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04207E1
cs_ea1_imon=1.10779E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44406E0
lens1_imon=3.08571E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.32913E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=3.05983E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.37606E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11592E1
os_restr1_imon=4.26968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14212E1
os_ea1_imon=2.34573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08109E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2503E0
cs_ionrep_imon=9.7765E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91967E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20432E0
olens4_imon=3.39606E-8
tplens_vset=1.4E-1
tplens_vmon=1.60598E0
tplens_imon=-5.80532E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2681E1
iondef3_imon=1.5256E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26666E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98108E-4
ql6_vset=1.0E-1
ql6_vmon=9.52244E-2
ql6_imon=4.11154E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23708E0
ionrepsh_imon=8.58686E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34343E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.53689E0
os_ea2_imon=-8.25669E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06046E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.16398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.14949E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11304E1
os_restr2_imon=3.45338E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73329E1
iondef1_imon=1.1132E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68511E1
iondef4_imon=1.10575E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.31582E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81283E-1
olens1_imon=8.01409E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47424E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-7.995E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82674E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=8.2516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.78078E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50021E3
multb_neg_imon=8.20474E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.71134E0
defgridb_imon=6.16073E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.42841E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66886E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31789E1
cs_fil1_imon=7.12481E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.90587E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6953E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.08691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.88511E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22738E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.2212E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.01939E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.82077E-1	-8.97121E-1	-9.04632E0	-9.04205E0	4.55379E-3	9.51052E-2	2.72049E1	-3.26069E1	-3.26816E1	2.68204E1	1.20055E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9892E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.82077E-1	-8.97527E-1	-9.04655E0	-9.04238E0	4.52995E-3	9.49144E-2	2.737E1	-3.2645E1	-3.26474E1	2.68256E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.81958E-1	-8.97241E-1	-9.04639E0	-9.0421E0	4.50611E-3	9.50575E-2	2.73248E1	-3.26301E1	-3.26277E1	2.68099E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.82053E-1	-8.97312E-1	-9.04653E0	-9.04229E0	4.52995E-3	9.55343E-2	2.73442E1	-3.26657E1	-3.25954E1	2.68274E1	1.1964E-7	2.51287E-3	2.51287E-3	6.33919E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.82339E-1	-8.97193E-1	-9.04646E0	-9.04205E0	4.74453E-3	9.48668E-2	2.73303E1	-3.26669E1	-3.26272E1	2.68262E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.8222E-1	-8.96859E-1	-9.04675E0	-9.04183E0	4.50611E-3	9.52244E-2	2.73051E1	-3.26536E1	-3.26086E1	2.68226E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.82339E-1	-8.97074E-1	-9.04644E0	-9.04207E0	4.81606E-3	9.50098E-2	2.73183E1	-3.26633E1	-3.26338E1	2.68569E1	1.20278E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.82316E-1	-8.96931E-1	-9.0466E0	-9.04186E0	4.62532E-3	9.4986E-2	2.73147E1	-3.26266E1	-3.2599E1	2.68268E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.82196E-1	-8.97026E-1	-9.04665E0	-9.04205E0	4.55379E-3	9.49383E-2	2.72967E1	-3.26615E1	-3.26134E1	2.68352E1	1.19861E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.9952E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.82292E-1	-8.9705E-1	-9.04689E0	-9.04236E0	4.29153E-3	9.49144E-2	2.73369E1	-3.26873E1	-3.2632E1	2.6846E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98481E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.82244E-1	-8.97002E-1	-9.04684E0	-9.04217E0	4.50611E-3	9.52005E-2	2.73111E1	-3.26741E1	-3.26332E1	2.68484E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.81863E-1	-8.96931E-1	-9.04682E0	-9.04176E0	4.22001E-3	9.52244E-2	2.73442E1	-3.26759E1	-3.26032E1	2.68208E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.81886E-1	-8.96978E-1	-9.04646E0	-9.04193E0	4.3869E-3	9.52005E-2	2.73556E1	-3.26831E1	-3.2629E1	2.68484E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.81696E-1	-8.96788E-1	-9.0467E0	-9.04181E0	4.33922E-3	9.53197E-2	2.72892E1	-3.26708E1	-3.26071E1	2.68412E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.03712E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.8172E-1	-8.97002E-1	-9.04672E0	-9.04179E0	4.50611E-3	9.5129E-2	2.73155E1	-3.26921E1	-3.26034E1	2.68626E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.81529E-1	-8.96931E-1	-9.04667E0	-9.04191E0	4.33922E-3	9.50813E-2	2.73113E1	-3.26634E1	-3.26341E1	2.684E1	1.20849E-7	2.52025E-3	2.52025E-3	6.33919E-3	3.01356E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.81624E-1	-8.97312E-1	-9.04658E0	-9.04176E0	4.12464E-3	9.52482E-2	2.72853E1	-3.26579E1	-3.26272E1	2.6798E1	1.20262E-7	2.51725E-3	2.51725E-3	6.33021E-3	3.00522E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.81863E-1	-8.96978E-1	-9.04665E0	-9.04183E0	4.02927E-3	9.50575E-2	2.73387E1	-3.26343E1	-3.2613E1	2.68615E1	1.20749E-7	2.52977E-3	2.52977E-3	6.30192E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.81624E-1	-8.96764E-1	-9.04622E0	-9.0421E0	4.14848E-3	9.51052E-2	2.73027E1	-3.26679E1	-3.26148E1	2.6834E1	1.2212E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.81743E-1	-8.9674E-1	-9.04665E0	-9.04164E0	4.36306E-3	9.52244E-2	2.73329E1	-3.26666E1	-3.2681E1	2.68511E1	1.2212E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
